公开(公告)号：US07402803B1

公开(公告)日：2008-07-22

申请号：US11448450

申请日：2006-06-07

Applicant: Matthias Wagner ,  Shuyun Wu ,  Eugene Y. Ma

Inventor： Matthias Wagner ,  Shuyun Wu ,  Eugene Y. Ma

IPC: G01J5/00

CPC classification number: G01J5/58 ,  G01J5/00 ,  G01J2005/0077 ,  H01L27/14603 ,  H01L27/1462 ,  H01L27/14649 ,  H01L27/14687

Abstract: A thermally tunable pixel element includes a substrate; a thermally tunable filter island; a thermal absorption structure in direct thermal contact with and extending beyond the thermally tunable filter island; and a thermal isolation structure providing a thermally isolating path between the thermal absorption structure and the substrate.

Abstract translation: 热可调像素元件包括基板; 热可调过滤岛; 与热可调过滤岛直接热接触并延伸超过热可调过滤岛的热吸收结构; 以及提供热吸收结构和衬底之间的热隔离路径的热隔离结构。

公开(公告)号：US06542653B2

公开(公告)日：2003-04-01

申请号：US09805306

申请日：2001-03-12

Applicant: Shuyun Wu ,  Brent E. Burns

Inventor： Shuyun Wu ,  Brent E. Burns

IPC: G02B635

CPC classification number: G02B6/358 ,  G02B6/3518 ,  G02B6/3572 ,  G02B6/3584

Abstract: The present invention is directed to a micro-switch assembly involving a magnetic latching mechanism. In one aspect of the present invention, it involves a micromachined structure that comprises an outer frame, an inner frame pivotally connected to the outer frame and rotates when an external electromagnetic force is applied, and a mechanism for latching the inner frame at a given angle of inclination relative to the outer frame. One embodiment of the present invention involves the use of a magnetic material, such as Permalloy, and permanent magnets to achieve the latching result. A Permalloy piece is attached to the inner frame of the micro-switch assembly and a magnet layer is attached to the outer frame. The magnetic force attracting the Permalloy piece and the magnet layer allows the latching of the two frames to occur in the absence of the external applied electromagnetic force. The use of this magnetic latching mechanism allows a reduction in the use of electric current to maintain a movable frame in a micromachined structure or a micro-switch assembly in a fixed position. It provides greater mechanical and optical stability and less energy consumption. In other embodiments, additional Permalloy pieces can be added to the outer frame to increase the magnetic field, so as to further reduce the electric current necessary for latching and unlatching the frames.

Abstract translation: 本发明涉及一种涉及磁锁机构的微动开关组件。 在本发明的一个方面中，涉及一种微加工结构，其包括外框架，当外部电磁力施加时可枢转地连接到外框架并旋转的内框架，以及用于以预定角度锁定内框架的机构 相对于外框架的倾斜度。 本发明的一个实施例涉及使用诸如坡莫合金的磁性材料和永磁体来实现锁定结果。 一个坡莫合金片连接到微动开关组件的内框架上，一个磁铁层连接在外框上。 吸引坡莫合金片和磁铁层的磁力允许在没有外部施加的电磁力的情况下发生两个框架的锁定。 使用该磁性锁定机构允许减少电流的使用以将微机械结构中的可移动框架或微型开关组件保持在固定位置。 它提供更大的机械和光学稳定性以及更少的能量消耗。 在其它实施例中，可以向外框架添加额外的坡莫合金件以增加磁场，从而进一步减小锁定和解锁框架所需的电流。

公开(公告)号：US5724015A

公开(公告)日：1998-03-03

申请号：US457468

申请日：1995-06-01

Applicant: Yu-Chong Tai ,  Denny K. Miu ,  Weilong Tang ,  Viktoria Temesvary ,  Shuyun Wu

Inventor： Yu-Chong Tai ,  Denny K. Miu ,  Weilong Tang ,  Viktoria Temesvary ,  Shuyun Wu

IPC: H01F7/08 ,  H01H50/00 ,  H01H51/22

CPC classification number: H01H50/005 ,  H01F7/08 ,  H02K99/00 ,  H01H2001/0042 ,  H01H2050/007

Abstract: A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.

Abstract translation: 单晶硅上的体积微机电感应传感器。 本体微加工微型装置具有与用于移动部件的电磁驱动微型致动器集成的可移动部件。 本微型机器的集成电磁微型致动器将平面和/或平面外的毫米级运动中的可移动部件移动到平移或旋转方向。