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公开(公告)号：US07829854B2
公开(公告)日：2010-11-09
申请号：US12176931
申请日：2008-07-21
申请人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
发明人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
CPC分类号： G01J5/58 , G01J5/00 , G01J2005/0077 , H01L27/14603 , H01L27/1462 , H01L27/14649 , H01L27/14687
摘要： A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.
摘要翻译： 一种热成像装置，包括：基板; 以及用于产生热图像的热可调节像素元件阵列，每个热可调谐像素元件包括：多个热可调谐滤光片岛，每个散热岛具有热可调光滤光器，其中该可调谐滤光片岛中的每一个在该可调谐滤光片岛内 像素元件与该可调谐像素元件内的其它可调谐滤光片岛热隔离; 用于吸收入射光学热能的吸收结构; 以及支撑多个可调谐滤光片岛和基片上的吸收结构的机械结构。
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公开(公告)号：US20080088906A1
公开(公告)日：2008-04-17
申请号：US11803044
申请日：2007-05-11
IPC分类号： G02F1/00
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 一种装置包括对预定波长范围内的入射光能具有大致波长依赖的谐振响应的薄膜干涉滤波器结构。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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3.发明授权公开(公告)号：US07697192B2
公开(公告)日：2010-04-13
申请号：US12417430
申请日：2009-04-02
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 薄膜干涉滤光器结构对预定波长范围内的入射光能具有大致波长依赖的谐振响应。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调谐层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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4.发明申请公开(公告)号：US20090195859A1
公开(公告)日：2009-08-06
申请号：US12417430
申请日：2009-04-02
IPC分类号： G02F1/29
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 薄膜干涉滤光器结构对预定波长范围内的入射光能具有大致波长依赖的谐振响应。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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公开(公告)号：US07522328B2
公开(公告)日：2009-04-21
申请号：US11803044
申请日：2007-05-11
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 一种装置包括对预定波长范围内的入射光能具有大致波长依赖的谐振响应的薄膜干涉滤波器结构。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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公开(公告)号：US07402803B1
公开(公告)日：2008-07-22
申请号：US11448450
申请日：2006-06-07
申请人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
发明人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
IPC分类号： G01J5/00
CPC分类号： G01J5/58 , G01J5/00 , G01J2005/0077 , H01L27/14603 , H01L27/1462 , H01L27/14649 , H01L27/14687
摘要： A thermally tunable pixel element includes a substrate; a thermally tunable filter island; a thermal absorption structure in direct thermal contact with and extending beyond the thermally tunable filter island; and a thermal isolation structure providing a thermally isolating path between the thermal absorption structure and the substrate.
摘要翻译： 热可调像素元件包括基板; 热可调过滤岛; 与热可调过滤岛直接热接触并延伸超过热可调过滤岛的热吸收结构; 以及提供热吸收结构和衬底之间的热隔离路径的热隔离结构。
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公开(公告)号：US06526823B2
公开(公告)日：2003-03-04
申请号：US09727017
申请日：2000-11-29
申请人： Yu-Chong Tai , Qiao Lin , Shuyun Wu
发明人： Yu-Chong Tai , Qiao Lin , Shuyun Wu
IPC分类号： G01F168
CPC分类号： G01F1/6845
摘要： A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor or fluid may indicate the condition of the fluid, for example, the flow rate and the presence of gas bubbles and particulate substances.
摘要翻译： 传感器组件具有其中形成有微通道的基底，流体可以通过该通道流动。 至少一个传感器靠近微通道。 至少一个传感器或流体的温度可以指示流体的状态，例如流速和气泡和颗粒物质的存在。
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公开(公告)号：US06672629B2
公开(公告)日：2004-01-06
申请号：US10198013
申请日：2002-07-18
申请人： Yu-Chong Tai , Shuyun Wu , Ellis Fan-chuin Meng
发明人： Yu-Chong Tai , Shuyun Wu , Ellis Fan-chuin Meng
IPC分类号： F16L1700
CPC分类号： B81B1/00 , B81B2201/13
摘要： A micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size, has a body which has a shape conforming the shape of the cavity into which the body must fit. A through hole is defined through the body. The through hole has a size conforming to the first size of the capillary. The capillary is disposable into the through hole so that the capillary is communicated to the orifice without the first and second sizes necessarily being the same. The cavity and the body have conforming slanting surfaces, and in particular the cavity and the body define truncated pyramidal shapes. The cavity and the body each have a truncated pyramidal shape. The pyramidal shape may be square, triangular, or conical. A method of fabricating the micromachined coupler is achieved either by micromaching or micromolding.
摘要翻译： 用于将具有第一尺寸的毛细管耦合到具有形状和第二尺寸的孔口的微机械加工器具有具有与主体必须配合的空腔形状一致的形状的主体。 通孔穿过身体。 通孔的尺寸符合毛细管的第一尺寸。 毛细管一次性进入通孔，使得毛细管连通到孔口，而第一和第二尺寸必须相同。 空腔和主体具有一致的倾斜表面，特别是空腔和主体限定截锥形的形状。 空腔和身体各具有截头锥形。 锥体形状可以是正方形，三角形或圆锥形。 微加工耦合器的制造方法可以通过微机械加工或微型成型来实现。
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公开(公告)号：US06428053B1
公开(公告)日：2002-08-06
申请号：US09516487
申请日：2000-03-01
申请人： Yu-Chong Tai , Shuyun Wu
发明人： Yu-Chong Tai , Shuyun Wu
IPC分类号： F16L5700
CPC分类号： B81B1/00 , B81B2201/13
摘要： A micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size, has a body which has a shape conforming the shape of the cavity into which the body must fit. A through hole is defined through the body. The through hole has a size conforming to the first size of the capillary. The capillary is disposable into the through hole so that the capillary is communicated to the orifice without the first and second sizes necessarily being the same. The cavity and the body have conforming slanting surfaces, and in particular the cavity and the body define truncated pyramidal shapes. The cavity and the body each have a truncated pyramidal shape. The pyramidal shape may be square, triangular, or conical. A method of fabricating the micromachined coupler is achieved either by micromaching or micromolding.
摘要翻译： 用于将具有第一尺寸的毛细管耦合到具有形状和第二尺寸的孔口的微机械加工器具有具有与主体必须配合的空腔形状一致的形状的主体。 通孔穿过身体。 通孔的尺寸符合毛细管的第一尺寸。 毛细管一次性进入通孔，使得毛细管连通到孔口，而第一和第二尺寸必须相同。 空腔和主体具有一致的倾斜表面，特别是空腔和主体限定截锥形的形状。 空腔和身体各具有截头锥形。 锥体形状可以是正方形，三角形或圆锥形。 微加工耦合器的制造方法可以通过微机械加工或微型成型来实现。
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公开(公告)号：US06542653B2
公开(公告)日：2003-04-01
申请号：US09805306
申请日：2001-03-12
申请人： Shuyun Wu , Brent E. Burns
发明人： Shuyun Wu , Brent E. Burns
IPC分类号： G02B635
CPC分类号： G02B6/358 , G02B6/3518 , G02B6/3572 , G02B6/3584
摘要： The present invention is directed to a micro-switch assembly involving a magnetic latching mechanism. In one aspect of the present invention, it involves a micromachined structure that comprises an outer frame, an inner frame pivotally connected to the outer frame and rotates when an external electromagnetic force is applied, and a mechanism for latching the inner frame at a given angle of inclination relative to the outer frame. One embodiment of the present invention involves the use of a magnetic material, such as Permalloy, and permanent magnets to achieve the latching result. A Permalloy piece is attached to the inner frame of the micro-switch assembly and a magnet layer is attached to the outer frame. The magnetic force attracting the Permalloy piece and the magnet layer allows the latching of the two frames to occur in the absence of the external applied electromagnetic force. The use of this magnetic latching mechanism allows a reduction in the use of electric current to maintain a movable frame in a micromachined structure or a micro-switch assembly in a fixed position. It provides greater mechanical and optical stability and less energy consumption. In other embodiments, additional Permalloy pieces can be added to the outer frame to increase the magnetic field, so as to further reduce the electric current necessary for latching and unlatching the frames.
摘要翻译： 本发明涉及一种涉及磁锁机构的微动开关组件。 在本发明的一个方面中，涉及一种微加工结构，其包括外框架，当外部电磁力施加时可枢转地连接到外框架并旋转的内框架，以及用于以预定角度锁定内框架的机构 相对于外框架的倾斜度。 本发明的一个实施例涉及使用诸如坡莫合金的磁性材料和永磁体来实现锁定结果。 一个坡莫合金片连接到微动开关组件的内框架上，一个磁铁层连接在外框上。 吸引坡莫合金片和磁铁层的磁力允许在没有外部施加的电磁力的情况下发生两个框架的锁定。 使用该磁性锁定机构允许减少电流的使用以将微机械结构中的可移动框架或微型开关组件保持在固定位置。 它提供更大的机械和光学稳定性以及更少的能量消耗。 在其它实施例中，可以向外框架添加额外的坡莫合金件以增加磁场，从而进一步减小锁定和解锁框架所需的电流。
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