Abstract:
A polishing pad for use in chemically mechanically polishing a semiconductor substrate enhances the uniformity of the rate at which material is removed from the surface of the semiconductor substrate, thereby ensuring the reproducibility of the chemical mechanical polishing process. The polishing pad has main grooves that divide an upper portion of the pad into a plurality of cells. At least one of the cells includes a land portion and a grooved portion substantially enclosed by the land portion. A respective slurry hole extends through the pad to the grooved portion such that slurry supplied through the slurry hole feeds into the grooved portion but is impeded by the land portion from flowing outwardly of the cell.
Abstract:
Embodiments of the invention provide a method for compensating for an acceleration vector offset of an acceleration detector, a recording medium storing a program for executing the method, and an apparatus adapted to perform the method. The method comprises determining whether the acceleration detector is in a stable resting state; if the acceleration detector is determined to be in a stable resting state, then determining whether any one of at least two orthogonal axes is a main axis; and, if the acceleration detector is determined to be in a steady resting state and one of the at least two orthogonal axes is determined to be a main axis, performing an acceleration vector compensation operation to compensate for the acceleration vector offset of the acceleration detector.
Abstract:
The present invention relates to a diagnosis system for a wireless data communication protocol, and more particularly, to a wireless data communication protocol diagnosis system enabling to compare/analyze simultaneously a trouble caused by the measurement of a wireless data communication protocol by means of synchronizing individual data communication packets with mobile communication protocol measurement data by receiving the data communication packets transmitted individually from a plurality of terminals to connect to a measuring unit and by providing the individual data communication packets with precise time information from a time information providing means.
Abstract:
A cathode ray tube with a panel includes an inside surface having a designated curvature; a central portion having a transmission rate of 45–75%; and an outside surface being substantially flat with a flatness ratio (F) satisfying a mathematical formula of F = Ro Sd × 1.767 , where Ro denotes a diagonal curvature radius of the outside surface, Sd denotes a diagonal length of an effective surface of the panel, and the flatness ratio (F) of the outside surface is greater than 17. The dimensions of the panel are such that the thickness at the central portion of the panel (CFT), the thickness of a vertical axis end (Tv), and the thickness of a diagonal end (Td) satisfy conditions of 1.4