公开(公告)号：US20230089982A1

公开(公告)日：2023-03-23

申请号：US17903581

申请日：2022-09-06

Applicant: Applied Materials, Inc.

Inventor： Phillip Criminale ,  Andrew Myles ,  Chunlei Zhang ,  Vivek B. Shah ,  Upendra Ummethala

IPC: H01L21/687 ,  H01L21/67 ,  B65G47/90 ,  G06N3/08

Abstract: An electronic device manufacturing system includes a transfer chamber, a tool station situated within the transfer chamber, a process chamber coupled to the transfer chamber, and a transfer chamber robot. The transfer chamber robot is configured to transfer substrates to and from the process chamber. The transfer chamber robot is further configured to be coupled to a sensor tool comprising one or more sensors configured to take measurements inside the process chamber. The sensor tool is retrievable from the tool station by an end effector of the transfer chamber robot.

公开(公告)号：US11589474B2

公开(公告)日：2023-02-21

申请号：US16890013

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Philip A. Kraus ,  Andrew Myles ,  Martin Perez-Guzman

IPC: H05K5/03 ,  H05K5/06 ,  H05K1/18 ,  H05K7/14

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.