公开(公告)号：US11721569B2

公开(公告)日：2023-08-08

申请号：US17352097

申请日：2021-06-18

Applicant: Applied Materials, Inc.

Inventor： Andrew Myles ,  Andreas Schmid ,  Phillip A. Criminale ,  Steven E. Babayan

IPC: H01L21/67 ,  G01B11/27 ,  G01B9/02002 ,  G05B23/02 ,  H01L21/687

CPC classification number: H01L21/67259 ,  G01B9/02002 ,  G01B11/272 ,  G05B23/0205 ,  H01L21/68735

Abstract: Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.

公开(公告)号：US20240023246A1

公开(公告)日：2024-01-18

申请号：US18374420

申请日：2023-09-28

Applicant: APPLIED MATERIALS, INC.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Andrew Myles ,  Martin Perez-Guzman

IPC: H05K1/18 ,  H01L21/67 ,  H01L21/66 ,  H01L21/687 ,  G05B13/02

CPC classification number: H05K1/183 ,  H01L21/67253 ,  H01L22/34 ,  H01L21/68707 ,  H01L21/68742 ,  H01L21/67259 ,  G05B13/024 ,  H05K2201/10371 ,  H05K2201/10151

Abstract: A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes storing the sensor data in a memory of the diagnostic disc. The method further includes wirelessly transmitting the sensor data to the computing system, using the wireless communication circuit. The method further includes terminating the secure wireless connection with the computing system and clearing the sensor data from the memory of the diagnostic disc.

公开(公告)号：US20210378100A1

公开(公告)日：2021-12-02

申请号：US16890008

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Andrew Myles ,  Martin Perez-Guzman

IPC: H05K1/18 ,  H01L21/67 ,  H01L21/66 ,  H01L21/687

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

公开(公告)号：US20230413446A1

公开(公告)日：2023-12-21

申请号：US18242629

申请日：2023-09-06

Applicant: Applied Materials, Inc.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Andrew Myles ,  Martin Perez-Guzman ,  Nelson Joseph Gaspard ,  Timothy Joseph Franklin ,  Michael A. Stearns

IPC: H05K1/18 ,  H01L21/66

CPC classification number: H05K1/183 ,  H01L22/34 ,  H05K2201/09027 ,  H05K2201/10037 ,  H05K2201/10098 ,  H05K2201/10151 ,  H05K2201/10159 ,  H01L21/68742

Abstract: A method includes causing, by a computing system comprising at least one processing device, a diagnostic disc placed within a processing chamber to generate sensor data of at least one component of the processing chamber using a set of non-contact sensors of the diagnostic disc, receiving, by the computing system, the sensor data from the diagnostic disc via a wireless connection established between the computing system and the diagnostic disc, determining, by the computing system based on the sensor data, whether at least one of alignment concentricity is skewed with respect to the at least one component, and in response to determining that at least one of alignment or concentricity is skewed with respect to the at least one component, initiating, by the computing system, correction of at least one of alignment or concentricity of the at least one component.

公开(公告)号：US20230199992A1

公开(公告)日：2023-06-22

申请号：US18109660

申请日：2023-02-14

Applicant: APPLIED MATERIALS, INC.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Philip A. Kraus ,  Andrew Myles ,  Martin Perez-Guzman

IPC: H05K5/06 ,  H05K1/18 ,  H05K5/03 ,  H05K7/14

CPC classification number: H05K5/069 ,  H05K1/181 ,  H05K5/03 ,  H05K7/1427 ,  H05K2201/10151 ,  H05K2201/10015

Abstract: A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, at a vacuum of about 0.1 mTorr to about 50 mTorr and a temperature of about −20° C. to about 120° C., by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes wirelessly transmitting the sensor data to the computing system via the secure wireless connection using the wireless communication circuit. The diagnostic disc includes a disc-shaped body, a printed circuit board (PCB), a power source coupled to the PCB, a casing that encapsulates the power source, and a cover positioned over the PCB and the power source.

公开(公告)号：US11935773B2

公开(公告)日：2024-03-19

申请号：US16407520

申请日：2019-05-09

Applicant: Applied Materials, Inc.

Inventor： Andrew Myles ,  Denis M. Koosau ,  Peter Muraoka ,  Phillip A. Criminale

IPC: H01L21/68 ,  H01J37/32 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01J37/32642 ,  H01J37/3288 ,  H01J37/32908 ,  H01J37/32935 ,  H01J37/3299 ,  H01L21/681 ,  H01L21/68721 ,  H01L21/68735 ,  H01L21/68742

Abstract: Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

公开(公告)号：US11924972B2

公开(公告)日：2024-03-05

申请号：US16890008

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Andrew Myles ,  Martin Perez-Guzman

IPC: H05K1/18 ,  G05B13/02 ,  H01L21/66 ,  H01L21/67 ,  H01L21/687

CPC classification number: H05K1/183 ,  G05B13/024 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/68707 ,  H01L21/68742 ,  H01L22/34 ,  H05K2201/10151 ,  H05K2201/10371

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

公开(公告)号：US11367645B2

公开(公告)日：2022-06-21

申请号：US16352349

申请日：2019-03-13

Applicant: Applied Materials, Inc.

Inventor： Phillip Criminale ,  Zhiqiang Guo ,  Andrew Myles

IPC: H01L21/683 ,  H01L21/67 ,  H01L21/66 ,  H05B1/02

Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.

公开(公告)号：US20210378119A1

公开(公告)日：2021-12-02

申请号：US16890013

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Phillip A. Criminale ,  Zhiqiang Guo ,  Philip A. Kraus ,  Andrew Myles ,  Martin Perez-Guzman

IPC: H05K5/06 ,  H05K1/18 ,  H05K7/14 ,  H05K5/03

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

公开(公告)号：US12148645B2

公开(公告)日：2024-11-19

申请号：US18435175

申请日：2024-02-07

Applicant: Applied Materials, Inc.

Inventor： Andrew Myles ,  Denis Martin Koosau ,  Peter Muraoka ,  Phillip Criminale

IPC: H01L21/68 ,  H01J37/32 ,  H01L21/687

Abstract: Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.