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公开(公告)号:US20230070340A1
公开(公告)日:2023-03-09
申请号:US17896340
申请日:2022-08-26
Applicant: ASM IP Holding B.V.
Inventor: YongWoong Jeong , HakJoo Lee , KiKang Kim , JongHyun Ahn , YoungMin Kim , YoungSim Kim
IPC: C23C16/44 , C23C16/455
Abstract: Provided is a method for seasoning a reactor in which a dry cleaning step and a first seasoning step are carried out at the first temperature, then the temperature is raised to a second temperature. The method also comprises a second seasoning step and a substrate processing step are carried out at the second temperature. The seasoning step of the disclosure suppresses dry cleaning byproducts from evaporating, spreading and re-spreading in a reactor. Thus, deterioration of the film quality deposited on a substrate is prevented, extending the wet etch cycle of the reactor and improving the uptime and the efficiency of the reactor.