公开(公告)号：US20240061314A1

公开(公告)日：2024-02-22

申请号：US18373421

申请日：2023-09-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL

IPC: G02F1/35 ,  G03F9/00 ,  H01S3/00 ,  H01S3/067

CPC classification number: G02F1/3528 ,  G03F9/7034 ,  H01S3/0057 ,  H01S3/06741

Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.

公开(公告)号：US20230296829A1

公开(公告)日：2023-09-21

申请号：US18017059

申请日：2021-07-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir ABDOLVAND ,  Cristian Bogdan CRAUS ,  Sebastian Thomas BAUERSCHMIDT

IPC: G02B6/032 ,  G02B6/25 ,  G02B6/02

CPC classification number: G02B6/032 ,  G02B6/25 ,  G02B6/02328 ,  G02B2006/0325

Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

公开(公告)号：US20230146877A1

公开(公告)日：2023-05-11

申请号：US18093717

申请日：2023-01-05

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ

IPC: G02F1/35 ,  G02F1/365

CPC classification number: G02F1/353 ,  G02F1/3501 ,  G02F1/365 ,  G02F1/3503 ,  G02F1/3528

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

公开(公告)号：US20210063894A1

公开(公告)日：2021-03-04

申请号：US17004140

申请日：2020-08-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL ,  Ronald Franciscus Herman HUGERS ,  Jan Adrianus BOER ,  Edwin Johannes Cornelis BOS ,  Andreas Johannes Antonius BROUNS ,  Vitaliy PROSYENTSOV ,  Paul William SCHOLTES - VAN EIJK ,  Paulus Antonius Andreas TEUNISSEN ,  Mahesh Upendra AJGAONKAR

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01M11/00 ,  G01B11/27 ,  G01J1/42

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.