公开(公告)号：US12134091B2

公开(公告)日：2024-11-05

申请号：US18212599

申请日：2023-06-21

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: C23C16/44 ,  B01F27/112 ,  B01F27/70 ,  B01J8/10 ,  B05D1/00 ,  B01F101/22

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US11717800B2

公开(公告)日：2023-08-08

申请号：US16855860

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: B01J8/10 ,  C23C16/44 ,  B05D1/00 ,  B01F27/70 ,  B01F27/112 ,  B01F101/22

CPC classification number: B01J8/10 ,  B01F27/112 ,  B01F27/70 ,  B05D1/60 ,  C23C16/4417 ,  B01F2101/22 ,  B01J2208/00867

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US11692265B2

公开(公告)日：2023-07-04

申请号：US17697845

申请日：2022-03-17

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/074 ,  B01F27/0726 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US11299806B2

公开(公告)日：2022-04-12

申请号：US16855887

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US20200338517A1

公开(公告)日：2020-10-29

申请号：US16855860

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: B01J8/10 ,  B01F7/04 ,  B01F7/00 ,  B05D1/00 ,  C23C16/44

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US20240376596A1

公开(公告)日：2024-11-14

申请号：US18781825

申请日：2024-07-23

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  B01F27/051 ,  B01F27/07 ,  B01F27/072 ,  B01F27/112 ,  B01F27/70 ,  B01J19/00 ,  B01J19/18 ,  C23C16/455

Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

公开(公告)号：US12077856B2

公开(公告)日：2024-09-03

申请号：US18314707

申请日：2023-05-09

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  B01F27/051 ,  B01F27/07 ,  B01F27/072 ,  B01F27/112 ,  B01F27/70 ,  B01J19/00 ,  B01J19/18 ,  C23C16/455

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/0726 ,  B01F27/074 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

公开(公告)号：US20230279543A1

公开(公告)日：2023-09-07

申请号：US18314707

申请日：2023-05-09

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/0726 ,  B01F27/074 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

公开(公告)号：US11674223B2

公开(公告)日：2023-06-13

申请号：US16855871

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/074 ,  B01F27/0726 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.

公开(公告)号：US20220205091A1

公开(公告)日：2022-06-30

申请号：US17697845

申请日：2022-03-17

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.