-
公开(公告)号：US20230070746A1
公开(公告)日：2023-03-09
申请号：US17985778
申请日：2022-11-11
Applicant: Applied Materials, Inc.
Inventor： Steven M. Zuniga , Jay Gurusamy , Andrew J. Nagengast
Abstract: A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, a plurality of segments disposed circumferentially around the substrate mounting surface to provide a collet retaining ring to surround a substrate mounted on the substrate mounting surface, and an outer ring that is vertically movable relative to the plurality of segments. An inner surface of the collet retaining ring is configured to engage a substrate, and the collect retaining ring and outer ring are configured such that vertical motion of the outer ring controls motion of the collet retaining ring between a clamping and unclamping position.
-
公开(公告)号：US20220281064A1
公开(公告)日：2022-09-08
申请号：US17684284
申请日：2022-03-01
Applicant: Applied Materials, Inc.
Inventor： Steven M. Zuniga , Andrew J. Nagengast , Jay Gurusamy
IPC: B24B37/30
Abstract: A carrier head for holding a substrate in a polishing system includes a housing, an annular body that is vertically movable relative to the housing by an actuator, a first annular membrane secured to extending below the annular body to form at least one lower pressurizable chamber between the first annular membrane and the annular body, and at least one pressure supply line connected to the at least one lower pressurizable chamber. The annular body includes an upper portion and at least one lower post projecting downward from the upper portion, with the at least one lower post located inside the at least one lower pressurizable chamber.
-
公开(公告)号：US20210402557A1
公开(公告)日：2021-12-30
申请号：US17350579
申请日：2021-06-17
Applicant: Applied Materials, Inc.
Inventor： Steven M. Zuniga , Jay Gurusamy , Andrew J. Nagengast
IPC: B24B37/30 , H01L21/67 , H01L21/683 , H01L21/3105 , H01L21/321 , H01L21/66 , B24B37/04 , G01B11/24
Abstract: A carrier head includes a housing, a support assembly having a support plate flexibly connected to the housing so as to be vertically movable, a plurality of fluid-impermeable barriers projecting from a bottom of the support plate to define a plurality of recesses that are open at bottom sides thereof, and pneumatic control lines. A volume between the support plate and the housing includes one or more independently pressurizable first chambers to apply pressure on a top surface of the support plate in one or more first zones. The barriers are positioned and configured such that when a planar substrate is loaded into the carrier head the barriers contact the substrate and divide a volume between the support plate and the substrate into a plurality of second chambers. The pneumatic control lines are coupled to the plurality of recesses to provide a plurality of independently pressurizable second zones.
-
公开(公告)号：US20210249276A1
公开(公告)日：2021-08-12
申请号：US17242162
申请日：2021-04-27
Applicant: Applied Materials, Inc.
Inventor： Jeonghoon Oh , Steven M. Zuniga , Andrew J. Nagengast , Samuel Chu-Chiang Hsu , Gautam Shashank Dandavate
IPC: H01L21/321 , B24B41/06 , B24B37/04 , B24B37/32 , B24B37/10 , H01L21/304 , H01L21/306
Abstract: A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners.
-
公开(公告)号：US20210060726A1
公开(公告)日：2021-03-04
申请号：US16689655
申请日：2019-11-20
Applicant: Applied Materials, Inc.
Inventor： Steven M. Zuniga , Jay Gurusamy , Andrew J. Nagengast
Abstract: A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, and a plurality of segments disposed circumferentially around the substrate mounting surface to provide a retaining ring to surround a substrate mounted on the substrate mounting surface. An inner surface of each of the plurality of segments is configured to engage the substrate, and each segment of the plurality of segments of the retaining ring is pivotally connected to the base assembly such that a lower portion of each segment of the retaining ring is swingable toward and away from the substrate.
-
Patent Agency Ranking
公开(公告)号：US20190291238A1
公开(公告)日：2019-09-26
申请号：US16435302
申请日：2019-06-07
Applicant: Applied Materials, Inc.
Inventor： Andrew J. Nagengast , Christopher Heung-Gyun Lee , Thomas Li , Anand N. Iyer , Jie Diao , Huanbo Zhang , Erik S. Rondum, JR. , Wei-Cheng Lee , Jeonghoon Oh
IPC: B24B37/32 , H01L21/687 , H01L21/67 , H01L21/306
Abstract: A retaining ring includes a generally annular body having an inner surface to constrain a substrate, an outer surface, and a bottom surface. The bottom surface has a plurality of channels extending from the outer surface to the inner surface and a plurality of islands separated by the channels and providing a contact area to contact a polishing pad. Each channel includes a recessed region adjacent the outer surface such that the channel is deeper in the recessed region than in a remainder of the channel. The recessed region and the remainder of the channel each have substantially uniform depth.
-
公开(公告)号：US20170001282A1
公开(公告)日：2017-01-05
申请号：US15264412
申请日：2016-09-13
Applicant: Applied Materials, Inc.
Inventor： Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
Abstract: A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
Abstract translation: 用于载体头部的柔性膜具有大致圆形的主要部分，具有下表面，用于连接到基座组件的环形外部部分和从主体部分在与下表面相对的一侧延伸的环形挡片，用于连接到 基座组件。 翼片的至少一个表面具有表面纹理以防止粘附。
-
公开(公告)号：US20250108479A1
公开(公告)日：2025-04-03
申请号：US18376356
申请日：2023-10-03
Applicant: Applied Materials, Inc.
Inventor： Andrew J. Nagengast , Jeonghoon Oh , Kuen-Hsiang Chen , Steven M. Zuniga , Takashi Fujikawa , Jay Gurusamy , Ekaterina A. Mikhaylichenko , Eric L. Lau , Huanbo Zhang , Welarumage Ravin Fernando
IPC: B24B37/32
Abstract: A carrier head for chemical mechanical polishing includes a housing for attachment to a drive shaft, a membrane assembly arranged beneath the lower carrier body, and a flexure. The membrane assembly includes a membrane support and a flexible membrane secured to the membrane support to defining a plurality of pressurizable lower chambers, with the flexible membrane having a lower surface that provides a substrate mounting surface. A flexible seal forms a pressurizable upper chamber between the housing and the membrane support. The flexure connects the membrane support to the housing, and the flexure extends through the pressurizable upper chamber.
-
公开(公告)号：US20230405758A1
公开(公告)日：2023-12-21
申请号：US18461274
申请日：2023-09-05
Applicant: Applied Materials, Inc.
Inventor： Steven M. Zuniga , Jay Gurusamy , Andrew J. Nagengast , Vladimir Galburt
IPC: B24B37/30 , B24B37/10 , B24B37/005 , B24B37/32
CPC classification number: B24B37/30 , B24B37/105 , B24B37/005 , B24B37/32
Abstract: A carrier head for a polishing system includes a housing, a flexible membrane, a first plurality of pressure supply lines, a second plurality of pressure supply lines, and a valve assembly. The flexible membrane defines a multiplicity of independently pressurizable chambers. The valve assembly has a multiplicity of valves with each respective valve of the multiplicity of valves coupled to a respective pressure chamber from the multiplicity of independently pressurizable chambers. Each respective valve is configured to selectively couple the respective pressure chamber to one pressure supply line from a pair of pressure supply lines that include a pressure supply line from the first plurality of pressure supply lines and a pressure supply line from the second plurality of pressure supply lines.
-
公开(公告)号：US11780049B2
公开(公告)日：2023-10-10
申请号：US17359410
申请日：2021-06-25
Applicant: Applied Materials, Inc.
Inventor： Steven M. Zuniga , Jay Gurusamy , Andrew J. Nagengast , Vladimir Galburt
IPC: B24B37/30 , B24B37/10 , B24B37/005 , B24B37/32
CPC classification number: B24B37/30 , B24B37/005 , B24B37/105 , B24B37/32
Abstract: A carrier head for a polishing system includes a housing, a flexible membrane, a first plurality of pressure supply lines, a second plurality of pressure supply lines, and a valve assembly. The flexible membrane defines a multiplicity of independently pressurizable chambers. The valve assembly has a multiplicity of valves with each respective valve of the multiplicity of valves coupled to a respective pressure chamber from the multiplicity of independently pressurizable chambers. Each respective valve is configured to selectively couple the respective pressure chamber to one pressure supply line from a pair of pressure supply lines that include a pressure supply line from the first plurality of pressure supply lines and a pressure supply line from the second plurality of pressure supply lines.
-
-
-
-
-
-
-
-
-
Search Results
51
records
(took 0.015 seconds)
