公开(公告)号：US11508597B2

公开(公告)日：2022-11-22

申请号：US15465326

申请日：2017-03-21

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Martin Hosek ,  Todd Bottomley ,  Ulysses Gilchrist

IPC: H01L21/68 ,  H01L21/677 ,  H01L21/687

Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

公开(公告)号：US09024488B2

公开(公告)日：2015-05-05

申请号：US13646282

申请日：2012-10-05

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Martin Hosek ,  Jairo Terra Moura ,  Jay Krishnasamy ,  Christopher Hofmeister

IPC: H02K7/09 ,  H02K41/02 ,  B25J17/00 ,  H02K29/03

CPC classification number: H02K7/09 ,  H02K29/03 ,  Y10S901/15 ,  Y10S901/23 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

Abstract translation: 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。

公开(公告)号：US08892248B2

公开(公告)日：2014-11-18

申请号：US13914397

申请日：2013-06-10

Applicant: Brooks Automation, Inc.

Inventor： Martin Hosek

IPC: G06F7/00 ,  H01L21/68 ,  H01L21/67 ,  G05B19/421 ,  G05B19/402 ,  G05B19/418

CPC classification number: G05B19/4189 ,  G05B19/402 ,  G05B19/421 ,  G05B2219/36414 ,  G05B2219/36461 ,  H01L21/67294 ,  H01L21/68 ,  Y02P90/28 ,  Y10S901/00

Abstract: A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.

Abstract translation: 一种基板处理系统，包括用于容纳处理装置的至少一部分的壳体，附着到处理装置的至少一个目标，所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点，至少 一个发射机位于所述外壳内，并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标，以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器，所述控制器被配置为接收数据 基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号，并基于所述数据信号来控制所述处理设备的操作特性。

公开(公告)号：US20160018816A1

公开(公告)日：2016-01-21

申请号：US14698110

申请日：2015-04-28

Applicant: Brooks Automation, Inc.

Inventor： Martin Hosek ,  Stuart Beale ,  Roumen Botev ,  Matthew Coady ,  Christopher Hofmeister ,  Mark Ives ,  Jairo Moura ,  Robert Caveney

IPC: G05B19/418

CPC classification number: G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

Abstract translation: 控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。

公开(公告)号：US20130345858A1

公开(公告)日：2013-12-26

申请号：US13914397

申请日：2013-06-10

Applicant: Brooks Automation, Inc.

Inventor： Martin Hosek

IPC: G05B19/418

CPC classification number: G05B19/4189 ,  G05B19/402 ,  G05B19/421 ,  G05B2219/36414 ,  G05B2219/36461 ,  H01L21/67294 ,  H01L21/68 ,  Y02P90/28 ,  Y10S901/00

Abstract: A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.

Abstract translation: 一种基板处理系统，包括用于容纳处理装置的至少一部分的壳体，附着到处理装置的至少一个目标，所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点，至少 一个发射机位于所述外壳内，并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标，以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器，所述控制器被配置为接收数据 基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号，并基于所述数据信号来控制所述处理设备的操作特性。