摘要:
The compounds of the present invention are represented by the following formula (I): wherein M is represented by the following formula: with R1, R2, R3, R4, R5, R6, R7, R8, R10, R11, X1, X2, X3, L, a, b, c, d, e, x, y, and z defined herein.
摘要:
An apparatus for rinsing and drying semiconductor wafers includes a rinsing bath, a drying bath and a drying chamber. The rinsing bath and drying bath are connected by a tunnel unit which prevents semiconductor wafers from being exposed to air while being transferred from the rinsing bath to the drying bath. Thus watermarks are prevented from being formed on the semiconductor wafers. A method for rinsing and drying semiconductor wafers includes rinsing the wafers in a rinsing bath, transferring the wafers to a drying bath through a tunnel unit that prevents the semiconductor wafers from the being exposed to air, and after processing the wafers in the drying bath, transferring the wafers to a drying chamber.
摘要:
Provided is a method for magnifying an image by interpolation. The method including: a) setting m×m local windows and calculating a direction of each m×m local window; b) when a linear direction exists in an m×m local window, considering an edge exists; c) when a linear direction does not exist in the m×m local window, dividing the m×m local window into m/2×m/2 sub windows and calculating directions of the m/2×m/2 sub windows; d) when the directions of the m/2×m/2 sub windows exists toward the center of the m×m local window, considering a corner exists in the m×m local window; and e) selecting pixels located in a virtual line that goes along in the linear direction or in the directions to calculate a new pixel value by using the pixels.
摘要:
An apparatus for rinsing and drying semiconductor wafers includes a rinsing bath, a drying bath and a drying chamber. The rinsing bath and drying bath are connected by a tunnel unit which prevents semiconductor wafers from being exposed to air while being transferred from the rinsing bath to the drying bath. Thus watermarks are prevented from being formed on the semiconductor wafers. A method for rinsing and drying semiconductor wafers includes rinsing the wafers in a rinsing bath, transferring the wafers to a drying bath through a tunnel unit that prevents the semiconductor wafers from the being exposed to air, and after processing the wafers in the drying bath, transferring the wafers to a drying chamber.
摘要:
The compounds of the present invention are represented by the following formula (I): wherein M is represented by the following formula: with R1, R2, R3, R4, R5, R6, R7, R8, R10, R11, X1, X2, X3, L, a, b, c, d, e, x, y, and z defined herein.
摘要:
An open distributed processing structured robot control software architecture is enclosed, which makes it possible to manufacture a user-oriented robot through combination of independent heterogeneous functional modules. The invention involves an open software framework for integrated operation and production of distributed software of the modules, and an autonomous robot control architecture suitable for distributed environments. The software framework indicates underlying software components for robot control and service creation. The invention makes it possible to mass-produce autonomous robots in units of interoperable functional modules. It is also possible to meet various demands of consumers, achieve specialization, and accelerate technology development since the development procedures are specialized in an independent manner and are suitable for manufacturing a wide variety of robot products in small quantities.
摘要:
Provided is a background recovering apparatus for deleting an object of an arbitrary region and recovering a background covered with the object. The apparatus includes a storing block for storing the input image sequence, and storing the three dimensional (3D) position and posture information, and focal length information; a geometric information extracting block for extracting 3D with respect to the background; a background image generating block for generating the background image; and a background image inserting block for recovering the background by inserting the background image into an arbitrary region of a first view point.
摘要:
A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods. And, when erroneous data is detected, or when measured data is missing, a robust regression analysis method and a technique for filtering the erroneous data and the missing data are used.
摘要:
A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods. And, when erroneous data is detected, or when measured data is missing, a robust regression analysis method and a technique for filtering the erroneous data and the missing data are used.
摘要:
A method for estimating three-dimensional positions of human joints includes the steps of: a) marker-free motion capturing a moving figure for obtaining a multiview 2D image of the moving figure, and extracting a 2D feature point corresponding to a bodily end-effector; b) three-dimensionally matching the 2D feature point corresponding to the bodily end-effector, and recovering the 3D coordinates of the bodily end-effector; c) generating a 3D blob of the bodily end-effector, generating a virtual sphere with a radius that is a distance from a center of the 3D blob to a joint, and projecting the virtual sphere onto the obtained multiview 2D image of the moving figure; and d) detecting a coinciding point of a surface of the projected virtual sphere and the multiview 2D image of the moving figure, and estimating a 3D position corresponding to the coinciding point as a 3D position of the joint.