公开(公告)号：US20220154325A1

公开(公告)日：2022-05-19

申请号：US17527228

申请日：2021-11-16

Applicant: ENTEGRIS, INC.

Inventor： Nilesh Gunda ,  Jijun Lao ,  Samuel J. Angeloni ,  Wolfram Neff

IPC: C23C14/34 ,  H01L21/285 ,  H01L21/324 ,  H01L21/02 ,  H01L23/00

Abstract: Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium wherein the yttrium oxide is deposited using an AC power source. The film has a fluorine atomic % of at least 10 at a depth of 30% of the total thickness of the film and the film has no subsurface cracks below the surface of the film visible when using a laser confocal microscope to view the full depth of the film at a magnification of 1000×.

公开(公告)号：US20200378011A1

公开(公告)日：2020-12-03

申请号：US16898149

申请日：2020-06-10

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  David W. Peters ,  Weimin Li ,  Carlo Waldfried ,  Richard A. Cooke ,  Nilesh Gunda ,  I-Kuan Lin

IPC: C23C28/04 ,  C23C16/44 ,  C23C16/455 ,  C23C16/56 ,  C23C16/04 ,  C23C14/24 ,  C23C14/50 ,  C23C16/40

Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that is deleterious to the substrate article, structure, material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.

公开(公告)号：US20190100842A1

公开(公告)日：2019-04-04

申请号：US16123149

申请日：2018-09-06

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  David W. Peters ,  Weimin Li ,  Carlo Waldfried ,  Richard A. Cooke ,  Nilesh Gunda ,  I-Kuan Lin

IPC: C23C28/04 ,  C23C14/50 ,  C23C16/40 ,  C23C16/44 ,  C23C14/24 ,  C23C16/455

Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that deleterious to the substrate article, structure material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.

公开(公告)号：US20160273095A1

公开(公告)日：2016-09-22

申请号：US14870981

申请日：2015-09-30

Applicant: Entegris, Inc.

Inventor： I-Kuan Lin ,  Nilesh Gunda ,  Dennis Radgowski ,  Chandra Venkatraman

IPC: C23C14/48 ,  C23C14/58

CPC classification number: C23C14/48 ,  C23C14/08 ,  C23C14/083 ,  C23C14/58 ,  C23C14/5806 ,  C23C14/5846 ,  H01J37/32467 ,  H01J37/32495

Abstract: Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.

Abstract translation: 提供了具有优异的等离子体耐蚀刻性并且可以延长RIE部件寿命的涂层的制品和方法。 一种制品具有真空兼容的衬底和覆盖至少一部分衬底的保护膜。 膜包含含有钇的氟化金属氧化物。