公开(公告)号：US10707108B2

公开(公告)日：2020-07-07

申请号：US15872335

申请日：2018-01-16

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： William J. Fosnight ,  Stephanie Waite ,  Stephen B. Miner ,  John Robinson

IPC: H01L21/68 ,  H01L21/673 ,  H01L21/677 ,  B08B5/02 ,  B08B9/00 ,  B08B5/00

Abstract: A wafer carrier purge apparatus, an automated mechanical handling system, and a method of handling a wafer carrier during integrated circuit fabrication are provided. The wafer carrier purge apparatus includes a purge plate adapted for insertion into a carrier storage position. The purge plate includes a gas port and a gas nozzle in fluid communication with the gas port. The gas port receives a gas flow. The gas nozzle is adapted to contact an inlet port of a wafer carrier. The purge plate further includes a vacuum port and a vacuum nozzle in fluid communication with the vacuum port, spaced from the gas nozzle. The vacuum nozzle is adapted to capture gas that escapes from the wafer carrier through an outlet port of the wafer carrier. The purge plate is separate and removable from the carrier storage position.

公开(公告)号：US10242895B2

公开(公告)日：2019-03-26

申请号：US15876472

申请日：2018-01-22

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abner Bello ,  Stephanie Waite ,  William J. Fosnight ,  Thomas Beeg

IPC: G01J5/00 ,  H01L21/673 ,  H01L21/66 ,  G01N21/55 ,  G01N21/21 ,  G01J5/02 ,  G01R27/00 ,  H01L21/67 ,  G01J5/08 ,  H01L21/677

Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.

公开(公告)号：US10109516B2

公开(公告)日：2018-10-23

申请号：US15164204

申请日：2016-05-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

IPC: H01L21/677 ,  B65G1/04

Abstract: A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above the overhead rack, a first cross rail movably coupled to the first and second side rails, and a first transport vehicle movably coupled to the first cross rail includes positioning the first transport vehicle above at least one interior window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the interior window to interface with a first load port of a first tool disposed below the overhead rack. The first transport vehicle is positioned above at least one periphery window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the periphery window to interface with a second load port of a second tool disposed below the overhead rack.

公开(公告)号：US20140178160A1

公开(公告)日：2014-06-26

申请号：US14191767

申请日：2014-02-27

Applicant: GLOBALFOUNDRIES Inc.

Inventor： William J. Fosnight ,  Eric Christensen ,  Leslie Marshall ,  Ryan John Gallagher ,  Stephanie Waite ,  Gabriel Gaxiola

IPC: H01L21/677

CPC classification number: H01L21/67733 ,  B65G1/0464 ,  B65G2201/0297 ,  H01L21/677

Abstract: A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.

Abstract translation: 材料处理系统包括限定多个存储位置的架空架。 架空架定义至少一个没有存储位置的内部窗口。 第一和第二侧轨设置在架空架上方。 第一横梁可移动地联接到第一和第二侧轨。 第一运输车辆可移动地联接到第一交叉轨道并且可操作以通过至少一个内部窗口在架空架下方下降。