Photolithographic method and combination including barrier layer
    12.
    发明授权
    Photolithographic method and combination including barrier layer 失效
    光刻方法和组合包括阻挡层

    公开(公告)号:US4663275A

    公开(公告)日:1987-05-05

    申请号:US647295

    申请日:1984-09-04

    CPC classification number: G03F7/091

    Abstract: Photolithographic methods employing a photoresist layer and a contrast enhancing photobleachable layer deposited thereon have certain disadvantages including compatibility and the tendency toward scum formation during stripping of the photobleachable layer. These problems are alleviated by the deposition of an aqueous alkali-soluble polymeric barrier layer such as poly(vinyl alcohol), which is removed simultaneously with the alkaline development step for the photoresist. In a preferred embodiment, the polymeric binder for the photobleachable layer is also water-soluble and is also removed simultaneously with development.

    Abstract translation: 使用沉积在其上的光致抗蚀剂层和对比度增强的光致漂白层的光刻方法具有某些缺点,包括相容性和剥离光可漂白层期间浮渣形成的趋势。 这些问题通过沉积碱性可溶性聚合物阻挡层例如聚(乙烯醇)来缓解,其与用于光致抗蚀剂的碱性显影步骤同时除去。 在优选的实施方案中,用于光致漂白层的聚合物粘合剂也是水溶性的,并且与显影同时被除去。

    Spin castable mixtures useful for making deep-UV contrast enhancement
layers
    16.
    发明授权
    Spin castable mixtures useful for making deep-UV contrast enhancement layers 失效
    用于制备深紫外对比度增强层的旋转浇注混合物

    公开(公告)号:US5196295A

    公开(公告)日:1993-03-23

    申请号:US700355

    申请日:1991-05-07

    Applicant: Gary C. Davis

    Inventor: Gary C. Davis

    CPC classification number: H01F1/15383 G03F7/091 G09B9/326 Y10S430/129

    Abstract: Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing .alpha.-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The .alpha.-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light.

    Abstract translation: 提供了可旋转浇注混合物,其可用于施加到光致抗蚀剂表面上以产生使用α-烷基-N-烷基硝酮与惰性有机粘合剂和溶剂组合的对比增强层。 α-烷基-N-烷基硝酮可以与200-300纳米的紫外光一起使用。

    Contrast enhancement layer compositions, alkylnitrones, and use
    17.
    发明授权
    Contrast enhancement layer compositions, alkylnitrones, and use 失效
    对比增强层组合物,烷基硝基酮和使用

    公开(公告)号:US5002993A

    公开(公告)日:1991-03-26

    申请号:US445914

    申请日:1989-12-04

    CPC classification number: G03F7/091

    Abstract: Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.

    Abstract translation: 提供对比增强组合物,其可用于制造对比增强层光致抗蚀剂复合材料。 该复合材料可用于在UV光照射下制造图案化的光致抗蚀剂,并利用可光漂白的烷基硝基。

    Process for producing nitrones
    18.
    发明授权
    Process for producing nitrones 失效
    生产硝酸镍的方法

    公开(公告)号:US4709107A

    公开(公告)日:1987-11-24

    申请号:US786937

    申请日:1985-10-11

    CPC classification number: C07C291/02

    Abstract: A method for preparing nitrones from mixtures of arylhydroxylamines and alkylhydroxylamines containing zinc oxide solids is provided which does not require filtration of the mixture prior to reaction. This is accomplished by introducing a dilute acid solution to the mixture so as to solubilize the zinc oxide powder. The hydroxylamines within solution may be reacted with an aldehyde to produce a nitrone where the dilute acid dissolves the zinc oxide.

    Abstract translation: 提供了由芳基羟胺和含有氧化锌固体的烷基羟胺的混合物制备硝酮的方法,其不需要在反应之前过滤混合物。 这是通过将稀酸溶液引入混合物中以溶解氧化锌粉末来实现的。 溶液中的羟胺可以与醛反应以产生硝酸盐,其中稀酸溶解氧化锌。

    High molecular weight siloxane polyimides, intermediates therefor, and
methods for their preparation and use
    19.
    发明授权
    High molecular weight siloxane polyimides, intermediates therefor, and methods for their preparation and use 失效
    高分子量硅氧烷聚酰亚胺,其中间体及其制备和使用方法

    公开(公告)号:US4668755A

    公开(公告)日:1987-05-26

    申请号:US639640

    申请日:1984-08-10

    Applicant: Gary C. Davis

    Inventor: Gary C. Davis

    CPC classification number: C08G73/106 C08G77/455 H05K1/0346 H05K3/4676

    Abstract: High molecular weight siloxane polyamic acids and polyimides are prepared by the reaction of dianhydrides with diamines in a polar aprotic solvent, all of the reagents and solvent being highly purified and substantially anhydrous. The polyamic acids may be coated on substrates and baked to form polyimide dielectric layers. When so used, they are free from certain disadvantages of lower molecular weight polymers, especially undercutting and scum formation during photolithography and etching procedures.

    Abstract translation: 高分子量硅氧烷聚酰胺酸和聚酰亚胺是通过二极性与二胺在极性非质子溶剂中的反应制备的,所有的试剂和溶剂都是高度纯化的并且基本上是无水的。 可以将聚酰胺酸涂覆在基材上并烘烤以形成聚酰亚胺电介质层。 当这样使用时,它们没有低分子量聚合物的某些缺点,特别是在光刻和蚀刻过程中的底切和浮渣形成。

    Cyclic process for making hydrogen
    20.
    发明授权
    Cyclic process for making hydrogen 失效
    制氢的循环过程

    公开(公告)号:US4376759A

    公开(公告)日:1983-03-15

    申请号:US233177

    申请日:1981-02-10

    CPC classification number: C01B3/02 Y02P20/129 Y02P20/134

    Abstract: Nitric oxide, an odd-electron molecule, has been found to react with m-phosphoric acid to displace hydrogen and form nitrosyl m-phosphate. The addition of water to the nitrosyl salt regenerates the m-phosphoric acid, half the nitric oxide and the other half as nitrogen dioxide which can then be converted to nitric oxide in an oxidation process. These reactions thus form a cyclic process for obtaining hydrogen from water with low level energy.

    Abstract translation: 已经发现一氧化氮,一个奇数电子分子与m-磷酸反应以置换氢并形成磷酸亚磷酰酯。 向亚硝酰基盐中加入水可再生m-磷酸,一半氧化氮,另一半作为二氧化氮再生,然后在氧化过程中将其转化为一氧化氮。 因此,这些反应形成用于以低能量的水从水中获得氢气的循环过程。

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