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公开(公告)号：US11360391B2
公开(公告)日：2022-06-14
申请号：US16925567
申请日：2020-07-10
Applicant: Gigaphoton Inc.
Inventor： Fumio Iwamoto , Yutaka Shiraishi , Tsukasa Hori
Abstract: A target supply device includes a tank body portion holding a target substance; a communication portion connected to the tank body portion and including a filter that filters the melted target substance and a nozzle that discharges the target substance having passed through the filter; a main heater that heats the tank body portion; a sub-heater that heats the communication portion; and a control unit, the control unit being configured to set the main heater to a temperature higher than a melting point of the target substance before the target substance is melted, to set the sub-heater to a temperature lower than the melting point of the target substance until the target substance in the tank body portion is melted, and to set the sub-heater to a temperature higher than the melting point of the target substance after the target substance in the tank body portion is melted.
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公开(公告)号：US20200209765A1
公开(公告)日：2020-07-02
申请号：US16812831
申请日：2020-03-09
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano , Yutaka Shiraishi
Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.
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公开(公告)号：US10372041B2
公开(公告)日：2019-08-06
申请号：US16261329
申请日：2019-01-29
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Toshihiro Nishisaka
Abstract: A target generation device according to one aspect of the present disclosure includes a tank for containing a target substance, a heater provided at the tank, a nozzle communicating with the inside of the tank, a lid having a gas inlet port communicating with the inside of the tank, and a plurality of shielding plates that are disposed inside the tank and suppress entry of the target substance to the gas inlet port. Each of the shielding plates includes at least one non-shielding region for allowing the gas to pass through. The non-shielding regions of at least two of the shielding plates are arranged at positions in which one of the non-shielding regions of the at least two of the shielding plates is not seen into the other of the non-shielding regions of the at least two of the shielding plates.
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14.发明授权公开(公告)号：US11474433B2
公开(公告)日：2022-10-18
申请号：US16842577
申请日：2020-04-07
Applicant: Gigaphoton Inc.
Inventor： Yuki Takeda , Yutaka Shiraishi
IPC: G03F7/20 , H01L21/027
Abstract: An extreme ultraviolet light generation apparatus that generates plasma by irradiating a target substance with a pulse laser beam and generates extreme ultraviolet light from the plasma includes: a chamber housing a collector mirror configured to condense the extreme ultraviolet light; a gas introduction pipe through which gas is introduced into the chamber; a mass flow controller configured to change the flow rate of the gas; a discharge pump configured to discharge the gas from the chamber; a pressure sensor configured to monitor the pressure in the chamber; and a control unit configured to control the mass flow controller based on the pressure measured by using the pressure sensor. The control unit controls the mass flow controller to increase an increase ratio of the flow rate of the gas entering the chamber as the pressure acquired by the pressure sensor increases.
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公开(公告)号：US11320740B2
公开(公告)日：2022-05-03
申请号：US17228000
申请日：2021-04-12
Applicant: Gigaphoton Inc.
Inventor： Tsukasa Hori , Yutaka Shiraishi , Toshihiro Nishisaka , Hiroshi Someya , Yukio Watanabe
IPC: G03F7/20 , H05G2/00 , H01L21/027
Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
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Patent Agency Ranking
公开(公告)号：US11310899B2
公开(公告)日：2022-04-19
申请号：US17308182
申请日：2021-05-05
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Tsukasa Hori
Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.
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公开(公告)号：US10136509B2
公开(公告)日：2018-11-20
申请号：US15616167
申请日：2017-06-07
Applicant: Gigaphoton Inc.
Inventor： Tsukasa Hori , Yutaka Shiraishi , Shinya Ikesaka , Takanobu Ishihara , Toshiro Umeki
IPC: H05G2/00
Abstract: A target supply device according to a first aspect of the present disclosure is configured to supply a metal target in a plasma generation region and may include a tank configured to house the metal target, a filter having been subjected to a dehydration process, the filter being configured to suppress passage of particles in the metal target housed in the tank, and a nozzle provided with a nozzle hole configured to eject the metal target that has passed through the filter.
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公开(公告)号：US09894744B2
公开(公告)日：2018-02-13
申请号：US15062896
申请日：2016-03-07
Applicant: Gigaphoton Inc.
Inventor： Fumio Iwamoto , Yutaka Shiraishi , Tsukasa Hori , Takuya Ishii
CPC classification number: H05G2/008 , G03F7/70908 , H05G2/005
Abstract: An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target.
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公开(公告)号：US09648715B2
公开(公告)日：2017-05-09
申请号：US15143066
申请日：2016-04-29
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Toshiyuki Hirashita , Shinya Ikesaka
CPC classification number: H05G2/006 , G03F7/70033 , H05G2/005 , H05G2/008
Abstract: A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.
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公开(公告)号：US11363706B2
公开(公告)日：2022-06-14
申请号：US17333538
申请日：2021-05-28
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Toshihiro Nishisaka , Tsukasa Hori
Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.
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