公开(公告)号：US20240393484A1

公开(公告)日：2024-11-28

申请号：US18794569

申请日：2024-08-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tadashi MARUNO ,  Eiji Toda ,  Mao Nakajima ,  Teruo Takahashi ,  Takafumi Higuchi

IPC: G01T1/24 ,  G01T1/208 ,  H04N25/65 ,  H04N25/74 ,  H04N25/75 ,  H04N25/767 ,  H04N25/772 ,  H04N25/778

Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.

公开(公告)号：US12044729B2

公开(公告)日：2024-07-23

申请号：US17606829

申请日：2020-04-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomochika Takeshima ,  Takafumi Higuchi ,  Kazuhiro Hotta

IPC: G01R31/303

CPC classification number: G01R31/303

Abstract: A semiconductor device examination method includes a step of acquiring a first interference waveform based on signals from a plurality of drive elements according to light from a first light beam spot including the plurality of drive elements in a semiconductor device, a step of acquiring a second interference waveform based on signals from the plurality of drive elements according to light from a second light beam spot having a region configured to partially overlap the first spot and including the plurality of drive elements, and a step of separating a waveform signal for each of the drive elements in the first and second spots based on the first and second interference waveforms.