公开(公告)号：US20160320180A1

公开(公告)日：2016-11-03

申请号：US14721914

申请日：2015-05-26

Applicant: Honeywell International Inc.

Inventor： Grant H. Lodden ,  Robert D. Horning

IPC: G01B11/27 ,  G01P15/13 ,  G02B6/43 ,  G02B6/12 ,  G02B6/42

CPC classification number: G01B11/272 ,  B81B2201/0228 ,  B81B2201/04 ,  B81B2203/053 ,  G01C19/5621 ,  G01C19/5656 ,  G01C25/00 ,  G01P15/093 ,  G01P15/13 ,  G01P21/00 ,  G01P2015/0822 ,  G02B6/12 ,  G02B6/4295 ,  G02B6/43 ,  G02B2006/12138

Abstract: System and methods for highly integrated optical readout MEMS sensors are provided. In one embodiment, a method for an integrated waveguide optical-pickoff sensor comprises: launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port.

Abstract translation: 提供了高集成度光读出MEMS传感器的系统和方法。 在一个实施例中，一种用于集成波导光学传感器传感器的方法包括：将由激光光源产生的激光束发射到在第一衬底内单片制造的集成波导光学传感器中，所述集成波导光学传感器包括光输入 端口，耦合端口和光输出端口; 以及通过测量光输出端口处的激光束的衰减来检测激光束从耦合端口到与耦合端口分离的传感器部件之间的间隙的耦合量。

公开(公告)号：US09061891B2

公开(公告)日：2015-06-23

申请号：US14508715

申请日：2014-10-07

Applicant: Honeywell International Inc.

Inventor： Ryan Supino ,  Eugen Cabuz ,  Burgess R. Johnson ,  Robert D. Horning

IPC: G01P21/00 ,  B81C1/00 ,  G01D5/34

CPC classification number: B81C1/00134 ,  B81B2201/03 ,  B81C2203/03 ,  G01D5/34 ,  G01P21/00 ,  Y10T29/49002

Abstract: Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

Abstract translation: 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。

公开(公告)号：US20140014826A1

公开(公告)日：2014-01-16

申请号：US13663057

申请日：2012-10-29

Applicant: HONEYWELL INTERNATIONAL INC.

Inventor： Robert Compton ,  Robert D. Horning ,  Jeff A. Ridley

IPC: G01N21/84 ,  B23P11/00

CPC classification number: G21K1/006 ,  G01C19/58 ,  G01P15/08 ,  G04F5/14 ,  Y10T29/49826

Abstract: System and methods for a vacuum cell apparatus for an atomic sensor are provided. In at least one embodiment, the apparatus comprises a cell wall encircling an enclosed volume, the cell wall having a first open end and a second open end opposite from the first open end and a first panel over the first open end of the cell wall and having a first surface, the first surface facing the enclosed volume and having a first set of diffractive optics therein. Further, the apparatus comprises a second panel over the second open end of the cell wall and having a second surface, the second surface facing the enclosed volume and having a second set of diffractive optics therein; wherein the first set of diffractive optics and the second of diffractive optics are configured to reflect at least one optical beam within the enclosed volume along a predetermined optical path.

Abstract translation: 提供了一种用于原子传感器的真空电池装置的系统和方法。 在至少一个实施例中，该装置包括围绕封闭容积的细胞壁，细胞壁具有第一开放端和与第一开放端相对的第二开口端和在细胞壁的第一开口端上的第一面板， 具有第一表面，所述第一表面面向所述封闭容积并且在其中具有第一组衍射光学元件。 此外，该装置包括在细胞壁的第二开口端上的第二面板，并具有第二表面，第二表面面向封闭容积并且在其中具有第二组衍射光学元件; 其中所述第一组衍射光学器件和所述第二衍射光学器件被配置为沿着预定光学路径反射所述封闭容积内的至少一个光束。