公开(公告)号：US11060865B1

公开(公告)日：2021-07-13

申请号：US16389462

申请日：2019-04-19

Applicant: HRL Laboratories, LLC

Inventor： Lian X. Huang ,  Hung Nguyen ,  Raviv Perahia ,  Logan D. Sorenson ,  Patrick J. Webb ,  David T. Chang

IPC: G01C19/5712

Abstract: Dimensions of a disk resonator gyroscope along the radial line of a resonator can be varied to engineer radial stiffness. An apparatus may comprise: a resonator comprising a plurality of concentric circumferential segments and a plurality of slots formed between the concentric circumferential segments; and at least one support supporting the resonator, wherein a width, in a radial direction, of each of the concentric circumferential segments is varied depending on a distance from the at least one support to the each of the concentric circumferential segments. The apparatus may further comprise radial segments connecting between the concentric circumferential segments. The concentric circumferential segments may have a ring shape.

公开(公告)号：US10655964B2

公开(公告)日：2020-05-19

申请号：US16003010

申请日：2018-06-07

Applicant: HRL Laboratories, LLC

Inventor： Lian X. Huang ,  Logan D. Sorenson ,  Raviv Perahia ,  Hung Nguyen ,  David T. Chang

IPC: G01C19/5684 ,  G01C19/5677 ,  G01C19/5712

Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.

公开(公告)号：US10436587B2

公开(公告)日：2019-10-08

申请号：US16004310

申请日：2018-06-08

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Hung Nguyen ,  Raviv Perahia ,  Lian X. Huang ,  David T. Chang

IPC: G01C19/5684 ,  G01C19/02 ,  G01C19/5712

Abstract: An angular sensor, comprising a Coriolis vibratory gyroscope (CVG) resonator, capable of oscillating along a first pair of normal n=1 modes comprising a first normal mode and a second normal mode; and a second pair of normal n=2 modes comprising a third normal mode and a fourth normal mode; the sensor further comprising one drive electrode and one sense electrode aligned along an anti-nodal axis of each mode; and a pair of bias tune electrodes aligned with an anti-nodal axis of each mode if no drive and sense electrode pair is aligned with said anti-nodal axis.

公开(公告)号：US20190049247A1

公开(公告)日：2019-02-14

申请号：US16003010

申请日：2018-06-07

Applicant: HRL Laboratories, LLC

Inventor： Lian X HUANG ,  Logan D. Sorenson ,  Raviv Perahia ,  Hung Nguyen ,  Hung Nguyen ,  David T. Chang

IPC: G01C19/5712

Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.

公开(公告)号：US20180371894A1

公开(公告)日：2018-12-27

申请号：US16018695

申请日：2018-06-26

Applicant: HRL LABORATORIES, LLC

Inventor： Shuoqin Wang ,  Logan D. Sorenson ,  David L. Walter ,  Adour V. Kabakian ,  Hung Nguyen ,  Raviv Perahia ,  David T. Chang

IPC: E21B47/022 ,  E21B47/06 ,  E21B7/04 ,  E21B47/024

Abstract: A method for generating an output of a downhole inertial measurement unit (IMU) includes: generating a trajectory between a plurality of survey points of a planned well data as a function of time, wherein the planned well data includes a plurality of three-dimensional coordinates corresponding to the survey points of an underground planned well are used to generate a trajectory comprising a plurality of trajectory coordinates between the consecutive ones of the survey points; generating sensor data for each of the trajectory coordinates as a function of time based on the geodetic reference parameters, the generated sensor data comprising: generated accelerometer output; generated gyroscopic output; and generated magnetometer output; and outputting the generated accelerometer output; the generated gyroscopic output; and the generated magnetometer output as a function of time as a generated output of the downhole IMU.

公开(公告)号：US09985198B1

公开(公告)日：2018-05-29

申请号：US14286419

申请日：2014-05-23

Applicant: HRL LABORATORIES LLC.

Inventor： David T. Chang ,  Frederic P. Stratton ,  Hung Nguyen ,  Randall L. Kubena

IPC: H01L41/311 ,  H01L41/053 ,  H01L41/047 ,  H01L41/23 ,  H01L41/29 ,  H01L41/332

CPC classification number: H01L41/311 ,  H01L41/0475 ,  H01L41/053 ,  H01L41/23 ,  H01L41/29 ,  H01L41/332

Abstract: High-yield fabrication methods are provided for making quartz resonators having thicknesses ranging from one micrometer to several hundred micrometers and thus covering the frequency range from HF to UHF. Plasma dry etching is used to form arbitrary resonator geometries. The quartz resonator structure and the through-quartz vias are formed concurrently. The method includes bonding a quartz device wafer to a quartz handle wafer with a temporary adhesive. Mesa structures formed by plasma dry etching enable the resonators to achieve high-Q operation with energy trapping/mode confinement. A thermo-compression bond integrates the quartz resonators to a host wafer (e.g., an oscillator ASIC) to form oscillators. Silicon cap wafers are bonded over the resonators to the ASIC to provide wafer scale hermetic encapsulation of the quartz oscillators.

公开(公告)号：US11506493B1

公开(公告)日：2022-11-22

申请号：US16745285

申请日：2020-01-16

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C25/00 ,  G01C19/5776 ,  G01C19/5684 ,  H03L7/26 ,  H03G3/20

Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

公开(公告)号：US11469732B2

公开(公告)日：2022-10-11

申请号：US16368737

申请日：2019-03-28

Applicant: HRL Laboratories, LLC

Inventor： Raviv Perahia ,  Logan D. Sorenson ,  Lian X. Huang ,  David T. Chang ,  Makena S. White ,  Jeremy Bregman

IPC: H03H3/02 ,  H03H9/205 ,  H03H9/02 ,  H03H9/05 ,  H03H9/13 ,  H03H9/17 ,  H03H9/15

Abstract: A method of making a SiC resonator includes forming a layer of an oxide material on a relatively thick wafer of SiC; bonding the layer of oxide material on the relatively thick wafer of SiC to a handle wafer having at least an oxide exterior surface, the resulting bond being substantially free of voids; planarizing the relatively thick wafer of SiC to a desired thickness; forming top and bottom electrodes on the wafer of SiC wafer to define a SiC wafer resonator portion; and forming a trench around the top and bottom electrodes, the tench completely penetrating the planarized wafer of SiC around a majority of a distance surrounding said top and bottom electrodes, except for one or more tether regions of the planarized wafer of SiC which remain physically coupled a remaining portion the SiC wafer resonator portion which defines a frame formed of the planarized wafer of SiC surrounding the SiC wafer resonator portion.

公开(公告)号：US11275099B1

公开(公告)日：2022-03-15

申请号：US16512091

申请日：2019-07-15

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Lian X. Huang ,  Raviv Perahia ,  Hung Nguyen ,  David T. Chang

IPC: G01P15/18 ,  G01P15/13 ,  G01P1/02

Abstract: A resonant accelerometer includes a proof mass, one or more springs connecting the proof mass to an anchor, and one or more capacitive transduction gaps providing a void or space between the movable proof mass and a corresponding fixed electrode, wherein the static displacement of the proof mass in response to acceleration applied to the anchor modifies the electrostatic stiffness imparted by one or more of the capacitive transduction gaps on the proof mass, resulting in a corresponding change in the resonance frequency of the resonant accelerometer.

公开(公告)号：US10697772B1

公开(公告)日：2020-06-30

申请号：US16277610

申请日：2019-02-15

Applicant: HRL LABORATORIES, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C19/5726 ,  G01C19/5755

Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.