Phononic comb enhanced MEMS gravity gradiometers

    公开(公告)号:US11747512B1

    公开(公告)日:2023-09-05

    申请号:US16932447

    申请日:2020-07-17

    CPC classification number: G01V7/005 G01V7/04

    Abstract: A method and apparatus for for sensing a change in an acceleration gradient δa(t) between two gravity fields a1(t) and a2(t) respectively sensed by the first and second proof masses, the first and second proof masses either being coupled only to a first resonator or being individually coupled to first and second resonators, the first resonator generating, in use, a signal at a frequency fD which is applied said second resonator, the second resonator being driven, in use, into a non-linear state corresponding to a modal resonant frequency fΘ wherein it generates a comb of frequencies each tooth of which is separated from each other by a frequency Δ which is frequency-wise proportional a frequency difference between fD and fΘ and also proportional to the change in said acceleration gradient δa(t), circuitry for selecting an nth tooth in said comb of frequencies where the frequency of the nth tooth is equal to fD+nΔ, circuitry for detecting a change in the frequency of the nth tooth and for generating a signal that is proportional to n times the change in an acceleration gradient δa(t).

    High dynamic range gyroscope
    3.
    发明授权

    公开(公告)号:US10914585B1

    公开(公告)日:2021-02-09

    申请号:US16871497

    申请日:2020-05-11

    Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

    Alkali source and/or sink using ion-conducting solid electrolyte and intercalation-compound electrode

    公开(公告)号:US10545461B1

    公开(公告)日:2020-01-28

    申请号:US15639391

    申请日:2017-06-30

    Abstract: Some variations provide an alkali metal or alkaline earth metal vapor cell with a solid ionic conductor and intercalable-compound electrodes. The intercalable-compound electrodes are used as efficient sources and/or as sinks for alkali metal or alkaline earth metal atoms, thus enabling electrical control over metal atom content in the vapor cell. Some variations provide a vapor-cell system comprising: a vapor-cell region configured to allow a vapor-cell optical path into a vapor-cell vapor phase; a first electrode containing an intercalable compound capable of being intercalated by at least one element selected from Rb, Cs, Na, K, or Sr; a second electrode electrically isolated from the first electrode; and an ion-conducting layer between the first electrode and the second electrode. The ion-conducting layer is ionically conductive for at least one ionic species selected from Rb+, Cs+, Na+, K+, or Sr2+. The first intercalable compound is preferably a carbonaceous material, such as graphite.

    High stability angular sensor
    8.
    发明授权

    公开(公告)号:US11506493B1

    公开(公告)日:2022-11-22

    申请号:US16745285

    申请日:2020-01-16

    Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

    Method of fabricating a SiC resonator

    公开(公告)号:US11469732B2

    公开(公告)日:2022-10-11

    申请号:US16368737

    申请日:2019-03-28

    Abstract: A method of making a SiC resonator includes forming a layer of an oxide material on a relatively thick wafer of SiC; bonding the layer of oxide material on the relatively thick wafer of SiC to a handle wafer having at least an oxide exterior surface, the resulting bond being substantially free of voids; planarizing the relatively thick wafer of SiC to a desired thickness; forming top and bottom electrodes on the wafer of SiC wafer to define a SiC wafer resonator portion; and forming a trench around the top and bottom electrodes, the tench completely penetrating the planarized wafer of SiC around a majority of a distance surrounding said top and bottom electrodes, except for one or more tether regions of the planarized wafer of SiC which remain physically coupled a remaining portion the SiC wafer resonator portion which defines a frame formed of the planarized wafer of SiC surrounding the SiC wafer resonator portion.

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