摘要:
A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.
摘要:
A remote site stores data received from a currently-used site and transfers the stored data to a proximal site. The proximal site stores the data received from the remote site and transfers the stored data to the currently-used site. The currently-used site crosschecks the data returned from the proximal site against the data transmitted to the remote site, and when the two data do not match each other, transmits the data to the remote site again.
摘要:
A novel process for producing an optically active (E)-7-[2-cyclopropyl-4-(4-fluorophenyl quinolin-3-yl]-5-hydroxy-3-oxohept-enoic acid ester of formula (III) which is important as an intermediate for synthesizing medicines, comprises reacting 1,3-bis(trimethylsilyloxy)-1-alkoxybuta-1,3-diene of formula (I) with (E)-3-[2-cyclopropyl-4-(fluorophenyl)quinolin-3-yl]-prop-2-en-1-al of formula (II) in the presence of an optically active binaphthol-titanium complex obtained from 1,1′-bi-2-naphthol with titanium tetraisopropoxide, a metal salt and an amine, and then subjecting the reaction product to desilylation.
摘要:
An extending portion of a hinge member is formed having a first hole in which a first positioning pin can be inserted and a second hole in which a second positioning pin can be inserted. The first hole has an elongated shape that allows the extending portion of the hinge member to move relatively to the first positioning pin in a width direction. The second hole is a circular large hole that allows the extending portion to move relatively to the second positioning pin in the width direction and an axial direction. A third hole and a fourth hole are formed in a flexure. The third hole has an elongated shape that allows the flexure to move relatively to the first positioning pin in the axial direction. The fourth hole has an elongated shape that allows the flexure to move relatively to the second positioning pin.
摘要:
A 2-aminobenzophenone represented by formula (2) is obtained by heating an arylsulfonamide represented by formula (1) in the presence of aluminum chloride.
摘要:
The present invention relates to a 3/2-hydrochloride of 4-chloro-5-[3-(4-benzylpiperazin-1-yl) carbonylmethoxy-4-methoxybenzylamino]-3(2H)-pyridazinone, and also relates to a method for producing the 3/2-hydrochloride of 4-chloro-5-[3-(4-benzylpiperazin-1-yl)carbonylmethoxy-4-methoxy-4-methoxybenzylamino]-3(2H)-pyridazinone which comprises crystallizing in an alcohol type solvent or an alcohol type-ester type mixture solvent in the presence of hydrogen chloride and water.
摘要:
In an electronic document circulating system utilizing a network, in order to attain simplification of the operation procedure by a transmitting person and facilitation of the temporary circulation of a document, a circulation control unit circulates the circular document indicated by document management information stored in a document management information store unit on the basis of circulation control information indicative of a circular route of the circular document stored in a circulation control information store unit and role definition information for relating a plurality of users to a role shared among equal users stored in a role definition information store unit. In the circulation, the circular document is transmitted to a user selected by the system on the basis of a predetermined criterion, of users in the role designated by the transmitting person. When the document is transmitted temporarily for consultation, temporary circulation control information is set and the document is returned to a consulting user exactly.
摘要:
A film forming apparatus includes a chamber in which a thin film is formed on a semiconductor wafer by supplying a process gas, the interior of which is then cleaned by a cleaning gas, while the gas in the chamber is exhausted by a vacuum system. The vacuum system includes a main vacuum line connected to a vacuum port of the chamber, a high-vacuum pump arranged on an upstream side of the main vacuum line, a coarse control vacuum pump arranged on a downstream side of the main vacuum line, a bypass line which is connected to the main vacuum line so as to bypass the high-vacuum pump and has a first connection portion connected between the vacuum port and the high-vacuum pump and a second connection portion connected between the high-vacuum pump and the coarse control vacuum pump, a trap arranged on the bypass line, heater arranged between the first connection portion and the trap for heating gas flowing from the first connection portion to the trap, and valves for selectively opening/closing the main vacuum line and the bypass line to allow the gas in the chamber to flow through one of the lines.
摘要:
In an electronic document circulating system utilizing a network, in order to attain simplification of the operation procedure by a transmitting person and facilitation of the temporary circulation of a document, a circulation control unit circulates the circular document indicated by document management information stored in a document management information store unit on the basis of circulation control information indicative of a circular route of the circular document stored in a circulation control information store unit and role definition information for relating a plurality of users to a role shared among equal users stored in a role definition information store unit. In the circulation, the circular document is transmitted to a user selected by the system on the basis of a predetermined criterion, of users in the role designated by the transmitting person. When the document is transmitted temporarily for consultation, temporary circulation control information is set and the document is returned to a consulting user exactly.
摘要:
A method for more selectively removing macromolecules from a plasma solution, whereby plasma containing the macromolecules to be removed is provided and heated to a temperature near or above normal body temperature but below the boiling point of the plasma solution. The heated plasma solution is filtered while at a temperature near or above normal body temperature but below its boiling point with a membrane filter to remove selectively macromolecules from the plasma solution. An apparatus for accomplishing the foregoing is also provided.