Exposure apparatus and device manufacturing method
    11.
    发明申请
    Exposure apparatus and device manufacturing method 有权
    曝光装置和装置制造方法

    公开(公告)号:US20070109517A1

    公开(公告)日:2007-05-17

    申请号:US11651551

    申请日:2007-01-10

    IPC分类号: G03B27/42

    摘要: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.

    摘要翻译: 光刻投影装置包括:被配置为保持基板的基板台;布置成将图案化的辐射束投射到基板上的投影系统;配置成将液体供应到投影系统和基板之间的空间的液体供应系统;以及 剩余液体检测器被配置为在曝光完成之后检测残留在基板和/或基板台上的液体。 一种器件制造方法包括使用光刻设备的投影系统将图案化的辐射束通过液体投影到衬底上,衬底由衬底台保持,并且在突出完成之后,检测残留液体 衬底和/或衬底台。

    Backup system and method and program
    12.
    发明申请
    Backup system and method and program 有权
    备份系统及方法与程序

    公开(公告)号:US20050138310A1

    公开(公告)日:2005-06-23

    申请号:US10874247

    申请日:2004-06-24

    申请人: Takashi Horiuchi

    发明人: Takashi Horiuchi

    IPC分类号: G06F12/16 G06F12/00

    摘要: A remote site stores data received from a currently-used site and transfers the stored data to a proximal site. The proximal site stores the data received from the remote site and transfers the stored data to the currently-used site. The currently-used site crosschecks the data returned from the proximal site against the data transmitted to the remote site, and when the two data do not match each other, transmits the data to the remote site again.

    摘要翻译: 远程站点存储从当前使用的站点接收的数据,并将存储的数据传输到近端站点。 近端站点存储从远程站点接收的数据,并将存储的数据传输到当前使用的站点。 当前使用的站点交叉检查从近端站点返回的数据与发送到远程站点的数据,并且当两个数据不匹配时,再次将数据发送到远程站点。

    Process for producing optically active oxoheptenoic acid ester
    13.
    发明申请
    Process for producing optically active oxoheptenoic acid ester 有权
    光学活性氧基庚烯酸酯的制备方法

    公开(公告)号:US20050054853A1

    公开(公告)日:2005-03-10

    申请号:US10495268

    申请日:2002-11-14

    IPC分类号: C07D215/14 C07D215/00

    CPC分类号: C07D215/14

    摘要: A novel process for producing an optically active (E)-7-[2-cyclopropyl-4-(4-fluorophenyl quinolin-3-yl]-5-hydroxy-3-oxohept-enoic acid ester of formula (III) which is important as an intermediate for synthesizing medicines, comprises reacting 1,3-bis(trimethylsilyloxy)-1-alkoxybuta-1,3-diene of formula (I) with (E)-3-[2-cyclopropyl-4-(fluorophenyl)quinolin-3-yl]-prop-2-en-1-al of formula (II) in the presence of an optically active binaphthol-titanium complex obtained from 1,1′-bi-2-naphthol with titanium tetraisopropoxide, a metal salt and an amine, and then subjecting the reaction product to desilylation.

    摘要翻译: 制备式(III)的光学活性(E)-7- [2-环丙基-4-(4-氟苯基喹啉-3-基)-5-羟基-3-氧代庚酸 - 烯酸酯的新方法,其为 作为合成药物的中间体是重要的,包括使式(I)的1,3-双(三甲基甲硅烷氧基)-1-烷氧基丁-1,3-二烯与(E)-3- [2-环丙基-4-(氟苯基) 喹啉-3-基] - 丙-2-烯-1-醇在由1,1'-双-2-萘酚与四异丙氧基钛得到的光学活性联萘酚钛络合物存在下,金属 盐和胺,然后使反应产物脱甲硅烷基化。

    Disc drive suspension whose extending portion and flexure can be regulated
    14.
    发明授权
    Disc drive suspension whose extending portion and flexure can be regulated 有权
    圆盘驱动悬架,其延伸部分和弯曲部分可以调节

    公开(公告)号:US06813119B2

    公开(公告)日:2004-11-02

    申请号:US10179869

    申请日:2002-06-25

    IPC分类号: G11B2124

    CPC分类号: G11B5/486

    摘要: An extending portion of a hinge member is formed having a first hole in which a first positioning pin can be inserted and a second hole in which a second positioning pin can be inserted. The first hole has an elongated shape that allows the extending portion of the hinge member to move relatively to the first positioning pin in a width direction. The second hole is a circular large hole that allows the extending portion to move relatively to the second positioning pin in the width direction and an axial direction. A third hole and a fourth hole are formed in a flexure. The third hole has an elongated shape that allows the flexure to move relatively to the first positioning pin in the axial direction. The fourth hole has an elongated shape that allows the flexure to move relatively to the second positioning pin.

    摘要翻译: 铰链部件的延伸部分形成有第一孔,第一定位销可插入第一孔中,第二孔可插入第二定位销。 第一孔具有细长形状,其允许铰链构件的延伸部分在宽度方向上相对于第一定位销移动。 第二孔是圆形大孔,允许延伸部在宽度方向和轴向上相对于第二定位销移动。 弯曲部形成有第三孔和第四孔。 第三孔具有细长形状,允许挠曲件沿轴向相对于第一定位销移动。 第四孔具有允许挠曲件相对于第二定位销移动的细长形状。

    Pyridazinone hydrochloride compound and method for producing the same
    16.
    发明授权
    Pyridazinone hydrochloride compound and method for producing the same 失效
    盐酸哒嗪酮化合物及其制备方法

    公开(公告)号:US06310065B1

    公开(公告)日:2001-10-30

    申请号:US09646127

    申请日:2000-09-28

    IPC分类号: A61K31501

    CPC分类号: C07D237/22

    摘要: The present invention relates to a 3/2-hydrochloride of 4-chloro-5-[3-(4-benzylpiperazin-1-yl) carbonylmethoxy-4-methoxybenzylamino]-3(2H)-pyridazinone, and also relates to a method for producing the 3/2-hydrochloride of 4-chloro-5-[3-(4-benzylpiperazin-1-yl)carbonylmethoxy-4-methoxy-4-methoxybenzylamino]-3(2H)-pyridazinone which comprises crystallizing in an alcohol type solvent or an alcohol type-ester type mixture solvent in the presence of hydrogen chloride and water.

    摘要翻译: 本发明涉及4-氯-5- [3-(4-苄基哌嗪-1-基)羰基甲氧基-4-甲氧基苄基氨基] -3(2H) - 哒嗪酮的3 / 2-盐酸盐,还涉及一种方法 用于制备4-氯-5- [3-(4-苄基哌嗪-1-基)羰基甲氧基-4-甲氧基-4-甲氧基苄基氨基] -3(2H) - 哒嗪酮的3 / 2-盐酸盐,其包括在醇 型溶剂或醇型 - 酯型混合溶剂,在氯化氢和水的存在下。

    Electronic document circulating system
    17.
    发明授权
    Electronic document circulating system 失效
    电子文件循环系统

    公开(公告)号:US06279031B1

    公开(公告)日:2001-08-21

    申请号:US09124235

    申请日:1998-07-29

    IPC分类号: G06F1314

    CPC分类号: G06Q10/10

    摘要: In an electronic document circulating system utilizing a network, in order to attain simplification of the operation procedure by a transmitting person and facilitation of the temporary circulation of a document, a circulation control unit circulates the circular document indicated by document management information stored in a document management information store unit on the basis of circulation control information indicative of a circular route of the circular document stored in a circulation control information store unit and role definition information for relating a plurality of users to a role shared among equal users stored in a role definition information store unit. In the circulation, the circular document is transmitted to a user selected by the system on the basis of a predetermined criterion, of users in the role designated by the transmitting person. When the document is transmitted temporarily for consultation, temporary circulation control information is set and the document is returned to a consulting user exactly.

    摘要翻译: 在利用网络的电子文件循环系统中,为了简化发送人的操作程序和简化文件的临时流通,循环控制单元循环由存储在文档中的文档管理信息指示的循环文档 管理信息存储单元,其基于指示循环控制信息存储单元中存储的循环文档的循环路径的循环控制信息和用于将多个用户与存储在角色定义中的相同用户之间共享的角色相关联的角色定义信息 信息存储单元。 在循环中,循环文件按照预定标准由系统选择的使用者发送给发送人指定的角色。 当文件临时传送用于咨询时,设置临时流通控制信息,并将文件正确地返回给咨询用户。

    Film forming apparatus and method
    18.
    发明授权
    Film forming apparatus and method 失效
    成膜装置及方法

    公开(公告)号:US6149729A

    公开(公告)日:2000-11-21

    申请号:US80718

    申请日:1998-05-19

    IPC分类号: B01D53/04 C23C16/44 C23C16/00

    CPC分类号: C23C16/4412 C23C16/4405

    摘要: A film forming apparatus includes a chamber in which a thin film is formed on a semiconductor wafer by supplying a process gas, the interior of which is then cleaned by a cleaning gas, while the gas in the chamber is exhausted by a vacuum system. The vacuum system includes a main vacuum line connected to a vacuum port of the chamber, a high-vacuum pump arranged on an upstream side of the main vacuum line, a coarse control vacuum pump arranged on a downstream side of the main vacuum line, a bypass line which is connected to the main vacuum line so as to bypass the high-vacuum pump and has a first connection portion connected between the vacuum port and the high-vacuum pump and a second connection portion connected between the high-vacuum pump and the coarse control vacuum pump, a trap arranged on the bypass line, heater arranged between the first connection portion and the trap for heating gas flowing from the first connection portion to the trap, and valves for selectively opening/closing the main vacuum line and the bypass line to allow the gas in the chamber to flow through one of the lines.

    摘要翻译: 成膜装置包括:室,其中通过提供处理气体在半导体晶片上形成薄膜,然后通过真空系统排出室内的气体,其内部被清洁气体清洁。 真空系统包括连接到腔室的真空口的主真空管线,配置在主真空管线的上游侧的高真空泵,设置在主真空管线下游侧的粗调控制真空泵, 旁通管线,其与主真空管线连接以绕过高真空泵,并且具有连接在真空口和高真空泵之间的第一连接部分和连接在高真空泵和高真空泵之间的第二连接部分 布置在旁路管路上的疏水阀,布置在第一连接部分和捕集器之间的加热器,用于加热从第一连接部分流到捕集器的气体,以及用于选择性地打开/关闭主真空管线和旁路的阀 以允许室中的气体流过其中一条线。

    Electronic document circulating system
    19.
    发明授权
    Electronic document circulating system 失效
    电子文件循环系统

    公开(公告)号:US5848248A

    公开(公告)日:1998-12-08

    申请号:US978140

    申请日:1997-11-25

    CPC分类号: G06Q10/10

    摘要: In an electronic document circulating system utilizing a network, in order to attain simplification of the operation procedure by a transmitting person and facilitation of the temporary circulation of a document, a circulation control unit circulates the circular document indicated by document management information stored in a document management information store unit on the basis of circulation control information indicative of a circular route of the circular document stored in a circulation control information store unit and role definition information for relating a plurality of users to a role shared among equal users stored in a role definition information store unit. In the circulation, the circular document is transmitted to a user selected by the system on the basis of a predetermined criterion, of users in the role designated by the transmitting person. When the document is transmitted temporarily for consultation, temporary circulation control information is set and the document is returned to a consulting user exactly.

    摘要翻译: 在利用网络的电子文件循环系统中,为了简化发送人的操作程序和简化文件的临时流通,循环控制单元循环由存储在文档中的文档管理信息指示的循环文档 管理信息存储单元,其基于指示循环控制信息存储单元中存储的循环文档的循环路径的循环控制信息和用于将多个用户与存储在角色定义中的相同用户之间共享的角色相关联的角色定义信息 信息存储单元。 在循环中,循环文件按照预定标准由系统选择的使用者发送给发送人指定的角色。 当文件临时传送用于咨询时,设置临时流通控制信息,并将文件正确地返回给咨询用户。