Semiconductor laser device with integrated reflector on a (511) tilted
lattice plane silicon substrate
    11.
    发明授权
    Semiconductor laser device with integrated reflector on a (511) tilted lattice plane silicon substrate 失效
    具有集成反射器的半导体激光器件(511)倾斜晶格面硅衬底

    公开(公告)号:US5479426A

    公开(公告)日:1995-12-26

    申请号:US206052

    申请日:1994-03-04

    摘要: Radiating light from a semiconductor laser element is radiated in a direction normal to the surface of a photodetector substrate. The semiconductor laser element and photodetector are disposed on the same plane. Specifically, a reflecting mirror surface formed of a slanting surface of (111) lattice plane having a ridge line of direction is disposed on a silicon substrate of (100) lattice plane having an off-angle of 4.degree. to 14.degree. about an axis of direction or on a silicon substrate of (511) lattice plane having an off-angle of 1.degree. to 11.degree. about an axis of direction. The semiconductor laser chip is disposed at a position opposing to the reflecting mirror surface.

    摘要翻译: 来自半导体激光元件的散射光沿着与光检测器基板的表面垂直的方向辐射。 半导体激光元件和光电检测器设置在同一平面上。 具体地说,在具有<110>方向的棱线的(111)晶格面倾斜表面形成的反射镜表面设置在离开角度为4°至14°的(100)晶格面的硅衬底上 (511)晶格面的硅基板上,沿着<110>方向的轴线偏离为1°至11°。 半导体激光芯片设置在与反射镜表面相对的位置。

    Optical head including a semiconductor laser having a non-scatter area
to diffuse incident light beams
    14.
    发明授权
    Optical head including a semiconductor laser having a non-scatter area to diffuse incident light beams 失效
    光头包括具有散射入射光束的非散射区域的半导体激光器

    公开(公告)号:US5729519A

    公开(公告)日:1998-03-17

    申请号:US645488

    申请日:1996-05-13

    摘要: An optical head for optical recording and reproducing apparatuses is disclosed, which comprises a semiconductor laser, a mirror for reflecting a light beam emitted from the semiconductor laser, a diffraction grating for dividing the light beam into zero order, plus and sinus first-order beams, a holographic diffraction grating being arranged at an optical path of the beams divided by the diffraction grating, an objective lens for focusing the beams on a disk and causing the beams reflected from the disk to be incident on the holographic diffraction grating to diffract the beams, and a photodetector for detecting a tracking error signal by receiving the beams diffracted by the holographic diffraction grating. The semiconductor laser has a beam incident area which the beam reflected from the disk is incident. The beam incident area acts to deflect the incident beam. As a result, the optical head is able to obtain the stable tracking error signal.

    摘要翻译: 公开了一种用于光学记录和再现装置的光学头,其包括半导体激光器,用于反射从半导体激光器发射的光束的反射镜,用于将光束分成零级的衍射光栅,正弦和正弦一阶光束 ,全息衍射光栅布置在由衍射光栅分割的光束的光路上,用于将光束聚焦在盘上并使从光盘反射的光束入射到全息衍射光栅上以衍射光束的物镜 以及用于通过接收由全息衍射光栅衍射的光束来检测跟踪误差信号的光电检测器。 半导体激光器具有从盘反射的光束入射的光束入射区域。 光束入射区域用于偏转入射光束。 结果,光头能够获得稳定的跟踪误差信号。

    Semiconductor laser device
    15.
    发明授权
    Semiconductor laser device 失效
    半导体激光器件

    公开(公告)号:US5539767A

    公开(公告)日:1996-07-23

    申请号:US253915

    申请日:1994-06-03

    摘要: The present invention relates to a semiconductor laser device on which a high-frequency signal can be superposed without radiating said high-frequency signal externally. Said device consists of a semiconductor laser element mounted directly or indirectly through a semiconductor substrate on a comb-frame, and an outer frame made of an insulation material provided at an area surrounding said comb-frame on which said semiconductor laser chip is mounted; and this device is fixed on a printed circuit board with a through-hole allowing a direct pass of laser light emitted from said semiconductor laser device. Said printed circuit board is provided with a high-frequency circuit and is lined with a metal film layer on the rear surface of said printed circuit board or within said printed circuit board.

    摘要翻译: 本发明涉及一种半导体激光器件,其上可以叠加高频信号而不在外部辐射所述高频信号。 所述装置由直接或间接安装在梳形框架上的半导体衬底的半导体激光器元件和由设置在其上安装所述半导体激光器芯片的所述梳框周围的区域的绝缘材料制成的外框架构成; 并且该装置固定在具有允许从所述半导体激光装置发射的激光的直接通过的通孔的印刷电路板上。 所述印刷电路板设置有高频电路,并且在所述印刷电路板的后表面上或所述印刷电路板内衬有金属膜层。

    Optical head including a semiconductor laser having a non-scatter
incident area
    16.
    发明授权
    Optical head including a semiconductor laser having a non-scatter incident area 失效
    光头包括具有非散射入射区域的半导体激光器

    公开(公告)号:US5517479A

    公开(公告)日:1996-05-14

    申请号:US217722

    申请日:1994-03-25

    摘要: An optical head for optical recording and reproducing apparatuses is disclosed. The optical head comprises a semiconductor laser, a mirror for reflecting a light beam emitted from the semiconductor laser, a diffraction grating for dividing the light beam into zero order, plus and minus first-order beams. It also comprises a holographic diffraction grating being arranged at an optical path of the beams divided by the diffraction grating, an objective lens for focusing the beams on a disk and causing the beams reflected from the disk to be incident on the holographic diffraction grating to diffract the beams, and a photodetector for detecting a tracking error signal by receiving the beams diffracted by the holographic diffraction grating. The semiconductor laser has a beam incident area onto which the beam reflected from the disk is incident. The beam incident area acts to scatter or absorb the incident beam. As a result, the optical head is able to obtain a stable tracking error signal.

    摘要翻译: 公开了一种用于光学记录和再现装置的光学头。 光头包括半导体激光器,用于反射从半导体激光器发射的光束的反射镜,用于将光束分成零级的加和减一级光束的衍射光栅。 它还包括一个全息衍射光栅,被布置在由衍射光栅分开的光束的光路上,一个物镜用于将光束聚焦在光盘上,并使从光盘反射的光束入射到全息衍射光栅上衍射 光束,以及用于通过接收由全息衍射光栅衍射的光束来检测跟踪误差信号的光电检测器。 半导体激光器具有从光盘反射的光束入射到其上的光束入射区域。 光束入射区域用于散射或吸收入射光束。 结果,光头能够获得稳定的跟踪误差信号。

    Photodetector unit, and optical pickup, optical reproduction apparatus, and optical recording apparatus equipped with the same
    17.
    发明授权
    Photodetector unit, and optical pickup, optical reproduction apparatus, and optical recording apparatus equipped with the same 有权
    光电检测器单元,光拾取器,光学再现装置和配备有其的光学记录装置

    公开(公告)号:US06597642B1

    公开(公告)日:2003-07-22

    申请号:US09709929

    申请日:2000-11-10

    IPC分类号: G11B700

    摘要: An optical pickup that is equipped with a photodetector unit, irradiates an optical disc with a laser beam, and receives returning light reflected by the optical disc, where the optical pickup is constructed to (1) divide the laser beam into a main beam, a preceding sub-beam, and a succeeding sub-beam, (2) direct the main beam, the preceding sub-beam, and the succeeding sub-beam toward the optical disc, and (3) divide returning lights of the main beam, the preceding sub-beam, and the succeeding sub-beam respectively into first-fourth main returning lights, first-fourth preceding returning lights, and first-fourth succeeding returning lights, and the photodetector unit includes: first-fourth main photodetectors that respectively receive the first-fourth main returning lights; first-fourth preceding photodetectors that respectively receive the first-fourth preceding returning lights; and first-fourth succeeding photodetectors that respectively receive the first-fourth succeeding returning lights. A tracking error signal appropriate to the optical disc to be reproduced is selected from three tracking error signals detected according to the detection signals from the photodetectors, and a tracking servo is driven according to the selected tracking error signal.

    摘要翻译: 具有光检测器单元的光学拾取器,用激光束照射光盘,并接收由光盘反射的返回光,其中光学拾取器被构造为(1)将激光束分割成主光束, 前面的子光束和后续的子光束,(2)将主光束,前一个子光束和后一个子光束指向光盘,以及(3)分割主光束的返回光, 分别将前次侧光束和后续子光束分别插入第一至第四主回光灯,第一至第四返回灯和第四后续返回光,并且光检测器单元包括:第一至第四主光电检测器,分别接收 第四回主灯; 分别接收前四个返回光的前四分之一的光电检测器; 以及分别接收第一至第四个后续返回光的第一至第四后续光电检测器。 从根据来自光电检测器的检测信号检测的三个跟踪误差信号中选择适合于要再现的光盘的跟踪误差信号,并且根据所选择的跟踪误差信号来驱动跟踪伺服。

    Semiconductor laser device
    19.
    发明授权
    Semiconductor laser device 失效
    半导体激光器件

    公开(公告)号:US06192020B1

    公开(公告)日:2001-02-20

    申请号:US09164726

    申请日:1998-10-01

    IPC分类号: G11B712

    摘要: A semiconductor laser device includes a semiconductor laser element for emitting laser light onto a recording medium; beam dividing element provided in an optical path between the semiconductor laser element and the recording medium; a hologram optical element including a diffraction grating formed in a light-transmitting substrate, the hologram optical element located in an optical path between the beam dividing element and the semiconductor laser element; a servo-signal light-receiving element provided in an optical path of diffracted light transmitted through the diffraction grating for receiving the diffracted light; an information-signal light-receiving element for receiving light divided by the beam-dividing element, which is different from light divided by the beam-dividing element which is received by the diffraction grating; and a polarizing element provided in an optical path between the beam dividing element and the information-signal light-receiving element, wherein the semiconductor laser element, the servo-signal light-receiving element and the information-signal light-receiving element are provided within a single package, and the information-signal light-receiving element is provided outside an optical path of every order of diffracted light transmitted through the diffraction grating.

    摘要翻译: 半导体激光器件包括用于将激光发射到记录介质上的半导体激光元件; 光束分割元件,设置在半导体激光元件和记录介质之间的光路中; 全息光学元件,包括形成在透光衬底中的衍射光栅,位于光束分割元件和半导体激光元件之间的光路中的全息光学元件; 设置在透过衍射光栅的衍射光的光路中的用于接收衍射光的伺服信号光接收元件; 信息信号光接收元件,用于接收由所述光束分割元件分开的光,所述光与由所述衍射光栅接收的所述光束分割元件分开的光不同; 以及偏振元件,设置在所述光束分割元件和所述信息信号光接收元件之间的光路中,其中,所述半导体激光元件,所述伺服信号光接收元件和所述信息信号光接收元件设置在 单个封装,并且信息信号光接收元件设置在透射通过衍射光栅的每个衍射光的光路的外侧。

    Method of etching semiconductor substrate
    20.
    发明授权
    Method of etching semiconductor substrate 失效
    蚀刻半导体衬底的方法

    公开(公告)号:US5478438A

    公开(公告)日:1995-12-26

    申请号:US175629

    申请日:1993-12-30

    CPC分类号: H01L21/308 Y10S438/942

    摘要: A method of performing anisotropic etching more than once with respect to a semiconductor substrate (1) is provided with the steps of performing first-time anisotropic etching by using a first etching mask (2) so as to form a first anisotropically etched region (4) which is hollow, forming a second etching mask (7) over the first etching mask (2), performing second-time anisotropic etching by using the second etching mask (7), and previously forming the first etching mask (2) from a material which is resistant to an etchant used for patterning the second etching mask (7) before the first-time anisotropic etching is performed. Thus, the edge portion (6) of the first etched region (4) is protected so that its configuration is excellently maintained. By way of example, either of the etching masks is composed of a dielectric material such as a silicon dioxide film, while the other etching mask is composed of a metallic material such as Au and Ti, and the second-time anisotropic etching is performed by using diluted potassium hydroxide.

    摘要翻译: 提供相对于半导体衬底(1)多次执行各向异性蚀刻的方法,具有通过使用第一蚀刻掩模(2)进行第一次各向异性蚀刻以形成第一各向异性蚀刻区域(4)的步骤 ),在第一蚀刻掩模(2)上形成第二蚀刻掩模(7),通过使用第二蚀刻掩模(7)进行第二次各向异性蚀刻,并从第一蚀刻掩模(2)预先形成第一蚀刻掩模 在进行第一次各向异性蚀刻之前,耐蚀刻用于图案化第二蚀刻掩模(7)的蚀刻剂的材料。 因此,第一蚀刻区域(4)的边缘部分(6)被保护,使得其构造被良好地保持。 作为示例,蚀刻掩模中的任一个由诸如二氧化硅膜的介电材料构成,而另一个蚀刻掩模由诸如Au和Ti的金属材料构成,并且第二次各向异性蚀刻通过 使用稀释的氢氧化钾。