Fabrication of three-dimensional structures using reflowed molding

    公开(公告)号:US10335978B2

    公开(公告)日:2019-07-02

    申请号:US15169110

    申请日:2016-05-31

    摘要: A method of fabricating three-dimensional (3D) structures comprises forming a patterned area in a handle wafer, and bonding a mold wafer over the patterned area to produce one or more sealed cavities having a first pressure in the handle wafer. The mold wafer is heated past its softening point at a second pressure different from the first pressure to create a differential pressure across the mold wafer over the sealed cavities. The mold wafer is then cooled to harden the mold wafer into one or more 3D shapes over the sealed cavities. One or more materials are deposited on an outer surface of the mold wafer over the 3D shapes to form a structure layer having 3D structures that conform to the hardened 3D shapes of the mold wafer. The 3D structures are then bonded to a device wafer, and the handle wafer is removed to expose the 3D structures.

    Vector air data dynamic constraining and self-checking systems and methods

    公开(公告)号:US11815608B2

    公开(公告)日:2023-11-14

    申请号:US16941277

    申请日:2020-07-28

    IPC分类号: G01S19/24 G01P13/02 G01P21/00

    摘要: In an embodiment, a method is provided. The method comprises selecting at least one set of line of sight (LOS) vectors oriented in one or more directions outward from a vehicle; determining at least one air data solution based on the at least one set of LOS vectors; adjusting at least one value of an air vector equation based on a predetermined quantity; upon adjusting the at least one value, then determining at least one modified air data solution, wherein the at least one modified air data solution is determined based on the at least one set of LOS vectors and the at least one value; and comparing a difference between the at least one air data solution and the at least one modified air data solution to a threshold value, wherein the threshold value is indicative of error with respect to the at least one set of LOS vectors.

    Particle sensor sample area qualification without a physical slit

    公开(公告)号:US11709124B2

    公开(公告)日:2023-07-25

    申请号:US16927737

    申请日:2020-07-13

    IPC分类号: G01N15/14

    CPC分类号: G01N15/1429 G01N15/1434

    摘要: A system comprises a particle sensor unit in communication with a processor. The sensor unit comprises a source that transmits light into an interrogation region; receive optics that collect scattered light from particles in the interrogation region; and an optical detector that receives the collected light from the receive optics. The detector comprises a sample area including one or more sampling pixels, and an edge region including one or more edge pixels. The processor analyzes intensity data from the detector by a method comprising: combining all intensity data from the sampling pixels; adding the combined intensity data to a data set; determining whether to accept overlap intensity data that corresponds to an overlap between the sampling pixels and the edge pixels; adding the overlap intensity data to the data set if accepted; discarding the overlap intensity data if not accepted; and discarding all non-overlapping intensity data from the edge pixels.

    System and method for deriving airspeed from a particle sensor

    公开(公告)号:US11525841B2

    公开(公告)日:2022-12-13

    申请号:US15957629

    申请日:2018-04-19

    IPC分类号: G01P5/26 G01N15/02 G01F1/7086

    摘要: A system comprises a particle sensor assembly, which includes a light source that transmits a light beam into an external interrogation air region; a set of receive optics that provides a receive channel, the receive optics configured to collect a scattered portion of the light beam from a particle in the interrogation air region; and an optical detector that receives the collected scattered portion. The optical detector measures a signal intensity as a function of time from the scattered portion, with the signal intensity indicating a particle size and a signal duration indicating motion of the particle through the interrogation air region. A processor is in communication with the optical detector and is operative to determine a transit time of the particle through the interrogation air region based on the signal duration, and compute an airspeed based on parameters comprising the transit time and a size of the light beam.

    OPTICAL AIR DATA SYSTEM FUSION WITH REMOTE ATMOSPHERIC SENSING

    公开(公告)号:US20220091007A1

    公开(公告)日:2022-03-24

    申请号:US17028447

    申请日:2020-09-22

    IPC分类号: G01N15/06 G01C23/00

    摘要: A system comprises an optical air data system that measures aerosol and molecular scattering of light, and an optical instrument that measures aerosol and/or molecular scattering of light. A processor receives data from the air data system and from the optical instrument. The processor performs one or more signal analysis and data fusion methods comprising: (a) determining aerosol and/or molecular concentration from the received data, modifying a data analysis algorithm to optimize any remaining unknown parameters, and outputting enhanced air data parameters; (b) determining aerosol concentration from the received data, dynamically optimizing hardware settings in the air data system to enhance a signal level and avoid system saturation, and outputting enhanced air data parameters; or (c) determining aerosol and/or molecular concentration from the received data, estimating a confidence level of an air data algorithm, verifying optical health of the air data system, and reporting the optical health to a user.