公开(公告)号：US20220352228A1

公开(公告)日：2022-11-03

申请号：US17418525

申请日：2020-09-29

Applicant: ILLUMINA, INC.

Inventor： Arvin EMADI ,  Ali AGAH ,  Xiuyu CAI ,  Craig Lee HETHERINGTON

IPC: H01L27/146

Abstract: An image sensor structure including an image stack disposed over a device stack. The image stack includes a plurality of light detectors. A first optical filter stack is disposed over the image stack. The first optical filter stack includes a light guide layer. Light pipe cavities are disposed in the light guide layer. Each light pipe cavity is associated with a light detector. Each light pipe cavity has an aspect ratio that is greater than about 2.5 to about 1. A nanowell layer is disposed over the first optical filter stack. Nanowells are disposed in the nanowell layer. Each nanowell is associated with a light detector.

公开(公告)号：US20210208072A1

公开(公告)日：2021-07-08

申请号：US17190094

申请日：2021-03-02

Applicant: Illumina, Inc.

Inventor： Xiuyu CAI ,  Joseph Francis PINTO ,  Thomas A. BAKER ,  Tracy Helen FUNG

IPC: G01N21/64 ,  B01L3/00 ,  G01J1/44 ,  G01N33/58 ,  G02B6/42 ,  H01L27/144 ,  H01L27/146 ,  H01L31/02 ,  H01L31/0216 ,  H01L31/0232

Abstract: Light detection devices and related methods are provided. The devices may comprise a reaction structure for containing a reaction solution with a relatively high or low pH and a plurality of reaction sites that generate light emissions. The devices may comprise a device base comprising a plurality of light sensors, device circuitry coupled to the light sensors, and a plurality of light guides that block excitation light but permit the light emissions to pass to a light sensor. The device base may also include a shield layer extending about each light guide between each light guide and the device circuitry, and a protection layer that is chemically inert with respect to the reaction solution extending about each light guide between each light guide and the shield layer. The protection layer prevents reaction solution that passes through the reaction structure and the light guide from interacting with the device circuitry.

公开(公告)号：US20210098521A1

公开(公告)日：2021-04-01

申请号：US17119909

申请日：2020-12-11

Applicant: Illumina, Inc.

Inventor： Xiuyu CAI ,  Ali AGAH ,  Tracy H. FUNG ,  Dietrich DEHLINGER

IPC: H01L27/146 ,  G01J1/44 ,  G01J1/02 ,  G01N21/64

Abstract: An example image sensor structure includes an image layer. The image layer includes an array of light detectors disposed therein. A device stack is disposed over the image layer. An array of light guides is disposed in the device stack. Each light guide is associated with at least one light detector of the array of light detectors. A passivation stack is disposed over the device stack. The passivation stack includes a bottom surface in direct contact with a top surface of the light guides. An array of nanowells is disposed in a top layer of the passivation stack. Each nanowell is associated with a light guide of the array of light guides. A crosstalk blocking metal structure is disposed in the passivation stack. The crosstalk blocking metal structure reduces crosstalk within the passivation stack.

公开(公告)号：US20200164360A1

公开(公告)日：2020-05-28

申请号：US16678915

申请日：2019-11-08

Applicant: Illumina, Inc.

Inventor： Arnaud RIVAL ,  Ali AGAH ,  Dietrich DEHLINGER ,  Tracy H. FUNG ,  Xiuyu CAI

IPC: B01L3/00 ,  G01N21/05 ,  G01N21/64

Abstract: Flow cells systems and corresponding methods are provided. The flow cells systems may include a socket comprising a base portion, a plurality of electrical contacts and a cover portion that includes a first port. The flow cells systems may also include a flow cell device secured within an enclosure of the socket. The flow cell device may comprise a frameless light detection device comprising a base wafer portion, a plurality of dielectric layers, a reaction structure, a plurality of light guides, a plurality of light sensors, and device circuitry electrically coupled to the light sensors. The flow cell device may also comprise a lid forming a flow channel over the reaction structure that includes a second port in communication with the flow channel and the first port of the socket. The device circuity of the light detection device may be electrically coupled to the electrical contacts of the socket.