公开(公告)号：US20060181268A1

公开(公告)日：2006-08-17

申请号：US11380044

申请日：2006-04-25

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/28

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

Abstract translation: 用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。 该分析涉及光子发射的空间和/或时间相关性。 在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。 在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。 在一些情况下，重量反映了光子被晶体管发射的可能性。 该分析还可以包括自动识别光子发射图像中的晶体管。

公开(公告)号：US20060103378A1

公开(公告)日：2006-05-18

申请号：US10986480

申请日：2004-11-12

Applicant: Nader Pakdaman ,  Steven Kasapi ,  Itzik Goldberger

Inventor： Nader Pakdaman ,  Steven Kasapi ,  Itzik Goldberger

IPC: G01R33/12

CPC classification number: G01R31/311 ,  G01R31/2831 ,  G01R31/2884

Abstract: Systems and methods consistent with principles of the present invention allow contactless measuring of various kinds of electrical activity within an integrated circuit. The invention can be used for high-bandwidth, at speed testing of various devices on a wafer during the various stages of device processing, or on packaged parts at the end of the manufacturing cycle. Power is applied to the test circuit using conventional mechanical probes or other means, such as CW laser light applied to a photoreceiver provided on the test circuit. The electrical test signal is introduced into the test circuit by stimulating the circuit using a contactless method, such as by directing the output of one or more modelocked lasers onto high-speed receivers on the circuit, or by using a high-speed pulsed diode laser. The electrical activity within the circuit in response to the test signal is sensed by a receiver element, such as a time-resolved photon counting detector, a static emission camera system, or by an active laser probing system. The collected information is used for a variety of purposes, including manufacturing process monitoring, new process qualification, and model verification.

Abstract translation: 与本发明的原理一致的系统和方法允许在集成电路内的各种电活动的非接触式测量。 本发明可以用于在器件处理的各个阶段期间的晶片上的各种器件的高带宽，速度测试，或者在制造周期结束时的封装部件上。 使用传统的机械探针或其他手段（例如施加到设置在测试电路上的光接收器的CW激光）将功率施加到测试电路。 电测试信号通过使用非接触方法来刺激电路而被引入到测试电路中，例如通过将一个或多个锁模激光器的输出引导到电路上的高速接收器上，或者通过使用高速脉冲二极管激光器 。 响应于测试信号的电路内的电活动由诸如时间分辨光子计数检测器，静态发射照相机系统或主动激光探测系统的接收器元件感测。 收集的信息用于各种目的，包括制造过程监控，新工艺认证和型号验证。

公开(公告)号：US07038442B2

公开(公告)日：2006-05-02

申请号：US11040333

申请日：2005-01-20

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/302

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

Abstract translation: 用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。 该分析涉及光子发射的空间和/或时间相关性。 在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。 在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。 在一些情况下，重量反映了光子被晶体管发射的可能性。 该分析还可以包括自动识别光子发射图像中的晶体管。

公开(公告)号：US07012537B2

公开(公告)日：2006-03-14

申请号：US10845013

申请日：2004-05-14

Applicant: Gary Leonard Woods ,  Steven Kasapi

Inventor： Gary Leonard Woods ,  Steven Kasapi

IPC: G08B21/00

CPC classification number: G01R31/311

Abstract: A beacon circuit enabling study of active elements in an integrated circuit is disclosed. The beacon circuit may be integral to a DUT to be tested. The DUT is stimulated by a conventional ATE, so that its active devices are operating. The signal from the active device is sent to the beacon circuit which, in response to the signal, emits light having intensity that is proportional to the value of the signal. In one example, the beacon circuit is constructed as a voltage to current converter having its input connected to the node of interest and its output connected to a current to light converter. In one example, the current to light converter is implemented as a current mirror circuit. One beneficial implementation disclosed is the use of the beacon circuit for the study of voltage supply disturbances.

Abstract translation: 公开了一种能够研究集成电路中的有源元件的信标电路。 信标电路可以与待测试的DUT成为一体。 DUT由常规ATE激励，使其有源器件正在运行。 来自有源器件的信号被发送到信标电路，信标电路响应于信号发射具有与信号值成比例的强度的光。 在一个示例中，信标电路被构造为其电压到电流转换器，其输入连接到感兴趣的节点，并且其输出连接到电流到光转换器。 在一个示例中，电流到光转换器被实现为电流镜电路。 公开的一个有益实施是使用信标电路来研究电压干扰。

公开(公告)号：US06961672B2

公开(公告)日：2005-11-01

申请号：US10379950

申请日：2003-03-05

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G01R31/28 ,  G06F11/30

CPC classification number: G01R31/2887

Abstract: A universal diagnostic platform (UDP) is described which incorporates several measurement modules for testing a device under test (DUT). Users can switch between measurement modules without removing the DUT. The UDP employs a common fixturing and software system for all the modules.

Abstract translation: 描述了通用诊断平台（UDP），其包括用于测试被测器件（DUT）的若干测量模块。 用户可以在测量模块之间切换，而无需去除DUT。 UDP为所有模块使用通用的固定和软件系统。

公开(公告)号：US08686748B2

公开(公告)日：2014-04-01

申请号：US13095831

申请日：2011-04-27

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G01R31/308 ,  G01R31/302

CPC classification number: G01R31/311 ,  G01R31/2851 ,  G01R31/308

Abstract: An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.

Abstract translation: 公开了一种用于提供调制映射的设备。 该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间 调制图由选定时间段内收集的调制激光和IC的选定区域组成。

公开(公告)号：US20100039131A1

公开(公告)日：2010-02-18

申请号：US12534069

申请日：2009-07-31

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G01R1/06

CPC classification number: G01R31/311 ,  G01R31/2851 ,  G01R31/308

Abstract: An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.

Abstract translation: 公开了一种用于提供调制映射的设备。 该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间 调制图由选定时间段内收集的调制激光和IC的选定区域组成。

公开(公告)号：US07478345B2

公开(公告)日：2009-01-13

申请号：US11241609

申请日：2005-09-30

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G06F17/50

CPC classification number: G01R31/31903 ,  G01R31/31937

Abstract: Systems and methods consistent with principles of the present invention allow contactless measurements of voltage characteristics of dynamic electrical signals in integrated circuits. The invention utilizes a signal analysis circuit, such as a voltage comparator, disposed with the circuit under test, which is optically coupled with the external timing measurement equipment. The signal analysis circuit changes its state depending on the characteristics of the measured electrical signal applied thereto. The changes in the condition of the signal analysis circuit are sensed by the external timing measurement equipment provided outside the circuit under test. To this end, the signal analysis circuit is optically coupled with the external measurement equipment registering specific changes in the condition of the signal analysis circuit. The information on the condition of the signal analysis circuit registered by the external measurement equipment is used to study the characteristics of the dynamic electrical signals within the circuit.

Abstract translation: 与本发明的原理一致的系统和方法允许对集成电路中的动态电信号的电压特性进行非接触式测量。 本发明利用与被测电路配置的信号分析电路，例如电压比较器，其与外部定时测量设备光耦合。 信号分析电路根据所施加的测量电信号的特性改变其状态。 信号分析电路状态的变化由设在被测电路外部的外部定时测量设备检测。 为此，信号分析电路与外部测量设备光学耦合，记录信号分析电路的状况的特定变化。 由外部测量设备登记的信号分析电路的状况信息用于研究电路内动态电信号的特性。

公开(公告)号：US07439730B2

公开(公告)日：2008-10-21

申请号：US11296888

申请日：2005-12-08

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/28

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

Abstract translation: 用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。 该分析涉及光子发射的空间和/或时间相关性。 在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。 在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。 在一些情况下，重量反映了光子被晶体管发射的可能性。 该分析还可以包括自动识别光子发射图像中的晶体管。

公开(公告)号：US20070002329A1

公开(公告)日：2007-01-04

申请号：US11169423

申请日：2005-06-29

Applicant: Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

Inventor： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC: G01B9/02

CPC classification number: G01R31/308 ,  G01R31/311

Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。