公开(公告)号：US5996411A

公开(公告)日：1999-12-07

申请号：US756195

申请日：1996-11-25

Applicant: Ronald B. Leonardson ,  James R. Woodruff

Inventor： Ronald B. Leonardson ,  James R. Woodruff

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0828

Abstract: An accelerometer formed from a semiconducting substrate and first and second active layers coupled to the opposite surfaces of the substrate. The substrate has a frame and a proof mass suspended from the frame by one or more flexures for rotation about an input axis in response to an applied force. The active layers each include a vibratory force transducer mechanically coupled to the proof mass for detecting a force applied to the proof mass. With this configuration, the transducers are located on either side of the substrate, which improves the differential design symmetry of the force detecting apparatus. This reduces the common mode non-linear response characteristics of the accelerometer, particularly in high dynamics applications, where high performance is required.

Abstract translation: 由半导体衬底形成的加速度计和耦合到衬底的相对表面的第一和第二有源层。 衬底具有一个框架和一个证明质量块，通过一个或多个挠曲件从框架悬挂，以响应于所施加的力围绕输入轴线旋转。 有源层各自包括机械耦合到检测质量块的振动力传感器，用于检测施加到检验质量块的力。 通过这种构造，换能器位于基板的两侧，这改善了力检测装置的差分设计对称性。 这降低了加速度计的共模非线性响应特性，特别是在需要高性能的高动态应用中。

公开(公告)号：US5407868A

公开(公告)日：1995-04-18

申请号：US988591

申请日：1992-12-08

Applicant: Rex B. Peters ,  James R. Woodruff

Inventor： Rex B. Peters ,  James R. Woodruff

IPC: C25F3/12 ,  H01L21/306

CPC classification number: C25F3/12

Abstract: A method for selectively etching a semiconductor wafer in the presence of an electrochemical etchant wherein the electrical potential of the area that is selectively etched is automatically changed to a potential at which the etching is inhibited once the desired etching in the area is completed. The method is described with respect to making an electrode tip for a tunnel current sensing device.

Abstract translation: 一种在电化学蚀刻剂存在下选择性地蚀刻半导体晶片的方法，其中当该区域中所需的蚀刻完成后，被选择性蚀刻的区域的电势被自动地改变为蚀刻被抑制的电位。 关于制造用于隧道电流检测装置的电极头来描述该方法。

公开(公告)号：US5377545A

公开(公告)日：1995-01-03

申请号：US986958

申请日：1992-12-08

Applicant: Brian L. Norling ,  James R. Woodruff

Inventor： Brian L. Norling ,  James R. Woodruff

IPC: G01P15/08 ,  G01P15/13

CPC classification number: G01P15/131 ,  G01P15/0894

Abstract: A servo accelerometer uses a tunnel current sensor having a first sensing electrode coupled in fixed alignment with a frame and a second sensing electrode coupled to a proof mass. A position sensing circuit develops a sensing signal indicative of displacement of the proof mass. A feedback circuit provides an output signal and provides a feedback signal to electrostatic drive electrodes for applying an electrostatic repositioning force to the proof mass. The proof mass and frame are connected by a highly compliant suspension structure.

Abstract translation: 伺服加速度计使用隧道电流传感器，该隧道电流传感器具有与框架固定对准的第一感测电极和耦合到检测质量块的第二感测电极。 位置检测电路产生指示检验质量块位移的感测信号。 反馈电路提供输出信号，并向静电驱动电极提供反馈信号，以将静电重新定位力施加到检测质量块。 检测质量和框架通过高度兼容的悬挂结构连接。

公开(公告)号：US5005413A

公开(公告)日：1991-04-09

申请号：US316399

申请日：1989-02-27

Applicant: Mitchell J. Novack ,  Brian L. Norling ,  James R. Woodruff

Inventor： Mitchell J. Novack ,  Brian L. Norling ,  James R. Woodruff

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/12

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: A push-pull accelerometer in which both force transducers lie in a common plane. Thus, when implemented in silicon micromachined device, both transducers can be fabricated from a single crystal layer, thereby producing transducers with closely matched common mode responses.

Abstract translation: 推力加速度计，其中两个力传感器位于公共平面中。 因此，当在硅微加工器件中实现时，两个换能器可以由单晶层制造，从而产生具有紧密匹配的共模响应的换能器。

公开(公告)号：US6119520A

公开(公告)日：2000-09-19

申请号：US281755

申请日：1999-03-30

Applicant: James R. Woodruff

Inventor： James R. Woodruff

IPC: B81B3/00 ,  G01P1/02 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10

CPC classification number: B81B3/0081 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/097 ,  B81B2201/0235 ,  B81C2201/014 ,  B81C2201/019 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: The method of the present invention includes forming a frame and a proof mass suspended from the frame by one or more flexures, and including within a thin active layer one or more vibratory force transducers suitably coupled to the proof mass for detecting a force applied to the proof mass. According to the present invention, an insulating layer, such as silicon oxide, is formed between the substrate and the active layer to insulate the active layer from the substrate. Providing a separate insulating layer between the substrate and active layer improves the electrical insulation between the proof mass and the transducers, which allows for effective operation over a wide range of temperatures.

Abstract translation: 本发明的方法包括通过一个或多个弯曲形成框架和悬挂在框架上的检验质量块，并且在薄的活性层内包括一个或多个适当地耦合到检测质量块的振动力传感器，用于检测施加到 防爆质量。 根据本发明，在衬底和有源层之间形成诸如氧化硅的绝缘层，以使有源层与衬底绝缘。 在衬底和有源层之间提供单独的绝缘层改善了校准质量块和换能器之间的电绝缘，这允许在宽的温度范围内有效地操作。

公开(公告)号：US5948982A

公开(公告)日：1999-09-07

申请号：US28152

申请日：1998-02-23

Applicant: James R. Woodruff ,  Ronald B. Leonardson

Inventor： James R. Woodruff ,  Ronald B. Leonardson

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: Accelerometers and methods of forming accelerometers are described. The accelerometers are provided with electrically conductive structure configured for connection with external circuitry. The electrically conductive structure has a folded-back architecture which reduces temperature-induced anomalies which can adversely impact acceleration-sensing function of the accelerometer.

Abstract translation: 描述加速度计和形成加速度计的方法。 加速度计具有配置成与外部电路连接的导电结构。 导电结构具有折回结构，其降低温度引起的异常，这可能不利地影响加速度计的加速度感测功能。

公开(公告)号：US5948981A

公开(公告)日：1999-09-07

申请号：US735299

申请日：1996-10-22

Applicant: James R. Woodruff

Inventor： James R. Woodruff

IPC: B81B3/00 ,  G01P1/02 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10

CPC classification number: B81B3/0081 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/097 ,  B81B2201/0235 ,  B81C2201/014 ,  B81C2201/019 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: The apparatus of the present invention includes a substrate and a thin active layer each comprising a semiconducting material. The substrate has a frame and a proof mass suspended from the frame by one or more flexures, and the active layer includes one or more vibratory force transducers suitable coupled to the proof mass for detecting a force applied to the proof mass. According to the present invention, an insulating layer, such as silicon oxide, is formed between the substrate and the active layer to insulate the active layer from the substrate. Providing a separate insulating layer between the substrate and active layer improves the electrical insulation between the proof mass and the transducers, which allows for effective operation over a wide range of temperatures. The vibratory force transducers comprise first and second parallel beams, each beam having one or more fingers extending laterally outward from the beam and intermeshed with fingers projecting laterally inward towards the beam from an electrode positioned adjacent to the beam.

Abstract translation: 本发明的装置包括每个包括半导体材料的衬底和薄的有源层。 衬底具有通过一个或多个挠曲件从框架悬挂的框架和检验质量块，并且活性层包括一个或多个振动力传感器，该振动力传感器适合耦合到检测质量块，用于检测施加到检验质量块的力。 根据本发明，在衬底和有源层之间形成诸如氧化硅的绝缘层，以使有源层与衬底绝缘。 在衬底和有源层之间提供单独的绝缘层改善了校准质量块和换能器之间的电绝缘，这允许在宽的温度范围内有效地操作。 振动力传感器包括第一和第二平行光束，每个光束具有从光束横向向外延伸的一个或多个指状物，并且与从该光束相邻定位的电极横向向内朝着光束突出的指状物相互啮合。

公开(公告)号：US5501103A

公开(公告)日：1996-03-26

申请号：US198228

申请日：1994-02-15

Applicant: James R. Woodruff ,  Michael J. Robinson

Inventor： James R. Woodruff ,  Michael J. Robinson

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: An electromagnetically-excited silicon micromachined vibrating beam accelerometer includes a proof mass or pendulum attached to an outer casing by way of a pair of flexures defining a hinge axis HA. A double-ended tuning fork (DETF) is connected between the proof mass and the casing along an axis generally perpendicular to the hinge axis (HA) defining a sensitive axis SA such that forces applied along the hinge axis HA will cause the DETF to go into either compression or tension. Electromagnetic excitation causes the vibrating beams to vibrate at a resonant frequency when the proof mass is at rest. In response to a force along the sensitive axis SA, the vibrating beams go into either tension or compression resulting in a change in the resonant frequency which, in turn, is used as a measure of the force. The excitation includes a magnetic field B, applied in a direction generally perpendicular to the plane of the DETF and perpendicular to the sensitive axis SA. In order to eliminate the effects of variations in the resistance path of the vibrating beams due to either manufacturing tolerances and temperature, the DETF in accordance with the present invention is formed as a dual-port device with separate conducting paths for the drive circuit and the pick-off circuit. By providing separate conducting paths, the effects of changes in the resistance path of the drive circuit have little effect on the overall performance of the oscillator. Since the beams are separated, the DETFs are configured to provide sufficient mechanical coupling of the beams forming the DETF.

Abstract translation: 电磁激励硅微加工振动束加速度计包括通过限定铰链轴HA的一对挠曲件附接到外壳的检验质量块或摆锤。 双端音叉（DETF）沿着大致垂直于定义敏感轴SA的铰链轴（HA）的轴线连接在检测质量体和壳体之间，使得沿着铰链轴HA施加的力将导致DETF移动 压缩或紧张。 当检测质量静止时，电磁激励使振动束以共振频率振动。 响应于沿着敏感轴SA的力，振动束进入张力或压缩，导致谐振频率的变化，其又被用作力的量度。 激励包括磁场B，其施加在大致垂直于DETF的平面并垂直于敏感轴线SA的方向上。 为了消除由于制造公差和温度导致的振动梁的阻力路径的变化的影响，根据本发明的DETF形成为双端口装置，其具有用于驱动电路的分离的导电路径和 起动电路 通过提供单独的导电路径，驱动电路的电阻路径的变化的影响对振荡器的整体性能几乎没有影响。 由于光束被分离，所以DETF被配置成提供形成DETF的光束的足够的机械耦合。

公开(公告)号：US5275048A

公开(公告)日：1994-01-04

申请号：US822778

申请日：1992-01-21

Applicant: Rand H. Hulsing, II ,  Brian L. Norling ,  James R. Woodruff

Inventor： Rand H. Hulsing, II ,  Brian L. Norling ,  James R. Woodruff

IPC: G01P15/02

CPC classification number: G01P15/02

Abstract: An acceleration overload protection mechanism for use with a sensor unit. The sensor unit is generally defined by a sensor element or elements (i.e., proof mass, flexures, etc.) that are movable in relation to a sensor frame. The overload protection mechanism includes at least one arresting plate. The arresting plate includes a plate frame and an arresting element that are elastically coupled to one another to permit relative movement therebetween. The plate frame of the overload protection mechanism is placed in fixed alignment with the sensor frame to place the arresting element in spaced relation with the sensor element of the sensor unit. The arresting element and sensor element may move relative to one another to allow the arresting element to move to a position proximate the sensor element to limit the range of motion of the sensor element when the sensor unit is subject to an acceleration overload. Projections extend between the arresting element and sensor unit to engage corresponding channels thereby protecting the sensor unit from damage due to cross-axis accelerations.

Abstract translation: 用于传感器单元的加速过载保护机构。 传感器单元通常由相对于传感器框架可移动的传感器元件（即，检验质量块，挠曲件等）限定。 过载保护机构包括至少一个止动板。 止动板包括板框架和止动元件，其相互弹性地联接以允许它们之间的相对移动。 过载保护机构的平板框架与传感器框架固定对准，以将止动元件与传感器单元的传感器元件间隔开。 阻止元件和传感器元件可以相对于彼此移动，以允许止动元件移动到靠近传感器元件的位置，以在传感器单元经受加速过载时限制传感器元件的运动范围。 突出部分在阻止元件和传感器单元之间延伸以接合相应的通道，从而保护传感器单元免受横轴加速度的损害。

公开(公告)号：US5133214A

公开(公告)日：1992-07-28

申请号：US526559

申请日：1990-05-18

Applicant: Richard A. Hanson ,  James R. Woodruff ,  Gerald R. Newell

Inventor： Richard A. Hanson ,  James R. Woodruff ,  Gerald R. Newell

IPC: G01P21/00

CPC classification number: G01P21/00

Abstract: A method for post-production reduction of scale factor nonlinearities including testing of an assembled torque coil and magnetic circuit to determine nonlinearities. To reduce the scale factor nonlinearities, the position of a magnetic circuit component which intercepts the magnetic flux passing through a torque coil is changed. The position of the interior surface of a magnetic end cap is changed with respect to the position of the torque coil. The location of the interior surface of the end cap is varied by using an end cap having a plug portion which is selected to have an interior surface at a location which minimizes scale factor nonlinearities.An force-balance accelerometer has an improved magnetic circuit for reducing nonlinear scale factors. The magnetic circuit which provides a return path for magnetic flux from a permanent magnet source includes an end cap having an interior surface which is located at an optimum distance from the torque coil of the accelerometer to minimize scale factor distortion. The end cap includes a plug member having a predetermined reference surface for engagement with a reference surface in the end cap to locate the interior surface of the plug at an optimum position.

Abstract translation: 一种缩小因子非线性的后期制作方法，包括组装的扭矩线圈和磁路的测试，以确定非线性。 为了减小比例因子非线性，改变了截取通过转矩线圈的磁通的磁路部件的位置。 磁性端盖的内表面的位置相对于扭矩线圈的位置而改变。 通过使用具有塞子部分的端盖来改变端盖的内表面的位置，所述端盖被选择为具有使比例因子非线性最小化的位置处的内表面。 力平衡加速度计具有改进的磁路，用于减小非线性比例因子。 提供用于来自永磁体源的磁通的返回路径的磁路包括具有内表面的端盖，该内表面位于距加速度计的扭矩线圈最佳距离处，以最小化比例因子失真。 端盖包括具有预定参考表面的插塞构件，用于与端盖中的参考表面接合以将插头的内表面定位在最佳位置。