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107 条记录 (耗时 0.031 秒)

    Interferometers of high resolutions
    11.
    发明申请
    Interferometers of high resolutions 审中-公开

    公开(公告)号：US20060232784A1

    公开(公告)日：2006-10-19

    申请号：US11109994

    申请日：2005-04-19

    申请人： Regis Grasser ,  Satyadev Patel ,  Andrew Huibers

    发明人： Regis Grasser ,  Satyadev Patel ,  Andrew Huibers

    IPC分类号： G01B11/02

    CPC分类号： G01B9/02063 ,  G01B9/02058

    摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

    Optical coating on light transmissive substrates of micromirror devices
    13.
    发明授权
    Optical coating on light transmissive substrates of micromirror devices 有权
    微镜器件的透光基板上的光学涂层

    公开(公告)号：US07295363B2

    公开(公告)日：2007-11-13

    申请号：US11102531

    申请日：2005-04-08

    申请人： Satyadev Patel ,  Peter Heureux ,  Jonathan Doan ,  Regis Grasser

    发明人： Satyadev Patel ,  Peter Heureux ,  Jonathan Doan ,  Regis Grasser

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

    摘要翻译： 这里公开的是操作包括微镜阵列的装置的方法。 该方法包括可用于在操作期间修复微镜阵列的粘性微镜的过程。 修复过程在ON状态下，对阵列中的微镜的镜板施加两个连续的刷新电压，其中脉冲在时间上比微镜的特征振荡时间长。 修复过程可独立应用于微镜。 或者，修复过程可以结合偏置反转过程。

    Optical coating on light transmissive substrates of micromirror devices
    14.
    发明申请
    Optical coating on light transmissive substrates of micromirror devices 有权
    微镜器件的透光基板上的光学涂层

    公开(公告)号：US20060227406A1

    公开(公告)日：2006-10-12

    申请号：US11102531

    申请日：2005-04-08

    申请人： Satyadev Patel ,  Peter Heureux ,  Jonathan Doan ,  Regis Grasser

    发明人： Satyadev Patel ,  Peter Heureux ,  Jonathan Doan ,  Regis Grasser

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

    摘要翻译： 这里公开了一种操作包括微镜阵列的装置的方法。 该方法包括可用于在操作期间修复微镜阵列的粘性微镜的过程。 修复过程在ON状态下，对阵列中的微镜的镜板施加两个连续的刷新电压，其中脉冲在时间上比微镜的特征振荡时间长。 修复过程可独立应用于微镜。 或者，修复过程可以结合偏置反转过程。