公开(公告)号：US20110031383A1

公开(公告)日：2011-02-10

申请号：US12535561

申请日：2009-08-04

申请人： Joseph D. Tobiason ,  Toru Yaku ,  Emi Kaneko ,  Eric H. Altendorf

发明人： Joseph D. Tobiason ,  Toru Yaku ,  Emi Kaneko ,  Eric H. Altendorf

IPC分类号： G01D5/34

CPC分类号： G01D5/34

摘要： A method and apparatus for suppressing loss of scale image contrast due to interference effects from optical path length differences, including lens profile aberrations, are provided in a displacement sensing optical encoder that uses a telecentric imaging configuration. According to the invention, the encoder is configured such that the image light that reaches the detector comprises symmetric ray bundles concentrated symmetrically on opposite sides of the optical axis center at the limiting aperture of the telecentric imaging configuration. Central ray bundles, and/or other ray bundles that have an optical path lengths significantly different than the operational symmetric ray bundles are prevented or blocked. As a result destructive interference is prevented and image contrast is improved.

摘要翻译： 在使用远心成像配置的位移感测光学编码器中提供了一种用于抑制由于光程长度差异造成的干涉影响造成的尺度图像对比度损失的方法和装置，包括透镜轮廓像差。 根据本发明，编码器被配置为使得到达检测器的图像光包括在远心成像配置的限制孔径处对称地集中在光轴中心的相对侧上的对称光束。 防止或阻止具有与操作对称光束的显着不同的光路长度的中心线束和/或其他光束束。 因此，防止了破坏性干扰并且改善了图像对比度。

公开(公告)号：US20090109285A1

公开(公告)日：2009-04-30

申请号：US11925642

申请日：2007-10-26

申请人： Joseph D. Tobiason ,  Paul G. Gladnick

发明人： Joseph D. Tobiason ,  Paul G. Gladnick

IPC分类号： H04N7/18

CPC分类号： G02B21/06 ,  G02B21/365 ,  H04N5/2256

摘要： A micro light interface assembly for a microscopic machine vision inspection system includes a micro light assembly. The micro light assembly provides addressable light emitting elements arranged around the periphery of an aperture having an aperture dimension DAPMIN that is smaller than a barrel dimension DBAR of the inspection system objective lens. The aperture may be located along the optical axis and within the working distance of the objective lens such that the light emitting elements are closely arranged around a field of view. The micro light interface assembly may be held and operated through a connection element that may be used for the interchanging the micro light interface assembly with a touch probe, in some embodiments.

摘要翻译： 用于微机器视觉检查系统的微光接口组件包括微型灯组件。 微型灯组件提供可寻址的发光元件，其围绕具有小于检查系统物镜的镜筒尺寸DBAR的孔径尺寸DAPMIN的孔周边布置。 孔可以沿着光轴并且在物镜的工作距离内定位，使得发光元件围绕视场紧密地布置。 在一些实施例中，微光接口组件可以通过连接元件来保持和操作，该连接元件可用于将微光接口组件与探针交换。

公开(公告)号：US07130320B2

公开(公告)日：2006-10-31

申请号：US10705903

申请日：2003-11-13

申请人： Joseph D. Tobiason ,  David W. Sesko

发明人： Joseph D. Tobiason ,  David W. Sesko

IPC分类号： H01S3/10 ,  H01S3/08

CPC分类号： H01S3/1062 ,  H01S3/08059 ,  H01S5/02248 ,  H01S5/141

摘要： An external cavity laser has a wavelength of the laser output that is tuned by a rotary tuning element mounted on the axle of a motor. The rotary tuning element includes a variable thickness interference film for wavelength selection, and a variable thickness compensation prism to adjust the cavity length appropriately for the selected wavelength, to stable wavelengths and mode-hop-free tuning ranges as the tuning element is rotated.

摘要翻译： 外腔激光器具有由安装在电动机轴上的旋转调谐元件调谐的激光输出的波长。 旋转调谐元件包括用于波长选择的可变厚度干涉膜和可调节厚度补偿棱镜，用于在调谐元件旋转时将所选择的波长适当地调节腔长度，到稳定波长和无跳跃调谐范围。

公开(公告)号：US07608813B1

公开(公告)日：2009-10-27

申请号：US12273400

申请日：2008-11-18

申请人： Michelle M. Milvich ,  Joseph D. Tobiason

发明人： Michelle M. Milvich ,  Joseph D. Tobiason

IPC分类号： G01D5/34

CPC分类号： G01D5/34784

摘要： An encoder configuration comprises an illumination portion, absolute scale pattern comprising absolute tracks, and a detector having a width dimension YDETABS. An absolute track pattern comprises geometrically congruent sub tracks, and the congruent sub tracks are arranged such that if one is translated by the width dimension YDETABS, then they will nominally coincide. The congruent sub tracks may be separated by a dimension YCENT that is less than YDETABS, and may each have a dimension YTOL, such that [YCENT+2(YTOL)] is greater than YDETABS. Thus, the detector may be narrower than the absolute track pattern, but because the detector edges are each nominally located over congruent sub tracks the detected signal is not sensitive to lateral misalignment of the detector within the pattern. These principles provide great freedom in configuring advantageous individual pattern features in the absolute track, even though the detector is narrower than the absolute track.

摘要翻译： 编码器配置包括照明部分，包括绝对轨迹的绝对刻度图案和具有宽度尺寸YDETABS的检测器。 绝对轨道图案包括几何相等的子轨道，并且一致的子轨道被布置成使得如果通过宽度尺寸YDETABS平移，则它们将名义上重合。 一致的子轨道可以由小于YDETABS的维度YCENT分隔，并且可以各自具有维度YTOL，使得[YCENT + 2（YTOL）]大于YDETABS。 因此，检测器可以比绝对轨道图案更窄，但是由于检测器边缘各自名义上位于遍及子轨道上，所检测的信号对于图案内的检测器的横向不对准不敏感。 尽管检测器比绝对轨道窄，但是这些原理提供了在绝对轨迹中配置有利的各个图案特征的极大自由度。

公开(公告)号：US07126696B2

公开(公告)日：2006-10-24

申请号：US10674619

申请日：2003-09-30

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01B9/02 ,  G01D5/38

CPC分类号： G01D5/34723 ,  G01D5/38

摘要： An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1–2 millimeters.

摘要翻译： 公开了用于感测刻度光栅位移的干涉光纤编码器读头。 读取头的检测器通道是具有相应的相位光栅掩模的光纤检测器通道。 光纤编码器读头被配置为检测由刻度光栅引起的干涉条纹的位移。 在各种示例性实施例中，根据确保紧凑安装和相对理想的正弦信号作为位移的函数的各种设计关系，构造并可操作地定位光纤读头。 因此，可以实现高水平的位移信号插值，允许亚微米位移测量。 光纤编码器读头可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的包装中。

公开(公告)号：US07091475B2

公开(公告)日：2006-08-15

申请号：US10434508

申请日：2003-05-07

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01B9/02

CPC分类号： G01D5/34723 ,  G01D5/268

摘要： A 2D fiber optic encoder readhead having multiple readhead portions for sensing the two-dimensional displacement of a scale grating is disclosed. The detector channels of the readhead portions are fiber optic detector channels having respective phase grating masks. At least two of the phase grating masks have different orientations so as to facilitate the detection of displacement in at least two different directions. The 2D fiber optic encoder readhead portions are configured to detect the displacement of a self-image pattern that results from a corresponding pattern on the scale grating. The self-image pattern allows for the detection of displacement in the at least two different directions. In various exemplary embodiments, the fiber optic readhead portions are constructed according to various design relationships that insure a robust signal-to-noise ratio. Accordingly, high levels of displacement signal interpolation may be achieved. The 2D fiber optic encoder readhead portions may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1–2 millimeters, resulting in a very small overall readhead dimension that is dependent on the number of readhead portions that are incorporated.

摘要翻译： 公开了具有用于感测刻度光栅的二维位移的多个读取头部分的2D光纤编码器读取头。 读取头部分的检测器通道是具有各自的相位光栅掩模的光纤检测器通道。 至少两个相位光栅掩模具有不同的取向，以便于在至少两个不同方向上检测位移。 2D光纤编码器读取头部分被配置为检测由比例光栅上的对应图案产生的自身图像图案的位移。 自图像图案允许检测至少两个不同方向上的位移。 在各种示例性实施例中，根据确保稳健的信噪比的各种设计关系来构造光纤读头头部分。 因此，可以实现高水平的位移信号插值。 2D光纤编码器读头部分可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的封装中，导致非常小的整体读取头尺寸，其取决于 读入头部分被并入。

公开(公告)号：US08085295B2

公开(公告)日：2011-12-27

申请号：US11925642

申请日：2007-10-26

申请人： Joseph D. Tobiason ,  Paul G. Gladnick

发明人： Joseph D. Tobiason ,  Paul G. Gladnick

IPC分类号： H04N7/18 ,  G06K9/42

CPC分类号： G02B21/06 ,  G02B21/365 ,  H04N5/2256

摘要： A micro light interface assembly for a microscopic machine vision inspection system includes a micro light assembly. The micro light assembly provides addressable light emitting elements arranged around the periphery of an aperture having an aperture dimension DAPMIN that is smaller than a barrel dimension DBAR of the inspection system objective lens. The aperture may be located along the optical axis and within the working distance of the objective lens such that the light emitting elements are closely arranged around a field of view. The micro light interface assembly may be held and operated through a connection element that may be used for the interchanging the micro light interface assembly with a touch probe, in some embodiments.

摘要翻译： 用于微机器视觉检查系统的微光接口组件包括微型灯组件。 微型灯组件提供可寻址的发光元件，其围绕具有小于检查系统物镜的镜筒尺寸DBAR的孔径尺寸DAPMIN的孔周边布置。 孔可以沿着光轴并且在物镜的工作距离内定位，使得发光元件围绕视场紧密地布置。 在一些实施例中，微光接口组件可以通过连接元件来保持和操作，该连接元件可用于将微光接口组件与探针交换。

公开(公告)号：US07973941B2

公开(公告)日：2011-07-05

申请号：US12646614

申请日：2009-12-23

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01B11/02

CPC分类号： G01D5/34723 ,  G01D5/266 ,  G01D5/268 ,  G01D5/366

摘要： A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. In some embodiments, a zone grating type reference mark may be embedded in a periodic scale grating, and configured such that it provides strong reference mark primary signals without disrupting periodic incremental measurement signals associated with the periodic scale grating. In one embodiment, the readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers.

摘要翻译： 提供了使用光纤接收器通道的干涉式微型光栅编码器读取头的参考标记配置。 读取头可以包括提供参考标记主要信号的主要光纤，其被处理以产生具有约0.2微米精度的参考信号。 在一些实施例中，区域光栅类型参考标记可以嵌入在周期性尺度光栅中，并且被配置为使得其提供强参考标记主信号而不中断与周期性刻度光栅相关联的周期性增量测量信号。 在一个实施例中，读取头可以包括用于产生被处理以产生具有大约20纳米的精度的参考信号的参考标记辅助信号的次级光纤。

公开(公告)号：US07292347B2

公开(公告)日：2007-11-06

申请号：US11193437

申请日：2005-08-01

申请人： Joseph D. Tobiason ,  David W. Sesko

发明人： Joseph D. Tobiason ,  David W. Sesko

IPC分类号： G01B11/02

CPC分类号： G01B9/02004 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02048 ,  G01B9/02081 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70

摘要： An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wavelengths simultaneously, to allow reduction or elimination of certain common-mode error components, including dynamic error components. The device may scan at least one of the laser wavelengths over a relatively narrow range and may use quadrature detectors to provide enough signal data to allow certain self-corrections to be performed on the resulting scanned signals and measurements. A novel tunable laser and/or quadrature detector may provide advantages in combination with the device.

摘要翻译： 基于激光干涉测量的绝对距离测量装置可以组合粗，中，高分辨率测量技术，以找到具有高分辨率的样品表面的绝对距离。 该装置可以同时提供至少两个激光波长，以允许减少或消除某些共模误差分量，包括动态误差分量。 器件可以在相对窄的范围内扫描至少一个激光波长，并且可以使用正交检测器来提供足够的信号数据，以便对所得到的扫描信号和测量执行某些自校正。 一种新颖的可调激光和/或正交检测器可以与该装置组合提供优点。

公开(公告)号：US06906315B2

公开(公告)日：2005-06-14

申请号：US10298312

申请日：2002-11-15

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01D5/38 ,  G01D5/347 ,  G02B5/18 ,  G01B9/02

CPC分类号： G01D5/34723

摘要： A fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of a self-image of the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed according to various design relationships that insure a robust signal-to-noise ratio. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.

摘要翻译： 公开了一种用于感测刻度光栅位移的光纤编码器读头。 读取头的检测器通道是具有相应的相位光栅掩模的光纤检测器通道。 光纤编码器读取头被配置为检测刻度光栅的自身图像的位移。 在各种示例性实施例中，根据确保稳健的信噪比的各种设计关系构建光纤读头。 因此，可以实现高水平的位移信号插值，允许亚微米位移测量。 光纤编码器读头可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的包装中。