公开(公告)号：US20050068539A1

公开(公告)日：2005-03-31

申请号：US10674619

申请日：2003-09-30

申请人： Joseph Tobiason

发明人： Joseph Tobiason

IPC分类号： G01B11/00 ,  G01D5/347 ,  G01D5/38 ,  G01B11/02

CPC分类号： G01D5/34723 ,  G01D5/38

摘要： An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.

摘要翻译： 公开了用于感测刻度光栅位移的干涉光纤编码器读头。 读取头的检测器通道是具有相应的相位光栅掩模的光纤检测器通道。 光纤编码器读头被配置为检测由刻度光栅引起的干涉条纹的位移。 在各种示例性实施例中，根据确保紧凑安装和相对理想的正弦信号作为位移的函数的各种设计关系，构造并可操作地定位光纤读头。 因此，可以实现高水平的位移信号插值，允许亚微米位移测量。 光纤编码器读头可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的包装中。

公开(公告)号：US20070071390A1

公开(公告)日：2007-03-29

申请号：US11235056

申请日：2005-09-26

申请人： Joseph Tobiason ,  Patrick Mawet ,  Bjorn Jansson

发明人： Joseph Tobiason ,  Patrick Mawet ,  Bjorn Jansson

IPC分类号： G02B6/36

CPC分类号： G02B6/4249 ,  G02B6/423

摘要： A method for connecting optical signals carried by optical fibers between an optical encoder readhead and an optical signal processing IC having a plurality of photodetector portions arranged in a photodetector configuration. The optical signal processing IC is fixed to a substrate at a first position and orientation. Then, a reference-surface block including at least one reference surface is fixed to the substrate in a second orientation and position based on the first position and orientation. A fiber-optic end piece is provided, which has at least one corresponding-reference surface and a plurality of optical fiber locating features that are arranged relative to the corresponding-reference surface. A plurality of the optical fibers are fixed to the plurality of optical fiber locating features to provide a coupling configuration of optical fiber ends that nominally matches the photodetector configuration. Finally, the corresponding-reference surface of the fiber-optic end piece is mounted against the reference surface of the reference-surface block such that the coupling configuration abuts the photodetector configuration.

公开(公告)号：US20070024860A1

公开(公告)日：2007-02-01

申请号：US11193437

申请日：2005-08-01

申请人： Joseph Tobiason ,  David Sesko

发明人： Joseph Tobiason ,  David Sesko

IPC分类号： G01B11/02

CPC分类号： G01B9/02004 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02048 ,  G01B9/02081 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70

摘要： An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wavelengths simultaneously, to allow reduction or elimination of certain common-mode error components, including dynamic error components. The device may scan at least one of the laser wavelengths over a relatively narrow range and may use quadrature detectors to provide enough signal data to allow certain self-corrections to be performed on the resulting scanned signals and measurements. A novel tunable laser and/or quadrature detector may provide advantages in combination with the device.

公开(公告)号：US20070008550A1

公开(公告)日：2007-01-11

申请号：US11175271

申请日：2005-07-07

申请人： Joseph Tobiason ,  David Sesko ,  Benjamin Jones ,  Michelle Milvich ,  Vidya Venkatachalam

发明人： Joseph Tobiason ,  David Sesko ,  Benjamin Jones ,  Michelle Milvich ,  Vidya Venkatachalam

IPC分类号： G01B11/02

CPC分类号： G01B9/02032 ,  G01B9/02019 ,  G01B9/02097 ,  G01B11/26

摘要： A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.

摘要翻译： 确定倾斜量的方法可以包括将至少两个相干波前投射到目标表面，波前从目标表面反射以在检测器上产生干涉条纹图案，并将光束传送到目标表面，透射光束 从目标表面反射以在检测器上形成束斑。 可以基于干涉条纹图案来确定表示到目标表面的距离的条纹间距。 可以确定当目标表面相对于光束的入射角相对于光束点的标称位置时，光斑的检测器上的位移。 目标表面相对于标称入射角的倾斜量可以基于束斑的位移和所确定的边缘间距来确定。