公开(公告)号：US20240312821A1

公开(公告)日：2024-09-19

申请号：US18670921

申请日：2024-05-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Jung-ho YUN ,  Yonggu KANG ,  Mid Uem RYU ,  Hiroki SANEMASA ,  Takashi MINAMI ,  Daisuke HIGASHITARUMIZU

IPC: H01L21/68 ,  B25J9/16 ,  B65G47/90 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J9/163 ,  B65G47/905 ,  H01L21/68707

Abstract: An automatic teaching apparatus for semiconductor manufacturing equipment includes: an equipment front end module (EFEM); one or more load ports provided along an edge of one side of the EFEM to be connected to an inside of the EFEM; a transfer robot disposed in the inside of the EFEM and configured to transfer a wafer to the one or more load ports by an end effector to process the wafer, and a load port teaching unit configured to detect a fixed position of the end effector in a state of unloading the wafer such that the wafer is placed in the fixed position within the load port.

公开(公告)号：US20240186175A1

公开(公告)日：2024-06-06

申请号：US18510394

申请日：2023-11-15

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Yoshiki KIMURA ,  Hiroki SANEMASA

IPC: H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J19/021 ,  H01L21/681

Abstract: A substrate transfer apparatus includes a hand that transfers a substrate from a cassette that accommodates substrates in multiple stages in a vertical direction; a movement mechanism that moves the hand; a controller that controls the movement mechanism; and a first detection unit that detects the substrate. The controller includes an offset amount change unit that changes an offset amount by which the hand is moved up and down from a substrate support height of the cassette when the hand loads and unloads the substrate with respect to the cassette, according to a thickness or a deflection amount of the substrate detected by the first detection unit.

公开(公告)号：US20230381948A1

公开(公告)日：2023-11-30

申请号：US18199649

申请日：2023-05-19

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Ryosuke WATANABE ,  Osamu HARADA ,  Osamu KOMIYAJI ,  Masanobu KAKIHARA ,  Yuki HONDA

IPC: B25J9/00 ,  B25J9/04 ,  B25J19/00

CPC classification number: B25J9/0009 ,  B25J9/042 ,  B25J19/0041

Abstract: A transfer robot includes a plurality of hands, a plurality of hand drive motors, and an arm. The plurality of hands are capable of holding a transfer target object, and pivot individually around a pivoting axis. The plurality of hand drive motors are arranged in a direction following the pivoting axis, such that a motor axis to which the plurality of hands are each connected becomes concentric with the pivoting axis, and directly drive the plurality of hands, respectively. The arm includes therein the plurality of hand drive motors.

公开(公告)号：US20130195600A1

公开(公告)日：2013-08-01

申请号：US13739271

申请日：2013-01-11

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Osamu KOMIYAJI ,  Masayuki SUZUKI ,  Hiroki SANEMASA

IPC: B25J18/04

CPC classification number: B25J18/04 ,  B25J9/043 ,  B25J9/104 ,  B25J9/1045 ,  B25J19/0066

Abstract: A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley.

Abstract translation: 机器人包括具有可旋转地安装在接合部上的基端部和安装有输出轴的前端部的臂; 以及驱动机构，其布置在所述臂内并且构造成以降低的速度驱动所述输出轴。 驱动机构包括具有马达轴的马达，安装在马达轴上的驱动皮带轮，安装在输出轴上的从动皮带轮，设置在驱动滑轮与从动皮带轮之间的至少一个中间滑轮，以及多个皮带， 通过中间滑轮将驱动滑轮和从动滑轮可操作地互连。