公开(公告)号：US20130209200A1

公开(公告)日：2013-08-15

申请号：US13726614

申请日：2012-12-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Kazunori HINO ,  Daisuke SHIN

IPC: H01L21/677

CPC classification number: H01L21/67739 ,  H01L21/67742 ,  H01L21/67766

Abstract: A carrier device according to an aspect of an embodiment includes a carrier chamber, a robot that is placed near one longitudinal-side wall in the carrier chamber, and a linear moving mechanism that has a track by which the robot is linearly moved in the longitudinal direction of the carrier chamber. The arm of the robot is defined to a length by which the arm does not interfere with the other longitudinal-side wall even if the arm is rotated around an arm spindle. The track of the linear moving mechanism has a length by which the leading end of the hand perpendicular to the track reaches a predetermined position in a connecting hole located at an end among connecting holes provided in the longitudinal-side wall.

Abstract translation: 根据实施例的一个方面的载体装置包括载体室，放置在载体室中的一个纵向侧壁附近的机器人，以及线性移动机构，其具有轨道，通过该轨道机器人在纵向上线性移动 载体室的方向。 机器人的臂被限定为即使臂围绕臂主轴旋转的臂也不会干扰另一纵向侧壁的长度。 线性移动机构的轨道具有垂直于轨道的手的前端到位于设置在纵向侧壁中的连接孔之间的连接孔中的预定位置的长度。

公开(公告)号：US20160148830A1

公开(公告)日：2016-05-26

申请号：US15016272

申请日：2016-02-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/687

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot. The substrate transfer robot is provided between a first apparatus and a second apparatus which has a wall provided opposite to the substrate transfer robot and having an opening on the wall. The substrate transfer robot is configured to transfer a substrate from the first apparatus to the second apparatus via the opening and includes a base having a first axis, an arm body, and a hand. The arm body has a proximal end and a distal end and is connected to the base at the proximal end to rotate around the first axis. The substrate transfer robot includes a minimum distance from the first axis to an outermost portion of the arm body and the hand in a radius direction from the first axis being larger than a distance between the first axis and the opening on the wall.

Abstract translation: 基板传送系统包括基板传送机器人。 衬底传送机器人设置在第一设备和第二设备之间，第二设备具有与衬底传送机器人相对设置的壁，并且在壁上具有开口。 基板传送机器人构造成经由开口将基板从第一装置传送到第二装置，并且包括具有第一轴，臂主体和手的基部。 臂体具有近端和远端，并且在近端处连接到基部以围绕第一轴线旋转。 基板传送机器人包括从臂体的第一轴线到最外侧部分的最小距离，并且距离第一轴线的半径方向上的手大于第一轴线与壁上的开口之间的距离。

公开(公告)号：US20150332946A1

公开(公告)日：2015-11-19

申请号：US14810408

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer robot is disposed in a robot installment area defined between a first apparatus and a second apparatus including an opening. The first apparatus includes a first wall, the second apparatus including a second wall. The first apparatus accommodates the substrate at each of a lowest height position and a highest height position. The substrate transfer robot includes a base stationary, a hand configured, and an arm. The arm is rotatably mounted to the base to move the hand. The hand and the arm move in a height direction between a movable range defined between a lowest position and a highest position. The arm rotates with partially entering the opening when the substrate transfer robot takes out the substrate from the first apparatus. The substrate is accommodated at each of the lowest height position and the highest height position.

Abstract translation: 基板传送机器人设置在第一设备和包括开口的第二设备之间限定的机器人安装区域中。 第一装置包括第一壁，第二装置包括第二壁。 第一装置在最低高度位置和最高高度位置的每一个处容纳基板。 基板传送机器人包括基座固定件，手形构件和臂。 手臂可旋转地安装在基座上以移动手。 手和臂在最低位置和最高位置之间限定的可移动范围之间的高度方向上移动。 当基板传送机器人从第一装置取出基板时，臂部分地进入开口旋转。 基板容纳在最低高度位置和最高高度位置中的每一个处。

公开(公告)号：US20130195598A1

公开(公告)日：2013-08-01

申请号：US13666906

申请日：2012-11-01

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI

IPC: H01L21/677

CPC classification number: H01L21/67742 ,  B25J9/042 ,  H01L21/67748 ,  Y10S414/139 ,  Y10S901/17

Abstract: A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece.

Abstract translation: 根据实施例的传送机器人包括臂和身体。 臂在其末端设置有传递薄板状工件的机器人手，并且在水平方向上操作。 身体包括提升和降低手臂的升降机构。 在传送机器人中，主体的至少一部分设置在与打开和关闭用于薄板状工件的存储容器的打开和关闭装置连接的转移室的侧壁的外侧，以及处理室处理 薄板状工件。

公开(公告)号：US20150332947A1

公开(公告)日：2015-11-19

申请号：US14810409

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes a first cassette, a second cassette and a first wall. The second apparatus includes a second wall. The substrate transfer robot transfers a substrate from each of the first cassette and the second cassette to the second apparatus. The substrate transfer robot includes a hand and an arm. The arm includes a first arm rotatable about a center of rotation. The first cassette is closer to the center of rotation than the second cassette. The arm moves with being partially disposed beyond the second wall in plan view and the arm moves without being disposed beyond the second wall in plan view when taking out the substrate from the first cassette.

Abstract translation: 衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。 第一装置包括第一盒，第二盒和第一壁。 第二装置包括第二壁。 基板传送机构将基板从第一盒和第二盒中的每一个传送到第二装置。 基板传送机器人包括手和臂。 臂包括可围绕旋转中心旋转的第一臂。 第一盒比第二盒更接近旋转中心。 臂在平面图中部分地设置在第二壁之外移动，并且当从第一盒取出基板时，臂在平面图中移动而不设置在第二壁之外。

公开(公告)号：US20130323002A1

公开(公告)日：2013-12-05

申请号：US13719273

申请日：2012-12-19

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Masayuki SUZUKI

IPC: H01L21/677

CPC classification number: H01L21/67748 ,  H01L21/67742 ,  Y10S901/49

Abstract: A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be transferred. The base unit is formed into a substantially box shape. The guide unit includes a vertical shaft vertically arranged in the base unit. The lifting unit is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion. The vent part is opened in an upper surface of the base unit and vents downflow from an outside to an inside of the base unit.

Abstract translation: 根据实施例的传送机器人包括臂单元，基座单元，引导单元，提升单元和通风部分。 手臂单元包括能够保持要传送的物体的机器人手。 基座单元形成为大致箱状。 引导单元包括垂直设置在基座单元中的垂直轴。 提升单元设置成沿着竖直轴可升高和降低，并且在上端部支撑臂单元。 通气部分在基部单元的上表面中打开并且从底部单元的外部向内部向下流动。

公开(公告)号：US20130195600A1

公开(公告)日：2013-08-01

申请号：US13739271

申请日：2013-01-11

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Osamu KOMIYAJI ,  Masayuki SUZUKI ,  Hiroki SANEMASA

IPC: B25J18/04

CPC classification number: B25J18/04 ,  B25J9/043 ,  B25J9/104 ,  B25J9/1045 ,  B25J19/0066

Abstract: A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley.

Abstract translation: 机器人包括具有可旋转地安装在接合部上的基端部和安装有输出轴的前端部的臂; 以及驱动机构，其布置在所述臂内并且构造成以降低的速度驱动所述输出轴。 驱动机构包括具有马达轴的马达，安装在马达轴上的驱动皮带轮，安装在输出轴上的从动皮带轮，设置在驱动滑轮与从动皮带轮之间的至少一个中间滑轮，以及多个皮带， 通过中间滑轮将驱动滑轮和从动滑轮可操作地互连。

公开(公告)号：US20150246447A1

公开(公告)日：2015-09-03

申请号：US14620186

申请日：2015-02-12

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Ryuji ANDO

IPC: B25J15/06 ,  B65G49/06 ,  H01L21/683

CPC classification number: B25J15/0616 ,  B65G49/061 ,  B65G49/067 ,  B65G2249/045 ,  H01L21/67766 ,  H01L21/6838

Abstract: A suction pad includes a pad portion for holding a target object by suction and having a first and a second connection end portion; and a first and a second fixing portion provided at positions spaced apart from the pad portion so as to be opposite to each other across the pad portion to fix the pad portion. The suction pad further includes a first support portion having an extension length larger than a spaced-apart distance between the pad portion and the first fixing portion and connecting the first connection end portion to the first fixing portion; and a second support portion having an extension length larger than a spaced-apart distance between the pad portion and the second fixing portion and connecting the second connection end portion to the second fixing portion.

Abstract translation: 吸盘包括用于通过抽吸来保持目标物体并具有第一和第二连接端部的焊盘部分; 以及第一和第二固定部分，设置在与所述焊盘部分间隔开的位置处，以跨过所述焊盘部分彼此相对，以固定所述焊盘部分。 吸盘还包括第一支撑部分，其延伸长度大于垫部分和第一固定部分之间的间隔距离，并将第一连接端部连接到第一固定部分; 以及第二支撑部分，其延伸长度大于所述垫部分和所述第二固定部分之间的间隔距离，并将所述第二连接端部连接到所述第二固定部分。

公开(公告)号：US20140133942A1

公开(公告)日：2014-05-15

申请号：US14073871

申请日：2013-11-07

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus comprising an opening. The substrate transfer robot includes a hand and an arm. The hand is configured to support a substrate. The arm is configured to move the hand. The arm and the hand supporting the substrate are configured to rotate on a horizontal surface within a minimal rotation area of the substrate transfer robot such that an outer periphery of the minimal rotation area overlaps an inside of the second apparatus through the opening so as to transfer the substrate from a first position in the first apparatus to a second position in the second apparatus through the opening.

Abstract translation: 衬底传送系统包括设置在包括开口的第一设备和第二设备之间限定的机器人安装区域中的衬底传送机器人。 基板传送机器人包括手和臂。 手被配置成支撑衬底。 手臂配置为移动手。 支撑基板的手臂和手被构造成在基板传送机器人的最小旋转区域内的水平表面上旋转，使得最小旋转区域的外周边通过开口与第二装置的内部重叠，以便转印 所述基板通过所述开口从所述第一装置中的第一位置到所述第二装置中的第二位置。

公开(公告)号：US20130195584A1

公开(公告)日：2013-08-01

申请号：US13688219

申请日：2012-11-29

Applicant: Kabushiki Kaisha Yaskawa Denki

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA ,  Tomohiro MATSUO ,  Yoshihiro KUSAMA

IPC: B25J9/04 ,  H01L21/677

CPC classification number: B25J9/042 ,  B25J9/1664 ,  H01L21/677 ,  H01L21/67766 ,  Y10S901/02 ,  Y10S901/15

Abstract: A conveying system according to an embodiment includes a robot and a controller. The controller includes a switching unit. The robot includes an arm unit formed of a hand and a plurality of arms connected rotatably with respect to one another, and a base unit. An arm on a rear end side is connected to the base unit rotatably about a rotation axis, and the hand is rotatably connected to an arm on a front end side. The switching unit switches cylindrical coordinate control for controlling the arm unit such that a trajectory of the hand overlaps with any one of lines radiating from the rotation axis and rectangular coordinate control for controlling the arm unit such that the trajectory of the hand overlaps with none of the lines at a predetermined timing.

Abstract translation: 根据实施例的输送系统包括机器人和控制器。 控制器包括切换单元。 机器人包括由手和相对于彼此可旋转地连接的多个臂形成的臂单元和基座单元。 后端侧的臂与旋转轴可旋转地连接在基座上，手可旋转地与前端侧的臂连接。 切换单元切换用于控制臂单元的圆柱坐标控制，使得手的轨迹与从旋转轴辐射的线中的任何一个重叠，并且用于控制臂单元的直角坐标控制，使得手的轨迹与 线在预定的时间。