公开(公告)号：US20150332945A1

公开(公告)日：2015-11-19

申请号：US14810406

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes cassettes. The cassettes are each configured to accommodate at least one substrate. The second apparatus includes a second wall opposite to a first wall. The substrate transfer robot transfers the at least one substrate from each of the cassettes to the second apparatus. The substrate transfer robot includes a base stationary, a hand, and arms. A first arm includes a first end and a second end. The first end is rotatably coupled to the base. A second arm includes a third end and a fourth end. The third end is rotatably coupled to the second end. The second end of the first arm moves beyond the second wall when the substrate transfer robot takes out the substrate from the first apparatus.

Abstract translation: 衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。 第一装置包括盒。 盒被配置为容纳至少一个基板。 第二装置包括与第一壁相对的第二壁。 基板传送机构将至少一个基板从每个盒传送到第二装置。 基板传送机器人包括基座固定件，手和臂。 第一臂包括第一端和第二端。 第一端可旋转地联接到基座。 第二臂包括第三端和第四端。 第三端可旋转地联接到第二端。 当基板传送机器人从第一装置取出基板时，第一臂的第二端移动超过第二壁。

公开(公告)号：US20150015014A1

公开(公告)日：2015-01-15

申请号：US14324244

申请日：2014-07-07

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI

IPC: B25J15/06

CPC classification number: B25J15/0616 ,  H01L21/67766 ,  H01L21/6838 ,  Y10S414/141 ,  Y10S901/40

Abstract: A suction structure includes a fixing base, a pad fixed to the fixing base and a seal member arranged between the pad and the fixing base. The pad includes a contact portion arranged to make contact with a target object to be sucked, a space surrounded by the contact portion, a suction hole through which the space communicates with a vacuum source via the seal member, and one or more support portions fixing the pad to the fixing base. Each of the support portions is arranged on an axis of tilting movement, and being provided with a twist portion for supporting the contact portion such that the contact portion makes the tilting movement about the axis.

Abstract translation: 抽吸结构包括固定基座，固定在固定基座上的垫片和布置在垫片和固定底座之间的密封构件。 该垫包括接触部分，其被布置成与要被吸收的目标物体接触，由接触部分包围的空间，该空间经由该密封部件与真空源连通的吸入孔以及一个或多个支撑部分固定 垫到固定底座。 每个支撑部分布置在倾斜运动的轴线上，并且设置有用于支撑接触部分的扭曲部分，使得接触部分围绕轴线进行倾斜运动。

公开(公告)号：US20150008691A1

公开(公告)日：2015-01-08

申请号：US14324245

申请日：2014-07-07

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Kazunori HINO ,  Ryuji ANDO

IPC: B25J15/06

CPC classification number: B25J15/0683 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/6838

Abstract: A suction structure includes a fixing base, a pad, and a support body. The pad includes a contact portion which makes contact with a target object to be sucked. The support body is installed to the fixing base and the support body is configured to elastically support the pad. Further, the pad and the support body define an inner space, and the fixing base includes a suction hole which brings the inner space into communication with a vacuum source.

Abstract translation: 抽吸结构包括固定底座，衬垫和支撑体。 该垫包括与要被吸收的目标物体接触的接触部。 支撑体安装在固定基座上，并且支撑体构造成弹性地支撑垫。 此外，垫和支撑体限定内部空间，并且固定基座包括使内部空间与真空源连通的吸入孔。

公开(公告)号：US20150008688A1

公开(公告)日：2015-01-08

申请号：US14324079

申请日：2014-07-04

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Kazunori HINO ,  Ryuji ANDO

IPC: B25J15/06

CPC classification number: B25J15/0683 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/6838

Abstract: A suction structure includes a pad and a fixing base. The pad includes a contact portion which has a seal wall and makes contact with a target object to be sucked, a major surface portion which is surrounded by the contact portion and defines an inner space in conjunction with the seal member as the contact portion makes contact with the target object, and a thin portion formed in the major surface portion. The fixing base includes a suction hole configured to bring the inner space into communication with a vacuum source and supporting the pad.

Abstract translation: 抽吸结构包括垫和固定底座。 垫包括具有密封壁并与被吸收的目标物体接触的接触部分，主表面部分被接触部分包围，并且当接触部分接触时限定与密封部件结合的内部空间 与目标物体以及形成在主表面部分中的薄部分。 所述固定底座包括吸入孔，所述吸孔构造成使得所述内部空间与真空源连通并支撑所述垫。

公开(公告)号：US20130209201A1

公开(公告)日：2013-08-15

申请号：US13742351

申请日：2013-01-16

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Kazunori HINO

IPC: B65G49/00

CPC classification number: B65G49/00 ,  H01L21/67766

Abstract: A carrier device according to embodiments includes a carrier chamber that is provided with a plurality of connecting holes that are communicated with the outside, an articulated robot that is placed inside the carrier chamber, and a linear moving mechanism that makes at least the arm part of the articulated robot linearly move in a short side direction of the carrier chamber. The bottom end of the arm part of the articulated robot is provided on a base via an arm spindle to be rotatable horizontally and its leading end is provided with a hand that is rotatable horizontally and holds a board to be taken in and out via the connecting holes.

Abstract translation: 根据实施例的载体装置包括载体室，其设置有与外部连通的多个连接孔，放置在载体室内的关节式机器人，以及线性移动机构，其至少使臂部分 铰接机器人在载体室的短边方向上线性移动。 铰接式机器人的臂部的底端通过臂主轴设置在基座上，以水平方向旋转，并且其前端设有可水平旋转的手并且通过连接件保持待进出的板 孔。

公开(公告)号：US20130195586A1

公开(公告)日：2013-08-01

申请号：US13669777

申请日：2012-11-06

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI

IPC: F16H7/02 ,  B65G47/74 ,  B32B38/10

CPC classification number: B25J18/04 ,  H01L21/68 ,  H01L21/681 ,  H01L21/68707

Abstract: A transmission mechanism includes: a drive pulley which is provided on a drive shaft and has external teeth with a predetermined pitch width; a driven pulley which is provided on a driven shaft and has external teeth with the pitch width; and a belt having internal teeth with the pitch width which engage with the external teeth of the drive pulley and the driven pulley. Further, the belt includes sub-belts having a periodic variation characteristic in which the pitch width varies periodically, and the sub-belts are arranged in a state where phases of the periodic variation characteristic thereof are shifted from each other.

Abstract translation: 传动机构包括：驱动皮带轮，其设置在驱动轴上并具有预定间距宽度的外齿; 从动皮带轮，其设置在从动轴上并具有间距宽度的外齿; 以及具有内齿的带，其间距宽度与驱动带轮和从动带轮的外齿啮合。 此外，带子包括具有周期性变化特性的次级带，其中间距宽度周期性地变化，并且子带被布置成其周期性变化特性的相位彼此偏移的状态。