公开(公告)号：US20130250385A1

公开(公告)日：2013-09-26

申请号：US13845587

申请日：2013-03-18

Applicant: KLA-TENCOR CORPORATION

Inventor： Christian Wolters ,  Jijen Vazhaeparambil ,  Dirk Woll ,  Anatoly Romanovsky ,  Bret Whiteside ,  Stephen Biellak ,  Guoheng Zhao

IPC: G02B27/10 ,  G02B26/10 ,  G02F1/35 ,  G02F1/01

CPC classification number: G02B27/1006 ,  G02B26/10 ,  G02B26/106 ,  G02F1/0105 ,  G02F1/353 ,  G03F7/7065 ,  H01S3/0071 ,  H01S3/0092

Abstract: A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.

Abstract translation: 公开了一种用于提供照明的方法和系统。 该方法可以包括提供具有预定波长的激光; 在频率转换之前进行光束分割或光束扫描中的至少一个; 转换以下至少一个的每个输出光束的频率：分束或光束扫描; 并提供用于照明的频率转换输出光束。