摘要:
According to an aspect of the invention, there is provided a polishing liquid for polishing a barrier metal material on an interlayer insulation material, the polishing liquid having a pH of from 2.0 to 6.0 and including an aqueous solution containing a compound represented by the following formula (1), and polishing particles containing silicon oxide and dispersed in the aqueous solution: R1—(CH2)m—(CHR2)n—COOH (1) wherein m+n≦4; R1 represents a hydrogen atom, a methyl group, an ethyl group or a hydroxyl group; R2 represents a methyl group, an ethyl group, a benzene ring or a hydroxyl group; and when a plurality of R2s are present in the formula (1), they are the same or different from one another.
摘要翻译:根据本发明的一个方面,提供了一种用于在层间绝缘材料上抛光阻挡金属材料的抛光液,所述抛光液的pH为2.0至6.0,并且包括含有由下式表示的化合物的水溶液 (1),和含有氧化硅并分散在水溶液中的抛光颗粒:R 1 - (CH 2)2 - (CHR 2) 其中m + n <4;其中m + n <= 4; R 1表示氢原子,甲基,乙基或羟基; R 2表示甲基,乙基,苯环或羟基; 并且当式(1)中存在多个R 2 2时,它们彼此相同或不同。
摘要:
A polishing compound containing cocoon-shaped silica particles and crystal silica particles, and water-soluble polymers including; at least one type selected from the groups including ammonium nitrate and ammonium acetate, and at least one type selected from methylcellulose, carboxymethylcellulose, hydroxyethylcellulose, and the group including carboxymethylcellulose.
摘要:
A copper base alloy for terminals that is superior in all aspects of tensile strength, spring limits, conductivity, and stress relaxation characteristics can be produced by a process repeating the cycles consisting of hot-rolling, cold-rolling and annealing, in which process an ingot is prepared by melting and casting an alloy containing 1.0-3.0 wt % Ni, 0.02-0.15 wt % P. 0.5-2.0 wt. % Sn and, as an optional component, 0.01-2.0 wt % Zn, with the balance being Cu and incidental impurities, and with the ratio of weight percentages of Ni to P being within the range of 10-50%.
摘要:
A locking security mechanism for an electrical connector having a pair of male and female connector members, locking means and a locking security member mounted in a male connector member in a normally undetachable manner and maintained in a pre-engagement position with a pre-engagement releasing means in a female connector member. When the male and female connector members are engaged with each other, actuating fingers in the female connector member act on a inclined lower surface of pre-engagement fingers in the locking security member to escape the pre-engagement. Locking means in the male connector member comes into engagement with the locking security member unlocked from the pre-engagement state wherein a means for preventing the locking security member from securing in incomplete locking includes a block member provided at the free end of the locking arm member, an enclosure wall portion provided in the main body of the locking securing member for receiving the block member of the locking arm member, and checking lugs provided in the block member and the enclosure portion for abutting with each other.
摘要:
The invention provides a metal polishing liquid comprising an oxidizing agent and colloidal silica in which a part of a surface of the colloidal silica is covered with aluminum atoms, and a Chemical Mechanical Polishing method using the same. An amino acid, a compound having an isothiazoline-3-one skeleton, an organic acid, a passivated film forming agent, a cationic surfactant, a nonionic surfactant, and a water-soluble polymer may be contained. A metal polishing liquid which is used in Chemical Mechanical Polishing in manufacturing of a semiconductor device, attains low dishing of a subject to be polished, and can perform polishing excellent in in-plane uniformity of a surface to be polished.
摘要:
The present invention relates to a process for preparing sugar nucleotides from nucleotides and sugar derivatives by the use of yeast, characterized in that the reactions are conducted at 20.degree. C. or below. According to this process, even when the preparation is conducted on an enlarged scale, a reduction in the yield of a sugar nucleotide can be inhibited by a very simple means; lowering the reaction temperature 20.degree. C. or below. Thus, the process is an extremely practical one applicable to the mass-production of sugar nucleotides.
摘要:
A copper base alloy for terminals that is of the Cu-Ni-Sn-P or Cu-Ni-Sn-P-Zn system and that has a tensile strength of at least 50 kgf/mm.sup.2, a spring limit of at least 40 kgf/mm.sup.2, a stress relaxation of not more than 10% and a conductivity of at least 30% IACS is provided. Terminals the spring portion or the entire part of which is produced from that copper base alloy, having an insertion/extraction force of 0.2-3 kgf and a resistance of not more than 3 m.OMEGA. at low voltage and current as initial performance, with the added characteristic that the terminals will experience not more than 20% stress relaxation are also provided. The alloy is superior to the conventional bronze, phosphor bronze and Cu-Sn-Fe-P alloys for terminals in terms of tensile strength, spring limits, stress relaxation characteristic and conductivity and, hence, the terminals manufactured from those alloys have higher performance and reliability than the terminals made of the conventional copper base alloys for terminals.
摘要翻译:用于Cu-Ni-Sn-P或Cu-Ni-Sn-P-Zn系的端子用铜基合金,其拉伸强度为至少50kgf / mm 2,弹簧极限为至少40kgf / mm2,应力松弛不大于10%,电导率至少为30%IACS。 端子弹簧部分或其整个部分由该铜基合金制成,其具有0.2-3kgf的插入/拉伸力和在低电压和电流下不超过3m欧姆电阻作为初始性能,其中 还提供了终端将经历不超过20%的应力松弛的特征。 在拉伸强度,弹簧极限,应力松弛特性和导电性方面,该合金优于常规的青铜,磷青铜和Cu-Sn-Fe-P合金,因此,由这些合金制造的端子具有更高的性能和 可靠性高于由常规铜基合金端子制成的端子。