公开(公告)号：US10199262B2

公开(公告)日：2019-02-05

申请号：US15441887

申请日：2017-02-24

Applicant: MEMS Drive, Inc.

Inventor： Roman Gutierrez ,  Tony Tang ,  Xiaolei Liu ,  Guiqin Wang ,  Matthew Ng

IPC: B81B7/00 ,  B81B7/02 ,  B81C1/00 ,  H01L23/00 ,  H01L23/31 ,  H01L21/768 ,  H01L23/485 ,  B81B3/00

Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.

公开(公告)号：US20180072561A1

公开(公告)日：2018-03-15

申请号：US15698942

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang ,  Gerardo Morabito

IPC: B81B3/00 ,  B81C1/00 ,  H02N1/06 ,  H02N2/02

Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).

公开(公告)号：US20170341928A1

公开(公告)日：2017-11-30

申请号：US15412488

申请日：2017-01-23

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: B81B3/00 ,  H02N1/00 ,  B81B7/00

CPC classification number: B81B3/0021 ,  B81B3/0051 ,  B81B7/0016 ,  B81B7/0058 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/0136 ,  H02N1/008

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

公开(公告)号：US20170133950A1

公开(公告)日：2017-05-11

申请号：US15012682

申请日：2016-02-01

Applicant: MEMS Drive Inc.

Inventor： Xiaolei Liu ,  Guiqin Wang ,  Matthew Ng

IPC: H02N1/00 ,  H04N5/232 ,  G02B7/09 ,  G02B27/64 ,  H01L41/09 ,  H02N2/02

Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.

公开(公告)号：US11124411B2

公开(公告)日：2021-09-21

申请号：US16251838

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

公开(公告)号：US10815119B2

公开(公告)日：2020-10-27

申请号：US16251933

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: B81B3/00 ,  B81B7/00 ,  H02N1/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

公开(公告)号：US10807857B2

公开(公告)日：2020-10-20

申请号：US15698942

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang ,  Gerardo Morabito

IPC: B81B7/00 ,  B81B3/00

Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).

公开(公告)号：US10523135B2

公开(公告)日：2019-12-31

申请号：US15699007

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Matthew Ng ,  Xiaolei Liu ,  Guiqin Wang

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00 ,  H02N1/06 ,  H02N2/02 ,  H01L41/053 ,  G02B27/64 ,  B81B7/00 ,  H01L41/09 ,  H01L41/25 ,  H04N5/225 ,  G02B7/09 ,  G02B7/10

Abstract: A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.

公开(公告)号：US20190152764A1

公开(公告)日：2019-05-23

申请号：US16251838

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: B81B3/00 ,  H02N1/00 ,  B81B7/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

公开(公告)号：US10244171B2

公开(公告)日：2019-03-26

申请号：US15686710

申请日：2017-08-25

Applicant: MEMS Drive, Inc.

Inventor： Matthew Ng ,  Roman Gutierrez ,  Guiqin Wang

IPC: H04N5/232 ,  B81B3/00 ,  H02N1/00 ,  H04N5/225 ,  H04N5/335

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.