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公开(公告)号：US20200084381A1
公开(公告)日：2020-03-12
申请号：US16567357
申请日：2019-09-11
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Guiqin Wang
Abstract: A micro-electrical-mechanical system (MEMS) actuator configured to provide multi-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: a first portion, a second portion, wherein the first portion and the second portion are displaceable with respect to each other, and a locking assembly configured to releasably couple the first portion and the second portion to attenuate displacement between the first portion and the second portion.
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公开(公告)号：US10516348B2
公开(公告)日：2019-12-24
申请号：US15012682
申请日：2016-02-01
Applicant: MEMS Drive Inc.
Inventor： Xiaolei Liu , Guiqin Wang , Matthew Ng
IPC: H02N1/00 , H02N2/02 , H01L41/09 , H04N5/232 , G02B7/09 , G02B27/64 , B81B3/00 , B81B7/00 , B81B7/02
Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.
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公开(公告)号：US10211757B2
公开(公告)日：2019-02-19
申请号：US14818086
申请日：2015-08-04
Applicant: MEMS DRIVE, INC.
Inventor： Xiaolei Liu , Roman Gutierrez , Matthew Ng , Guiqin Wang
IPC: H02N1/00
Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.
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公开(公告)号：US10199262B2
公开(公告)日：2019-02-05
申请号：US15441887
申请日：2017-02-24
Applicant: MEMS Drive, Inc.
Inventor： Roman Gutierrez , Tony Tang , Xiaolei Liu , Guiqin Wang , Matthew Ng
IPC: B81B7/00 , B81B7/02 , B81C1/00 , H01L23/00 , H01L23/31 , H01L21/768 , H01L23/485 , B81B3/00
Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.
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公开(公告)号：US20180072561A1
公开(公告)日：2018-03-15
申请号：US15698942
申请日：2017-09-08
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Guiqin Wang , Gerardo Morabito
Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).
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Patent Agency Ranking
公开(公告)号：US20170341928A1
公开(公告)日：2017-11-30
申请号：US15412488
申请日：2017-01-23
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Robert Calvet , Gerardo Morabito
CPC classification number: B81B3/0021 , B81B3/0051 , B81B7/0016 , B81B7/0058 , B81B2201/033 , B81B2203/0118 , B81B2203/0136 , H02N1/008
Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
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公开(公告)号：US20170320724A1
公开(公告)日：2017-11-09
申请号：US15441887
申请日：2017-02-24
Applicant: MEMS Drive, Inc.
Inventor： Roman Gutierrez , Tony Tang , Xiaolei Liu , Guiqin Wang , Matthew NG
CPC classification number: H01L21/76816 , B81B3/0045 , B81B7/0029 , B81B2203/0353 , B81C1/00674 , B81C1/00682 , B81C2201/0112 , B81C2201/0135 , H01L21/768 , H01L21/76898 , H01L23/485 , H01L2924/00 , H01L2924/00014 , H01L2924/0002 , H01L2924/1461 , H01L2924/181
Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.
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公开(公告)号：US20170133950A1
公开(公告)日：2017-05-11
申请号：US15012682
申请日：2016-02-01
Applicant: MEMS Drive Inc.
Inventor： Xiaolei Liu , Guiqin Wang , Matthew Ng
Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.
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公开(公告)号：US11095820B2
公开(公告)日：2021-08-17
申请号：US16567357
申请日：2019-09-11
Applicant: MEMS Drive, inc.
Inventor： Xiaolei Liu , Matthew Ng , Guiqin Wang
Abstract: A micro-electrical-mechanical system (MEMS) actuator configured to provide multi-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: a first portion, a second portion, wherein the first portion and the second portion are displaceable with respect to each other, and a locking assembly configured to releasably couple the first portion and the second portion to attenuate displacement between the first portion and the second portion.
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公开(公告)号：US10910959B2
公开(公告)日：2021-02-02
申请号：US16252042
申请日：2019-01-18
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Roman Gutierrez , Matthew Ng , Guiqin Wang
IPC: H02N1/00
Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.
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