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公开(公告)号：US10831035B2
公开(公告)日：2020-11-10
申请号：US14919188
申请日：2015-10-21
Applicant: Mitutoyo Corporation
Inventor： Akihide Kimura
Abstract: An optical encoder 10 comprising: a light source 11; a splitter 12 splits a light from the light source 11, a light receiving unit 16; a scale 13 is arranged on a light path and movable in a measurement direction, a grating being arranged on a main surface of the scale; and an offset diffraction grating 14 includes a plurality of diffraction gratings arranged in the optical path from the splitter 12 to the light receiving unit 16, the plurality of diffraction gratings diffracting the split lights with different phases, wherein, the plurality of diffraction gratings 13 in the offset diffraction grating 14 are arranged in one plane parallel to the main surface of the scale and are offset each other in an offset direction orthogonal to the measurement direction, the light receiving unit 16 includes a plurality of light-receiving elements 16-11 to 16-23 arranged in the offset direction.
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公开(公告)号：US10295648B2
公开(公告)日：2019-05-21
申请号：US15942135
申请日：2018-03-30
Applicant: Mitutoyo Corporation
Inventor： Joseph Daniel Tobiason , Norman Laman , Akihide Kimura , Shu Hirata
Abstract: An optical encoder configuration comprises a scale, an illumination source, and a photodetector configuration. The illumination source is configured to output structured illumination to the scale. The scale extends along a measuring axis direction and is configured to output scale light that forms a detector fringe pattern comprising periodic high and low intensity bands that extend over a relatively longer dimension along the measuring axis direction and are relatively narrow and periodic along a detected fringe motion direction transverse to the measuring axis direction. The high and low intensity bands move along the detected fringe motion direction transverse to the measuring axis direction as the scale grating displaces along the measuring axis direction. The photodetector configuration is configured to detect a displacement of the high and low intensity bands along the detected fringe motion direction and provide respective spatial phase displacement signals that are indicative of the scale displacement.
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公开(公告)号：US20190128705A1
公开(公告)日：2019-05-02
申请号：US16175053
申请日：2018-10-30
Applicant: Mitutoyo Corporation
Inventor： Akihide Kimura
CPC classification number: G01D5/262 , G01D5/34746 , G01D5/38 , G02B27/60
Abstract: An optical encoder includes a light source, a plurality of diffraction gratings including grating faces on which a plurality of grooves are disposed in parallel, and a light-receiving unit configured to receive the light diffracted at the plurality of diffraction gratings. The diffraction gratings include a first diffraction grating that is a first-stage diffraction grating adjacent to the light source, a third diffraction grating that is a last-stage diffraction grating adjacent to the light-receiving unit, and a second diffraction grating that is an output-stage diffraction grating of the first-stage diffraction grating and an input-stage diffraction grating of the last-stage diffraction grating. The diffraction gratings are disposed such that the ratio of the first gap to the third gap equals the ratio of the second gap to the fourth gap, and a length of the first gap differs from a length of the second gap.
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公开(公告)号：US20180306608A1
公开(公告)日：2018-10-25
申请号：US15920364
申请日：2018-03-13
Applicant: Mitutoyo Corporation
Inventor： Akihide Kimura
Abstract: An optical encoder includes a scale including a diffraction grating, a light-receiving unit configured to receive light from a light source, and an optical element located between the scale and the light-receiving unit. The optical element includes a plurality of groove portions, which are a periodic structure portion formed periodically in one face of the optical element. The plurality of groove portions is configured to divide signal diffracted light and noise diffracted light into first splitted beams traveling at a predetermined travel angle and second splitted beams traveling at a travel angle greater than the travel angle of the first splitted beams, and make a diffraction efficiency of the first splitted beams of the noise diffracted light lower than a diffraction efficiency of the first splitted beams of the signal diffracted light.
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公开(公告)号：US10030998B2
公开(公告)日：2018-07-24
申请号：US15220483
申请日：2016-07-27
Applicant: MITUTOYO CORPORATION
Inventor： Akihide Kimura
Abstract: A displacement detecting device includes a scale diffraction grating and a detecting head unit. The detecting head unit includes a light source, a first retroreflecting unit that retroreflectes positive first-order diffracted light of light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, a second retroreflecting unit that retroreflectes negative first-order diffracted light of the light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, and a light receiving unit that receives an interference signal. Each of the first retroreflecting unit and the second retroreflecting unit has a deflecting function of deflecting light incident on the corresponding retroreflecting unit by a predetermined angle and then emitting the light.
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Patent Agency Ranking
16.发明授权公开(公告)号：US09587965B2
公开(公告)日：2017-03-07
申请号：US14738228
申请日：2015-06-12
Applicant: Mitutoyo Corporation
Inventor： Akihide Kimura
CPC classification number: G01D5/34715 , G01D5/2448
Abstract: First and second output signals are generated based on amounts of light received by first and second light-receiving elements, respectively, when a detection head is moved along a scale; a first amplitude adjustment is performed to adjust an amplitude of the first or second output signal such that levels of first and second output signals become equal at a first reference phase; a second amplitude adjustment is performed to adjust an amplitude of the first or second output signal such that levels of the first and second output signals become equal at a second reference phase; and a reference signal that starts at a timing when levels of the second output signal and the first output signal subjected to the first amplitude adjustment become equal and ends at a timing when levels of the second output signal and the first output signal subjected to the second amplitude adjustment become equal.
Abstract translation: 当检测头沿着标尺移动时，分别基于由第一和第二光接收元件接收的光量产生第一和第二输出信号; 执行第一幅度调整以调整第一或第二输出信号的幅度，使得第一和第二输出信号的电平在第一参考相位变得相等; 执行第二幅度调整以调整第一或第二输出信号的幅度，使得第一和第二输出信号的电平在第二参考相位变得相等; 以及参考信号，其在经受第一幅度调整的第二输出信号和第一输出信号的电平变为相等的时刻开始，并且在第二输出信号和经受第二幅度调整的第一输出信号的电平 振幅调整变得相等。
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17.发明申请公开(公告)号：US20150362344A1
公开(公告)日：2015-12-17
申请号：US14738228
申请日：2015-06-12
Applicant: Mitutoyo Corporation
Inventor： Akihide Kimura
CPC classification number: G01D5/34715 , G01D5/2448
Abstract: First and second output signals are generated based on amounts of light received by first and second light-receiving elements, respectively, when a detection head is moved along a scale; a first amplitude adjustment is performed to adjust an amplitude of the first or second output signal such that levels of first and second output signals become equal at a first reference phase; a second amplitude adjustment is performed to adjust an amplitude of the first or second output signal such that levels of the first and second output signals become equal at a second reference phase; and a reference signal that starts at a timing when levels of the second output signal and the first output signal subjected to the first amplitude adjustment become equal and ends at a timing when levels of the second output signal and the first output signal subjected to the second amplitude adjustment become equal.
Abstract translation: 当检测头沿着标尺移动时，分别基于由第一和第二光接收元件接收的光量产生第一和第二输出信号; 执行第一幅度调整以调整第一或第二输出信号的幅度，使得第一和第二输出信号的电平在第一参考相位变得相等; 执行第二幅度调整以调整第一或第二输出信号的幅度，使得第一和第二输出信号的电平在第二参考相位变得相等; 以及参考信号，其在经受第一幅度调整的第二输出信号和第一输出信号的电平变为相等的时刻开始，并且在第二输出信号和经受第二幅度调整的第一输出信号的电平 振幅调整变得相等。
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公开(公告)号：US11686570B2
公开(公告)日：2023-06-27
申请号：US17518954
申请日：2021-11-04
Applicant: MITUTOYO CORPORATION
Inventor： Akihide Kimura
CPC classification number: G01B9/02 , G01B11/2441
Abstract: A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
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公开(公告)号：US11598629B2
公开(公告)日：2023-03-07
申请号：US17224546
申请日：2021-04-07
Applicant: MITUTOYO CORPORATION
Inventor： Akihide Kimura
Abstract: An optical displacement sensor includes: a splitting unit that splits the light radiated from the light source into a first light ray and a second light ray; a reflection unit including a first reflection part and a second reflection part provided at a predetermined angle with respect to the first reflection part; and a fold-back reflection unit that folds-back and reflects the light that has gone through the reflection unit to the reflection unit. The optical displacement sensor is characterized in that the reflection unit reflects the first light ray and the second light ray that are split by the splitting unit and have gone through the diffraction unit from the first reflection part to the second reflection part, and reflects the first light ray and the second light ray that are reflected by the fold-back reflection unit from the second reflection part to the first reflection part.
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公开(公告)号：US20220163319A1
公开(公告)日：2022-05-26
申请号：US17518954
申请日：2021-11-04
Applicant: MITUTOYO CORPORATION
Inventor： Akihide Kimura
Abstract: A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
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