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公开(公告)号：US20200081459A1
公开(公告)日：2020-03-12
申请号：US16124669
申请日：2018-09-07
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US10126760B2
公开(公告)日：2018-11-13
申请号：US14209216
申请日：2014-03-13
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
IPC: G05D7/06
Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
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公开(公告)号：US20160202706A1
公开(公告)日：2016-07-14
申请号：US14596737
申请日：2015-01-14
Applicant: MKS Instruments, Inc,
Inventor： Michael L'Bassi , David D'Entremont , Zhifeng Liu
CPC classification number: G05B15/02 , G05D7/0623
Abstract: A mass flow controller and method are described. The mass flow controller comprises: an analog signal input configured to receive an analog set point signal; a converter configured to convert the analog set point signal to a digital set point signal; and a source of at least one exact non-changing digital set point signal precisely representing a desired rate of flow; wherein the source provides the exact non-changing digital set point signal in response to the digital set point signal so long as the digital set point signal is within a preselected band defining a range of values.
Abstract translation: 描述了质量流量控制器和方法。 质量流量控制器包括：模拟信号输入，被配置为接收模拟设定点信号; 转换器，被配置为将模拟设定点信号转换成数字设定点信号; 以及精确地表示期望流量的至少一个精确的不变数字设定点信号的源; 其中，只要数字设定点信号在限定值范围的预选频带内，源就响应于数字设定点信号而提供精确的不变数字设定点信号。
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公开(公告)号：US12264950B2
公开(公告)日：2025-04-01
申请号：US17656177
申请日：2022-03-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: Devices and methods for mass flow verification are provided. A mass flow verifier includes a chamber configured to receive a fluid, a critical flow nozzle upstream of the chamber, a chamber valve, a downstream valve, and a bypass valve. The chamber valve is configured to selectively enable fluid flow from the critical flow nozzle to the chamber. The downstream valve is configured to selectively enable fluid flow from the chamber to a downstream location. The bypass valve is configured to selectively enable fluid flow from the critical flow nozzle to a dump location. The mass flow verifier further includes a controller configured to verify flow rate of the fluid based on a rate of rise in pressure of the fluid as detected by a pressure sensor in the chamber.
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公开(公告)号：US20240281007A1
公开(公告)日：2024-08-22
申请号：US18170964
申请日：2023-02-17
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
IPC: G05D16/20
CPC classification number: G05D16/2013
Abstract: Pressure control methods and devices are provided. A pressure controller includes a control valve configured to control pressure of a fluid in a flow path, a flow restrictor disposed in the flow path, and distal and proximal pressure sensors. The distal pressure sensor detects fluid pressure at the flow restrictor at a location distal from the control valve, and the proximal pressure sensor detects fluid pressure at the flow restrictor at a location proximal to the control valve. The pressure controller further includes a controller configured to: 1) control actuation of the control valve based on pressure as detected by the distal pressure sensor and a pressure setpoint, and 2) determine a mass flow rate based on pressure as detected by the distal and proximal pressure sensors.
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Patent Agency Ranking
公开(公告)号：US20200301455A1
公开(公告)日：2020-09-24
申请号：US16898016
申请日：2020-06-10
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US10698426B2
公开(公告)日：2020-06-30
申请号：US15973190
申请日：2018-05-07
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Wayne Cole
Abstract: Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.
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公开(公告)号：US10649471B2
公开(公告)日：2020-05-12
申请号：US15887447
申请日：2018-02-02
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Gordon Hill
Abstract: A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
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19.发明授权公开(公告)号：US10514712B2
公开(公告)日：2019-12-24
申请号：US15244264
申请日：2016-08-23
Applicant: MKS INSTRUMENTS, INC.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: Methods, systems, and apparatus for pressure-based flow measurement are provided. A processor receives, from the pressure-based mass flow controller (MFC), an upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a downstream pressure value Pd based on the received upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pu and the computed downstream pressure value Pd. The processor controls a flow through the pressure-based mass flow controller (MFC) based on the computed flow rate Q. The methods, systems, and apparatus can be used for flow measurement in non-critical or un-choked flow conditions.
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公开(公告)号：US20190056755A1
公开(公告)日：2019-02-21
申请号：US16168812
申请日：2018-10-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
IPC: G05D7/06
Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
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