公开(公告)号：US09638716B2

公开(公告)日：2017-05-02

申请号：US14558735

申请日：2014-12-03

Applicant: MPI Corporation

Inventor： Tzu-Yang Chen ,  Shang-Jung Hsieh ,  Chung-Tse Lee ,  Tsung-Yi Chen ,  Tien-Chia Li ,  Chia-Yuan Kuo ,  Che-Wei Lin

IPC: G01R1/073 ,  G01R31/28

CPC classification number: G01R1/07364 ,  G01R1/07357 ,  G01R31/2891

Abstract: A positioner and a probe head of a probe card are provided. The positioner has a main opening, a first sub-opening, a second sub-opening, a third sub-opening, a fourth sub-opening, a first positioning portion, a second positioning portion, a first elastic portion and a second elastic portion. The first sub-opening, the second sub-opening, the third sub-opening, and the fourth sub-opening are sequentially arranged at the periphery of the main opening and are communicated to the main opening. A stiffness of the first positioning portion and a stiffness of the second positioning portion are higher than a stiffness of the first elastic portion and a stiffness of the second elastic portion.