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公开(公告)号：US10520914B2
公开(公告)日：2019-12-31
申请号：US15268851
申请日：2016-09-19
Applicant: Macau University of Science and Technology
Inventor： Naiqi Wu , Fajun Yang , Liping Bai , Mengchu Zhou , Zhiwu Li
IPC: G05B19/29 , G05B19/418
Abstract: A system and method of controlling a multi cluster tool system configured to process a semiconductor product includes a plurality of cluster tools arranged adjacent each other, a buffer module positioned between a pair of cluster tools, each cluster tool including a plurality of processing modules and a robot, the method of controlling a multi cluster tool system including receiving a plurality of system parameters from a user interface, wherein the system parameters correspond to one or more processing steps in a system cycle, wherein the system cycle is a cycle of processing the semiconductor product, determining a system schedule for defining the system cycle for processing a semiconductor product, the system schedule providing robot waiting times for each robot of each cluster tool, controlling, via a controller, the operation of each robot of each cluster tool based on the determined schedule.
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公开(公告)号：US20180081336A1
公开(公告)日：2018-03-22
申请号：US15268851
申请日：2016-09-19
Applicant: Macau University of Science and Technology
Inventor： Naiqi Wu , Fajun Yang , Liping Bai , Mengchu Zhou , Zhiwu Li
IPC: G05B19/042 , G05B19/29
CPC classification number: G05B19/29 , G05B19/41815 , G05B19/41865 , G05B2219/25419 , G05B2219/45031 , Y02P90/08 , Y02P90/20
Abstract: A system and method of controlling a multi cluster tool system configured to process a semiconductor product includes a plurality of cluster tools arranged adjacent each other, a buffer module positioned between a pair of cluster tools, each cluster tool including a plurality of processing modules and a robot, the method of controlling a multi cluster tool system including receiving a plurality of system parameters from a user interface, wherein the system parameters correspond to one or more processing steps in a system cycle, wherein the system cycle is a cycle of processing the semiconductor product, determining a system schedule for defining the system cycle for processing a semiconductor product, the system schedule providing robot waiting times for each robot of each cluster tool, controlling, via a controller, the operation of each robot of each cluster tool based on the determined schedule.
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公开(公告)号：US20180076064A1
公开(公告)日：2018-03-15
申请号：US15263615
申请日：2016-09-13
Applicant: Macau University of Science and Technology
Inventor： Naiqi Wu , Fajun Yang , Yan Qiao , Mengchu Zhou , Zhiwu Li
IPC: H01L21/67 , B25J9/16 , H01L21/677
CPC classification number: H01L21/67167 , G05B19/41865 , G05B2219/32165 , G05B2219/45031 , H01L21/67745 , Y10S901/41
Abstract: A system and method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products. The method of controlling the cluster tool apparatus to perform a processing cycle includes receiving a plurality of system parameters from a user interface, wherein the system parameters relate to one or more processing steps of the processing cycle, determining a schedule for performing the processing cycle utilizing the one or more processing modules, wherein the schedule being determined based on a semiconductor product residency parameter.
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14.发明申请公开(公告)号：US20170262007A1
公开(公告)日：2017-09-14
申请号：US15076643
申请日：2016-03-21
Applicant: Macau University of Science and Technology
Inventor： Li Zhiwu , Mohamed Ghaieth Abidi , Moncef Ben Smida , Mohamed Khalgui , Naiqi Wu
CPC classification number: G05F1/66 , G05B11/01 , G05B15/02 , G05B2219/39407 , H02J3/381 , H02J3/382 , H02J3/383 , H02J3/386 , H02J2003/001 , H02J2003/003 , H02J2003/007 , Y02E60/76 , Y02P80/114 , Y04S40/22
Abstract: The present invention deals with microgrids, which represent a new approach to integrate distributed energy resources economically reliably and efficiently. A microgrid can operate in a connected mode if it makes an energetic exchange with a main grid or in an island mode otherwise. In its island operation mode, a microgrid ensures its energy self-sufficiency. However, the availability of resources in this mode is greatly influenced by meteorological factors and the microgrid must satisfy the high requirements on intelligent power management in order to achieve high availability of energy. The present invention provides a multi-agent control system based on the production forecasting and loads shedding for high availability of the microgrid power supply.
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15.发明申请公开(公告)号：US20170083009A1
公开(公告)日：2017-03-23
申请号：US14919720
申请日：2015-10-21
Applicant: Macau University of Science and Technology
Inventor： Naiqi Wu , Fajun Yang , Yan Qiao , Mengchu Zhou
IPC: G05B19/418
CPC classification number: G05B19/4187 , G05B2219/31429 , G05B2219/45032 , Y02P90/205 , Y10S901/02 , Y10S901/41
Abstract: Since single and dual-arm tools behave differently, it is difficult to coordinate their activities in a hybrid multi-cluster tool that is composed of both single- and dual-arm tools. Aiming at finding an optimal one-wafer cyclic schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, the present work extends a resource-oriented Petri net to model such system. By the developed Petri net model, to find a one-wafer cyclic schedule is to determine robot waiting times. By doing so, it is shown that, for any treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, there is always a one-wafer cyclic schedule. Then, computationally efficient algorithms are developed to obtain the minimal cycle time and the optimal one-wafer cyclic schedule. Examples are given to illustrate the developed method.
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Patent Agency Ranking
公开(公告)号：US10134613B2
公开(公告)日：2018-11-20
申请号：US15272706
申请日：2016-09-22
Applicant: Macau University of Science and Technology
Inventor： Yan Qiao , Mengchu Zhou , Naiqi Wu , Zhiwu Li , Qinghua Zhu
IPC: H01L21/677 , H01L21/67
Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.
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公开(公告)号：US10103569B2
公开(公告)日：2018-10-16
申请号：US15078367
申请日：2016-03-23
Applicant: Macau University of Science and Technology
Inventor： Zhiwu Li , Zhongyuan Jiang , Naiqi Wu , Mengchu Zhou
Abstract: A power transmission system includes a plurality of electrical substations and a plurality of transmission lines arranged to connect the plurality of electrical substations to form a power transmission network; and a controller system arranged to control a power transmission within the power transmission network. The controller system includes: a detection module arranged to detect an occurrence of a fault in at least one faulty electrical substation of the plurality of electrical substations; and a restoration module arranged to at least temporally maintain an output power of the at least one faulty electrical substation; and wherein at least one of the plurality of electrical substations is operable to facilitate maintaining of the output of the at least one faulty electrical substation upon the detection of the occurrence of the fault.
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18.发明授权公开(公告)号：US10073444B2
公开(公告)日：2018-09-11
申请号：US14919720
申请日：2015-10-21
Applicant: Macau University of Science and Technology
Inventor： Naiqi Wu , Fajun Yang , Yan Qiao , Mengchu Zhou
IPC: G05B19/41 , G05B19/418
CPC classification number: G05B19/4187 , G05B2219/31429 , G05B2219/45032 , Y02P90/205 , Y10S901/02 , Y10S901/41
Abstract: Since single and dual-arm tools behave differently, it is difficult to coordinate their activities in a hybrid multi-cluster tool that is composed of both single- and dual-arm tools. Aiming at finding an optimal one-wafer cyclic schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, the present work extends a resource-oriented Petri net to model such system. By the developed Petri net model, to find a one-wafer cyclic schedule is to determine robot waiting times. By doing so, it is shown that, for any treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, there is always a one-wafer cyclic schedule. Then, computationally efficient algorithms are developed to obtain the minimal cycle time and the optimal one-wafer cyclic schedule. Examples are given to illustrate the developed method.
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公开(公告)号：US10001772B2
公开(公告)日：2018-06-19
申请号：US14918564
申请日：2015-10-21
Applicant: Macau University of Science and Technology
Inventor： Naiqi Wu , Qinghua Zhu , Mengchu Zhou , Yan Qiao
IPC: G05B19/418
CPC classification number: G05B19/41865 , G05B2219/34418 , G05B2219/45031 , G05B2219/50391 , Y10S901/02 , Y10S901/30
Abstract: Recent trends of larger wafer and smaller lot sizes bring cluster tools with frequent lot switches. Practitioners must deal with more transient processes during such switches, including start-up and close-down processes. To obtain higher yield, it is necessary to shorten the duration of transient processes. Much prior effort was poured into the modeling and scheduling for the steady state of cluster tools. In the existing literature, no attention has been turned to optimize the close-down process for single-arm cluster tools with wafer residency constraints. This invention intends to do so by 1) developing a Petri net model to analyze their scheduling properties and 2) proposing Petri net-based methods to solve their close-down optimal scheduling problems under different workloads among their process steps. Industrial examples are used to illustrate the effectiveness and application of the proposed methods.
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公开(公告)号：US20170083028A1
公开(公告)日：2017-03-23
申请号：US14919706
申请日：2015-10-21
Applicant: Macau University of Science and Technology
CPC classification number: F04B49/065 , F04B23/04 , F04B2205/09 , F04B2207/041 , G06Q10/0631 , Y02P80/10 , Y02P90/86
Abstract: For sustainable development, a refinery is required to save energy as much as possible so as to reduce the emission of greenhouse gas. In crude oil operations, oil transportation from storage tanks to charging tanks via a pipeline consumes a large portion of energy. It is vitally important to minimize energy consumption for this process. Since the oil flow resistance is proportional to the square of oil flow rate, the relation between energy efficiency and flow rate is nonlinear, which makes the problem complicated. The present invention addresses this important issue by formulating a linear programming model for the considered problem such that it can be efficiently solved. A real-world industrial case study is used to demonstrate the applications and significance of the proposed method.
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