Systems and methods for reducing CPU time to compute state space of resource allocation system

    公开(公告)号:US10346214B2

    公开(公告)日:2019-07-09

    申请号:US15649634

    申请日:2017-07-13

    Abstract: Given a sequential resource allocation system (RAS) topology structure, a state space, called an impulse state space, corresponding to the impulse response of a linear time-invariant system (LTS), is computed by small enough configuration of the considered RAS. Given an initial resource configuration of a RAS which corresponds to an input of an LTS, a complete state enumeration can be obtained by defining the convolution of this configuration with the pre-computed impulse state space. One example embodiment reduces central processing unit (CPU) time to process instructions that compute a target state space of a RAS includes constructing an initial RAS and an initial state space, and extending the initial state space iteratively under a target resource configuration.

    CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

    公开(公告)号:US20180082878A1

    公开(公告)日:2018-03-22

    申请号:US15272706

    申请日:2016-09-22

    CPC classification number: H01L21/67167 H01L21/67745

    Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.

    Optimal buffer space configuration and scheduling for single-arm multi-cluster tools
    15.
    发明授权
    Optimal buffer space configuration and scheduling for single-arm multi-cluster tools 有权
    单臂多集群工具的最优缓冲空间配置和调度

    公开(公告)号:US09227318B1

    公开(公告)日:2016-01-05

    申请号:US14639137

    申请日:2015-03-05

    Abstract: A method for scheduling single-arm multi-cluster tools is provided. The present invention studies the scheduling problem of a single-arm multi-cluster tool with a linear topology and process-bound bottleneck individual tool. Its objective is to find a one-wafer cyclic schedule such that the lower bound of cycle time is reached by optimally configuring spaces in buffering modules that link individual cluster tools. A Petri net model is developed to describe the dynamic behavior of the system by extending resource-oriented Petri nets such that a schedule can be parameterized by robots' waiting time. Based on this model, conditions are presented under which a one-wafer cyclic schedule with lower bound of cycle time can be found. With the derived conditions, an algorithm is presented to find such a schedule and optimally configure the buffer spaces.

    Abstract translation: 提供了一种用于调度单臂多群集工具的方法。 本发明研究了具有线性拓扑和过程限制瓶颈的单个工具的单臂多群集工具的调度问题。 其目的是找到一个单晶圆循环调度,以便通过在链接各个集群工具的缓冲模块中最佳配置空间来达到循环时间的下限。 Petri网模型被开发用于通过扩展资源导向的Petri网来描述系统的动态行为,使得可以通过机器人的等待时间对时间表进行参数化。 基于该模型,提出了可以找到具有周期时间下限的单晶片循环调度的条件。 使用派生条件,提出了一种算法来查找这样的调度并最佳地配置缓冲区空间。

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