Interface for testing semiconductors
    11.
    发明授权
    Interface for testing semiconductors 有权
    半导体测试接口

    公开(公告)号:US07535247B2

    公开(公告)日:2009-05-19

    申请号:US11335037

    申请日:2006-01-18

    IPC分类号: G01R31/00

    CPC分类号: G01R31/2891

    摘要: A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames of an overlapping region of the device under test. A video signal is provided to a display including multiple frames of the overlapping region of the device under test. An operator indicating a region of the video signal of devices under test and the system in response presenting an enlarged view of a plurality of different regions of the device under test in a plurality of windows free from user input, where the region and the plurality of different regions are simultaneously displayed on the display.

    摘要翻译: 一种系统包括适于有效地定位用于测试半导体晶片的探针的成像装置。 该系统包括用于感测被测器件的物镜和感测包括被测器件的重叠区域的多个帧的第一视频序列的成像器件。 将视频信号提供给包括被测设备的重叠区域的多个帧的显示器。 指示被测设备的视频信号的区域的操作者,并且所述系统响应于在没有用户输入的多个窗口中呈现被测设备的多个不同区域的放大视图,其中,所述区域和多个 不同的区域同时显示在显示器上。

    System for testing semiconductors
    12.
    发明申请
    System for testing semiconductors 有权
    半导体测试系统

    公开(公告)号:US20060184041A1

    公开(公告)日:2006-08-17

    申请号:US11335069

    申请日:2006-01-18

    IPC分类号: A61B6/00

    CPC分类号: G01R31/2891

    摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.

    摘要翻译: 一种包括用于有效地定位用于测试半导体晶片的探针的成像装置的系统。

    ELECTRODE CONFIGURATION FOR PIANO MEMS MICROMIRROR
    13.
    发明申请
    ELECTRODE CONFIGURATION FOR PIANO MEMS MICROMIRROR 有权
    用于PIANO MEMS微机的电极配置

    公开(公告)号:US20060008201A1

    公开(公告)日:2006-01-12

    申请号:US11220552

    申请日:2005-09-08

    IPC分类号: G02B6/26

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装,仅具有相对的 两者之间的空气间隙较小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。

    Focusing optical systems and methods for testing semiconductors
    14.
    发明授权
    Focusing optical systems and methods for testing semiconductors 有权
    聚焦光学系统和半导体测试方法

    公开(公告)号:US09435858B2

    公开(公告)日:2016-09-06

    申请号:US13634009

    申请日:2011-03-14

    IPC分类号: G01R31/28 G01B9/04 G01B21/16

    CPC分类号: G01R31/2891

    摘要: Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.

    摘要翻译: 本文公开了用于测试半导体的聚焦光学系统和方法。 所述方法包括通过显微镜的单个光路接收探针的图像,基本上将显微镜聚焦在探针上,以及基于聚焦来确定探针和被测器件之间的垂直高度调节。

    SYSTEM FOR TESTING SEMICONDUCTORS
    16.
    发明申请
    SYSTEM FOR TESTING SEMICONDUCTORS 有权
    测试半导体系统

    公开(公告)号:US20130010099A1

    公开(公告)日:2013-01-10

    申请号:US13634009

    申请日:2011-03-14

    IPC分类号: H04N7/18

    CPC分类号: G01R31/2891

    摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor.

    摘要翻译: 一种包括用于有效地定位用于测试半导体的探针的成像装置的系统。

    Interface for testing semiconductors
    17.
    发明授权
    Interface for testing semiconductors 有权
    半导体测试接口

    公开(公告)号:US07898281B2

    公开(公告)日:2011-03-01

    申请号:US12316511

    申请日:2008-12-12

    IPC分类号: G01R31/00

    CPC分类号: G01R31/2891

    摘要: A system includes an imaging device for capturing a video sequence and a display for displaying the video in a window of the display and effectively positioning a probe relative to probe pads of a device under test for testing a semiconductor wafer supported by a support of a probing environment.

    摘要翻译: 一种系统包括用于捕获视频序列的成像装置和用于在显示器的窗口中显示视频的显示器,并且相对于被测器件的探针焊盘有效地定位探针,以测试由探测支持体支撑的半导体晶片 环境。

    Microscope system for testing semiconductors
    19.
    发明申请
    Microscope system for testing semiconductors 审中-公开
    显微镜系统用于半导体测试

    公开(公告)号:US20060169897A1

    公开(公告)日:2006-08-03

    申请号:US11335014

    申请日:2006-01-18

    IPC分类号: G21K7/00

    CPC分类号: G21K7/00

    摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.

    摘要翻译: 一种包括用于有效地定位用于测试半导体晶片的探针的成像装置的系统。