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公开(公告)号:US07535247B2
公开(公告)日:2009-05-19
申请号:US11335037
申请日:2006-01-18
申请人: Peter Andrews , David Hess , Robert New
发明人: Peter Andrews , David Hess , Robert New
IPC分类号: G01R31/00
CPC分类号: G01R31/2891
摘要: A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames of an overlapping region of the device under test. A video signal is provided to a display including multiple frames of the overlapping region of the device under test. An operator indicating a region of the video signal of devices under test and the system in response presenting an enlarged view of a plurality of different regions of the device under test in a plurality of windows free from user input, where the region and the plurality of different regions are simultaneously displayed on the display.
摘要翻译: 一种系统包括适于有效地定位用于测试半导体晶片的探针的成像装置。 该系统包括用于感测被测器件的物镜和感测包括被测器件的重叠区域的多个帧的第一视频序列的成像器件。 将视频信号提供给包括被测设备的重叠区域的多个帧的显示器。 指示被测设备的视频信号的区域的操作者,并且所述系统响应于在没有用户输入的多个窗口中呈现被测设备的多个不同区域的放大视图,其中,所述区域和多个 不同的区域同时显示在显示器上。
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公开(公告)号:US20060184041A1
公开(公告)日:2006-08-17
申请号:US11335069
申请日:2006-01-18
申请人: Peter Andrews , David Hess
发明人: Peter Andrews , David Hess
IPC分类号: A61B6/00
CPC分类号: G01R31/2891
摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.
摘要翻译: 一种包括用于有效地定位用于测试半导体晶片的探针的成像装置的系统。
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公开(公告)号:US20060008201A1
公开(公告)日:2006-01-12
申请号:US11220552
申请日:2005-09-08
申请人: John Miller , Yuan Ma , Barrie Keyworth , Wenlin Jin , David Hess
发明人: John Miller , Yuan Ma , Barrie Keyworth , Wenlin Jin , David Hess
IPC分类号: G02B6/26
CPC分类号: G02B6/3584 , B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B26/0841 , Y10S359/904
摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.
摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装,仅具有相对的 两者之间的空气间隙较小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。
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公开(公告)号:US09435858B2
公开(公告)日:2016-09-06
申请号:US13634009
申请日:2011-03-14
申请人: Peter Andrews , David Hess
发明人: Peter Andrews , David Hess
CPC分类号: G01R31/2891
摘要: Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.
摘要翻译: 本文公开了用于测试半导体的聚焦光学系统和方法。 所述方法包括通过显微镜的单个光路接收探针的图像,基本上将显微镜聚焦在探针上,以及基于聚焦来确定探针和被测器件之间的垂直高度调节。
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公开(公告)号:USD709645S1
公开(公告)日:2014-07-22
申请号:US29415700
申请日:2012-03-13
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公开(公告)号:US20130010099A1
公开(公告)日:2013-01-10
申请号:US13634009
申请日:2011-03-14
申请人: Peter Andrews , David Hess
发明人: Peter Andrews , David Hess
IPC分类号: H04N7/18
CPC分类号: G01R31/2891
摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor.
摘要翻译: 一种包括用于有效地定位用于测试半导体的探针的成像装置的系统。
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公开(公告)号:US07898281B2
公开(公告)日:2011-03-01
申请号:US12316511
申请日:2008-12-12
申请人: Peter Andrews , David Hess , Robert New
发明人: Peter Andrews , David Hess , Robert New
IPC分类号: G01R31/00
CPC分类号: G01R31/2891
摘要: A system includes an imaging device for capturing a video sequence and a display for displaying the video in a window of the display and effectively positioning a probe relative to probe pads of a device under test for testing a semiconductor wafer supported by a support of a probing environment.
摘要翻译: 一种系统包括用于捕获视频序列的成像装置和用于在显示器的窗口中显示视频的显示器,并且相对于被测器件的探针焊盘有效地定位探针,以测试由探测支持体支撑的半导体晶片 环境。
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公开(公告)号:US20060242005A1
公开(公告)日:2006-10-26
申请号:US11454509
申请日:2006-06-16
申请人: Rodney Rodrigue , John DuBois , Maria Alfano , Dennis Grogan , Jennifer Comeau , Sean Jordan , David Hess , John Westberg , Lisa Westberg , Anthony Perna , Diana Morrissey , Jerome Nelligan
发明人: Rodney Rodrigue , John DuBois , Maria Alfano , Dennis Grogan , Jennifer Comeau , Sean Jordan , David Hess , John Westberg , Lisa Westberg , Anthony Perna , Diana Morrissey , Jerome Nelligan
IPC分类号: G06F11/34
CPC分类号: G09B19/0053 , G06Q10/06316 , G06Q10/0633 , G06Q10/06398
摘要: A comprehensive method to train and aid manufacturers in identifying inefficiencies in product manufacturing processes and in improving such processes. The method includes placing individuals in roles associated with a complete manufacturing operation from supply acquisition through to product delivery in the simulation of a product to be made. The method includes a set of tools describing individual stages of the complete manufacturing process but with all tools related to the common simulation. The individuals carry out their roles in the steps of the production simulation and their roles may be varied. This comprehensive method aids individuals in the observation and correction of wasteful production activities from the supply chain through manufacturing and back-end functions.
摘要翻译: 一种综合的方法来训练和帮助制造商识别产品制造过程中的低效率和改进这些过程。 该方法包括将个人与完整的制造操作相关联的角色,从供应获取到产品交付在要制作的产品的模拟中。 该方法包括一组描述完整制造过程的各个阶段的工具,但是具有与常见模拟相关的所有工具。 个人在生产模拟步骤中发挥作用,其作用可能有所不同。 这种综合方法有助于个人通过制造和后端功能观察和纠正供应链中的浪费生产活动。
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公开(公告)号:US20060169897A1
公开(公告)日:2006-08-03
申请号:US11335014
申请日:2006-01-18
申请人: Peter Andrews , David Hess
发明人: Peter Andrews , David Hess
IPC分类号: G21K7/00
CPC分类号: G21K7/00
摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.
摘要翻译: 一种包括用于有效地定位用于测试半导体晶片的探针的成像装置的系统。
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公开(公告)号:US20100097467A1
公开(公告)日:2010-04-22
申请号:US12653574
申请日:2009-12-15
申请人: Peter Andrews , David Hess
发明人: Peter Andrews , David Hess
CPC分类号: G01R31/2891
摘要: A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.
摘要翻译: 一种系统,其包括用于有效地定位用于测试半导体晶片的探针的成像装置。
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