Abstract:
A system and method for registering stereoscopic images comprising: obtaining at least two sets of stereoscopic images, each one of the at least two sets including at least two images that are taken from different angles, determining at least two groups of images, each one of the groups including at least two images that are respective images of at least two of the sets or are derived therefrom. For each one of the groups, calculating a respective optimal entities list and stereo-matching at least two images, each one being or derived from different one of the at least two groups and same or different sets, using at least four optimal entities from each one of the optimal entities list, thereby giving rise to at least one pair of registered stereoscopic images.
Abstract:
A collision sense and avoidance system and method and an aircraft, such as an Unmanned Air Vehicle (UAV) and/or Remotely Piloted Vehicle (RPV), including the collision sense and avoidance system. The collision sense and avoidance system includes an image interrogator identifies potential collision threats to the aircraft and provides maneuvers to avoid any identified threat. Motion sensors (e.g., imaging and/or infrared sensors) provide image frames of the surroundings to a clutter suppression and target detection unit that detects local targets moving in the frames. A Line Of Sight (LOS), multi-target tracking unit, tracks detected local targets and maintains a track history in LOS coordinates for each detected local target. A threat assessment unit determines whether any tracked local target poses a collision threat. An avoidance maneuver unit provides flight control and guidance with a maneuver to avoid any identified said collision threat.
Abstract:
A control system for remotely controlling a mobile platform includes a ground-based control station and a surrogate processor. The surrogate processor is remotely located from both the mobile platform and the ground-based control station and includes a communication gateway and software. The communication gateway is in communication with the software, the ground-based control station, and the mobile platform and is capable of transmitting information therebetween. The software generates a control message based on commands received from the ground-based control station to adjust an operational characteristic of the mobile platform. Locating the software and the gateway remotely from the mobile platform also enables a less costly and less complex mobile platform to be constructed.
Abstract:
In view of the miniaturization of semiconductor components, the prevention of particles and other defects on the wafer surface during production is of great importance. The inspection should proceed as process-oriented as possible. For this purpose, devices are needed which on the one hand, are of very compact construction, while on the other hand, they still are equipped with measuring systems meeting the highest requirements.The device according to the invention for measuring surface defects, comprising a sample holder, a rotation drive for the sample holder, wherein the rotational axis runs perpendicular to the sample surface to be measured, an optical measuring system (10) for measuring scattered light, as well as at least one linear drive (23) for the measuring system, wherein the rotational direction is radial to the rotational axis of the sample holder, is capable of scanning the entire sample surface (16). By moving not only the sample, but also the measuring system, the need for space as a whole is reduced and the total device can be constructed with a more compact design.
Abstract:
A micropolarimeter and ellipsometer for obtaining complete optical information of superficially illuminated specimens. A compact construction is designed to facilitate their use. To obtain the simultaneous surface measurement of all optical information from a specimen, the retarder of the micropolarimeter consists of a one-piece retarder array with at least one pixel group, in which the major axis orientations of the individual pixels are distributed over an angular range of 360°. This micropolarimeter can be integrated into the reflected light microscope of an ellipsometer. The result is a compact measurement unit.
Abstract:
A system and method for registering stereoscopic images comprising: obtaining at least two sets of stereoscopic images, each one of the at least two sets including at least two images that are taken from different angles, determining at least two groups of images, each one of the groups including at least two images that are respective images of at least two of the sets or are derived therefrom. For each one of the groups, calculating a respective optimal entities list and stereo-matching at least two images, each one being or derived from different one of the at least two groups and same or different sets, using at least four optimal entities from each one of the optimal entities list, thereby giving rise to at least one pair of registered stereoscopic images.
Abstract:
A system and process that establish a singular shared file system among devices in order to create a virtual representation of data on all of the devices via metadata indexing. This virtual representation of data means that the files are not actually stored on all devices and thus, with the exception of a single physical location, they do not need to take up any space (i.e. storage) on any additional device's hard drive. This allows for significant amounts of data to be virtually stored on each device, even if there is no physical storage room available for the data on each device. The system and process do not require data to be stored on a provider server, but instead stores only lightweight metadata, i.e., a small fraction of information about the files, online.
Abstract:
A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.
Abstract:
A measurement device, i.e. a metrology tool, and a vehicle are combined to provide a mobile metrology in a fabrication facility. Peripheral equipment such as a device transfer unit, for, e.g., FOUPs in semiconductor manufacturing, an electronic control system with, e.g., a PC, monitor, and keyboard and optionally a vacuum pump is also provided in module frames of the vehicle. The measurement configuration particularly reduces bottleneck situations in equipment qualifying of processing tools during fast ramp-up phases of, e.g., semiconductor manufacturing facilities, thereby saving costs. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool. With the possible exception of power supply or operator control, the measurement configuration can operate fully autonomously.
Abstract:
The present invention relates to a measuring module, whose measuring device comprises a measuring head equipped with a miniaturized measuring unit, and a spatially separately arranged control and evaluation unit, and wherein the measuring head is arranged so as to be able to slide linearly by means of a sliding drive.