STEREO-IMAGE REGISTRATION AND CHANGE DETECTION SYSTEM AND METHOD
    11.
    发明申请
    STEREO-IMAGE REGISTRATION AND CHANGE DETECTION SYSTEM AND METHOD 有权
    立体图像注册和更改检测系统及方法

    公开(公告)号:US20100303340A1

    公开(公告)日:2010-12-02

    申请号:US12739592

    申请日:2008-10-23

    CPC classification number: G06T7/285 G06T7/593 G06T2207/10021 G06T2207/30181

    Abstract: A system and method for registering stereoscopic images comprising: obtaining at least two sets of stereoscopic images, each one of the at least two sets including at least two images that are taken from different angles, determining at least two groups of images, each one of the groups including at least two images that are respective images of at least two of the sets or are derived therefrom. For each one of the groups, calculating a respective optimal entities list and stereo-matching at least two images, each one being or derived from different one of the at least two groups and same or different sets, using at least four optimal entities from each one of the optimal entities list, thereby giving rise to at least one pair of registered stereoscopic images.

    Abstract translation: 一种用于登记立体图像的系统和方法,包括:获得至少两组立体图像,所述至少两个组中的每一个包括从不同角度取得的至少两个图像,确定至少两组图像,每一组 所述组包括至少两个图像,其是至少两个集合的相应图像或从其中导出。 对于每个组中的每一个,使用至少四个来自每个组的最佳实体来计算相应的最佳实体列表和至少两个图像的立体匹配,每个图像是至少两个组中的不同的一个或相同或不同的组, 一个最佳实体列表,从而产生至少一对注册的立体图像。

    Aircraft collision sense and avoidance system and method
    12.
    发明申请
    Aircraft collision sense and avoidance system and method 有权
    飞机碰撞感和回避系统及方法

    公开(公告)号:US20070210953A1

    公开(公告)日:2007-09-13

    申请号:US11374807

    申请日:2006-03-13

    CPC classification number: G08G5/0069 G08G5/045

    Abstract: A collision sense and avoidance system and method and an aircraft, such as an Unmanned Air Vehicle (UAV) and/or Remotely Piloted Vehicle (RPV), including the collision sense and avoidance system. The collision sense and avoidance system includes an image interrogator identifies potential collision threats to the aircraft and provides maneuvers to avoid any identified threat. Motion sensors (e.g., imaging and/or infrared sensors) provide image frames of the surroundings to a clutter suppression and target detection unit that detects local targets moving in the frames. A Line Of Sight (LOS), multi-target tracking unit, tracks detected local targets and maintains a track history in LOS coordinates for each detected local target. A threat assessment unit determines whether any tracked local target poses a collision threat. An avoidance maneuver unit provides flight control and guidance with a maneuver to avoid any identified said collision threat.

    Abstract translation: 碰撞感和回避系统和方法以及诸如无人机(UAV)和/或遥控车辆(RPV)的飞机,包括碰撞感和回避系统。 碰撞感和回避系统包括图像询问器识别对飞机的潜在的碰撞威胁,并提供操纵以避免任何已知的威胁。 运动传感器(例如,成像和/或红外传感器)将周围的图像帧提供给杂波抑制和目标检测单元,其检测在帧中移动的局部目标。 视线(LOS),多目标跟踪单元,跟踪检测到的本地目标,并为每个检测到的本地目标在LOS坐标中维护轨迹历史记录。 威胁评估单元确定是否有跟踪的本地目标造成冲突威胁。 回避机动单元提供飞行控制和指导,进行机动,以避免任何确定的所述碰撞威胁。

    Surrogate air processor
    13.
    发明申请

    公开(公告)号:US20060253228A1

    公开(公告)日:2006-11-09

    申请号:US11120866

    申请日:2005-05-03

    CPC classification number: G05D1/0022 B63J99/00 B63J2099/008

    Abstract: A control system for remotely controlling a mobile platform includes a ground-based control station and a surrogate processor. The surrogate processor is remotely located from both the mobile platform and the ground-based control station and includes a communication gateway and software. The communication gateway is in communication with the software, the ground-based control station, and the mobile platform and is capable of transmitting information therebetween. The software generates a control message based on commands received from the ground-based control station to adjust an operational characteristic of the mobile platform. Locating the software and the gateway remotely from the mobile platform also enables a less costly and less complex mobile platform to be constructed.

    Device for measuring surface defects
    14.
    发明授权
    Device for measuring surface defects 有权
    测量表面缺陷的装置

    公开(公告)号:US06954267B2

    公开(公告)日:2005-10-11

    申请号:US10237909

    申请日:2002-09-09

    CPC classification number: G01F23/284 G01N21/211 G01N21/47 G01N21/9501

    Abstract: In view of the miniaturization of semiconductor components, the prevention of particles and other defects on the wafer surface during production is of great importance. The inspection should proceed as process-oriented as possible. For this purpose, devices are needed which on the one hand, are of very compact construction, while on the other hand, they still are equipped with measuring systems meeting the highest requirements.The device according to the invention for measuring surface defects, comprising a sample holder, a rotation drive for the sample holder, wherein the rotational axis runs perpendicular to the sample surface to be measured, an optical measuring system (10) for measuring scattered light, as well as at least one linear drive (23) for the measuring system, wherein the rotational direction is radial to the rotational axis of the sample holder, is capable of scanning the entire sample surface (16). By moving not only the sample, but also the measuring system, the need for space as a whole is reduced and the total device can be constructed with a more compact design.

    Abstract translation: 鉴于半导体部件的小型化,在生产中防止晶片表面上的颗粒和其它缺陷是非常重要的。 检查应尽可能以过程为导向。 为此,需要一种非常紧凑的结构的设备,另一方面它们仍然配备了满足最高要求的测量系统。 根据本发明的用于测量表面缺陷的装置,包括样品保持器,用于样品保持器的旋转驱动器,其中旋转轴线垂直于待测量的样品表面延伸,用于测量散射光的光学测量系统(10) 以及用于测量系统的至少一个线性驱动器(23),其中旋转方向与样品保持器的旋转轴线径向,能够扫描整个样品表面(16)。 通过不仅移动样品,而且移动测量系统,整体上减少了对空间的需求,并且可以以更紧凑的设计构建整个装置。

    Micropolarimeter and ellipsometer
    15.
    发明授权
    Micropolarimeter and ellipsometer 失效
    微偏光计和椭偏仪

    公开(公告)号:US06275291B1

    公开(公告)日:2001-08-14

    申请号:US09397568

    申请日:1999-09-16

    Abstract: A micropolarimeter and ellipsometer for obtaining complete optical information of superficially illuminated specimens. A compact construction is designed to facilitate their use. To obtain the simultaneous surface measurement of all optical information from a specimen, the retarder of the micropolarimeter consists of a one-piece retarder array with at least one pixel group, in which the major axis orientations of the individual pixels are distributed over an angular range of 360°. This micropolarimeter can be integrated into the reflected light microscope of an ellipsometer. The result is a compact measurement unit.

    Abstract translation: 一种用于获得表面照明样本的完整光学信息的微偏振计和椭偏仪。 设计紧凑的结构使其易于使用。 为了从样本获得所有光学信息的同时表面测量,微型偏振器的延迟器由具有至少一个像素组的单片延迟器阵列组成,其中各个像素的长轴取向分布在角度范围 360°。 该微型偏振计可以集成到椭偏仪的反射光学显微镜中。 结果是一个紧凑的测量单位。

    Stereo-image registration and change detection system and method
    16.
    发明授权
    Stereo-image registration and change detection system and method 有权
    立体影像配准与变更检测系统及方法

    公开(公告)号:US08331654B2

    公开(公告)日:2012-12-11

    申请号:US12739592

    申请日:2008-10-23

    CPC classification number: G06T7/285 G06T7/593 G06T2207/10021 G06T2207/30181

    Abstract: A system and method for registering stereoscopic images comprising: obtaining at least two sets of stereoscopic images, each one of the at least two sets including at least two images that are taken from different angles, determining at least two groups of images, each one of the groups including at least two images that are respective images of at least two of the sets or are derived therefrom. For each one of the groups, calculating a respective optimal entities list and stereo-matching at least two images, each one being or derived from different one of the at least two groups and same or different sets, using at least four optimal entities from each one of the optimal entities list, thereby giving rise to at least one pair of registered stereoscopic images.

    Abstract translation: 一种用于登记立体图像的系统和方法,包括:获得至少两组立体图像,所述至少两个组中的每一个包括从不同角度取得的至少两个图像,确定至少两组图像,每一组 所述组包括至少两个图像,其是至少两个集合的相应图像或从其中导出。 对于每个组中的每一个,使用至少四个来自每个组的最佳实体来计算相应的最佳实体列表和至少两个图像的立体匹配,每个图像是至少两个组中的不同的一个或相同或不同的组, 一个最佳实体列表,从而产生至少一对注册的立体图像。

    Method For a Cloud-Based Meta-File System to Virtually Unify Remote and Local Files Across a Range of Devices' Local File Systems
    17.
    发明申请
    Method For a Cloud-Based Meta-File System to Virtually Unify Remote and Local Files Across a Range of Devices' Local File Systems 有权
    一种基于云的元文件系统实现统一跨设备本地文件系统的远程和本地文件的方法

    公开(公告)号:US20100287219A1

    公开(公告)日:2010-11-11

    申请号:US12774231

    申请日:2010-05-05

    CPC classification number: G06F17/30094

    Abstract: A system and process that establish a singular shared file system among devices in order to create a virtual representation of data on all of the devices via metadata indexing. This virtual representation of data means that the files are not actually stored on all devices and thus, with the exception of a single physical location, they do not need to take up any space (i.e. storage) on any additional device's hard drive. This allows for significant amounts of data to be virtually stored on each device, even if there is no physical storage room available for the data on each device. The system and process do not require data to be stored on a provider server, but instead stores only lightweight metadata, i.e., a small fraction of information about the files, online.

    Abstract translation: 一种在设备之间建立单一共享文件系统以便通过元数据索引在所有设备上创建数据的虚拟表示的系统和过程。 数据的虚拟表示意味着文件实际上并不存储在所有设备上,因此除了单个物理位置之外,它们不需要占用任何附加设备的硬盘驱动器上的任何空间(即存储)。 这允许大量数据虚拟存储在每个设备上,即使没有可用于每个设备上的数据的物理存储空间。 系统和过程不需要将数据存储在提供者服务器上,而是仅在线存储轻量级元数据,即关于文件的一小部分信息。

    Modular substrate measurement system
    18.
    发明授权
    Modular substrate measurement system 有权
    模块化基板测量系统

    公开(公告)号:US07030401B2

    公开(公告)日:2006-04-18

    申请号:US10257776

    申请日:2001-04-12

    Abstract: A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.

    Abstract translation: 一种基板测量系统,包括测量室和具有基板转印的基板处理室和布置成将基板接收到容器的基板容器接口。 处理室包含用于连接测量室的第一界面,并且测量室包含连接处理室的第二界面。 传送装置被布置成通过处理室在容器和测量室之间传送基板,其中设置有第二测量室,该第二测量室具有与第一测量室相同的第二界面以替换后一个室。

    Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations
    19.
    发明授权
    Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations 有权
    包括车辆的测量配置和用于在各个位置用测量配置进行测量的方法

    公开(公告)号:US06935201B2

    公开(公告)日:2005-08-30

    申请号:US10638599

    申请日:2003-08-11

    CPC classification number: H01L21/67253 H01L21/67772

    Abstract: A measurement device, i.e. a metrology tool, and a vehicle are combined to provide a mobile metrology in a fabrication facility. Peripheral equipment such as a device transfer unit, for, e.g., FOUPs in semiconductor manufacturing, an electronic control system with, e.g., a PC, monitor, and keyboard and optionally a vacuum pump is also provided in module frames of the vehicle. The measurement configuration particularly reduces bottleneck situations in equipment qualifying of processing tools during fast ramp-up phases of, e.g., semiconductor manufacturing facilities, thereby saving costs. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool. With the possible exception of power supply or operator control, the measurement configuration can operate fully autonomously.

    Abstract translation: 测量装置,即计量工具和车辆被组合以在制造设施中提供移动计量。 诸如设备传送单元的外围设备,例如用于半导体制造中的FOUP,具有例如PC,监视器和键盘的电子控制系统以及可选的真空泵也被提供在车辆的模块框架中。 测量配置特别降低了例如半导体制造设备的快速上升阶段期间加工工具的设备合格性中的瓶颈情况,从而节省成本。 该结构基于PGV或AGV,并允许在加工工具的位置直接快速操作。 除了电源或操作员控制之外,测量配置可以完全自主运行。

    Measuring module
    20.
    发明授权
    Measuring module 失效
    测量模块

    公开(公告)号:US06798513B2

    公开(公告)日:2004-09-28

    申请号:US10120641

    申请日:2002-04-11

    Inventor: Michael Abraham

    CPC classification number: G01F23/284 G01N21/211 G01N21/47 G01N21/9501

    Abstract: The present invention relates to a measuring module, whose measuring device comprises a measuring head equipped with a miniaturized measuring unit, and a spatially separately arranged control and evaluation unit, and wherein the measuring head is arranged so as to be able to slide linearly by means of a sliding drive.

    Abstract translation: 本发明涉及一种测量模块,其测量装置包括配备有小型化测量单元的测量头和空间上分开设置的控制和评估单元,其中测量头被布置成能够通过装置线性地滑动 的滑动驱动器。

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