公开(公告)号：US06954267B2

公开(公告)日：2005-10-11

申请号：US10237909

申请日：2002-09-09

申请人： Michael Abraham ,  Andreas Lang ,  Michael Schweiger

发明人： Michael Abraham ,  Andreas Lang ,  Michael Schweiger

IPC分类号： G01F23/284 ,  G01N21/21 ,  G01N21/47 ,  G01N21/95 ,  G01Q30/02 ,  G01Q60/00 ,  G01N21/00

CPC分类号： G01F23/284 ,  G01N21/211 ,  G01N21/47 ,  G01N21/9501

摘要： In view of the miniaturization of semiconductor components, the prevention of particles and other defects on the wafer surface during production is of great importance. The inspection should proceed as process-oriented as possible. For this purpose, devices are needed which on the one hand, are of very compact construction, while on the other hand, they still are equipped with measuring systems meeting the highest requirements.The device according to the invention for measuring surface defects, comprising a sample holder, a rotation drive for the sample holder, wherein the rotational axis runs perpendicular to the sample surface to be measured, an optical measuring system (10) for measuring scattered light, as well as at least one linear drive (23) for the measuring system, wherein the rotational direction is radial to the rotational axis of the sample holder, is capable of scanning the entire sample surface (16). By moving not only the sample, but also the measuring system, the need for space as a whole is reduced and the total device can be constructed with a more compact design.

摘要翻译： 鉴于半导体部件的小型化，在生产中防止晶片表面上的颗粒和其它缺陷是非常重要的。 检查应尽可能以过程为导向。 为此，需要一种非常紧凑的结构的设备，另一方面它们仍然配备了满足最高要求的测量系统。 根据本发明的用于测量表面缺陷的装置，包括样品保持器，用于样品保持器的旋转驱动器，其中旋转轴线垂直于待测量的样品表面延伸，用于测量散射光的光学测量系统（10） 以及用于测量系统的至少一个线性驱动器（23），其中旋转方向与样品保持器的旋转轴线径向，能够扫描整个样品表面（16）。 通过不仅移动样品，而且移动测量系统，整体上减少了对空间的需求，并且可以以更紧凑的设计构建整个装置。

公开(公告)号：US08724918B2

公开(公告)日：2014-05-13

申请号：US13515617

申请日：2010-12-16

申请人： Michael Abraham

发明人： Michael Abraham

IPC分类号： G06F9/40

CPC分类号： G06T5/50 ,  G01S7/295 ,  G01S13/89 ,  G01S13/9035 ,  G06T5/002 ,  G06T5/20 ,  G06T2207/10044 ,  G06T2207/30184

摘要： There are provided a method for computerized generation of an enhanced image based on a plurality of acquired images (e.g. SAR images) and system thereof. The method comprises: (a) receiving a plurality of acquired images, each comprising a common area of interest; (b) receiving processing parameters; (c) grouping said plurality of acquired images into one or more groups; (d) processing the images within said one or more groups, wherein said processing comprises: i) for each given pixel within the common area of interest, calculating a likelihood of discrepancy between respective pixels of the images of said one or more groups, thus giving rise to likelihood of discrepancy values characterizing said given pixel; ii) generating a “likelihood of discrepancy matrix” comprising the likelihood of discrepancy values and characterizing the likelihood of discrepancy for each pixel within the common area of interest; iii) for each of said one or more groups, generating an enhanced image while utilizing said likelihood of discrepancy matrix.

摘要翻译： 提供了一种基于多个获取的图像（例如SAR图像）及其系统来计算机生成增强图像的方法。 该方法包括：（a）接收多个获取的图像，每个图像包括公共的感兴趣区域; （b）接收处理参数; （c）将所述多个获取的图像分组成一个或多个组; （d）处理所述一个或多个组中的图像，其中所述处理包括：i）针对所述公共区域内的每个给定像素，计算所述一个或多个组的图像的各个像素之间的差异的可能性，因此 导致表征所述给定像素的差异值的可能性; ii）产生“差异矩阵的可能性”，其包括差异值的可能性并且表征所述公共共同区域内的每个像素的差异的可能性; iii）对于所述一个或多个组中的每一个，产生增强图像，同时利用所述差异矩阵的可能性。

公开(公告)号：US20130064467A1

公开(公告)日：2013-03-14

申请号：US13515617

申请日：2010-12-16

申请人： Michael Abraham

发明人： Michael Abraham

IPC分类号： G06T5/50

CPC分类号： G06T5/50 ,  G01S7/295 ,  G01S13/89 ,  G01S13/9035 ,  G06T5/002 ,  G06T5/20 ,  G06T2207/10044 ,  G06T2207/30184

摘要： There are provided a method for computerized generation of an enhanced image based on a plurality of acquired images (e.g. SAR images) and system thereof. The method comprises: (a) receiving a plurality of acquired images, each comprising a common area of interest; (b) receiving processing parameters; (c) grouping said plurality of acquired images into one or more groups; (d) processing the images within said one or more groups, wherein said processing comprises: i) for each given pixel within the common area of interest, calculating a likelihood of discrepancy between respective pixels of the images of said one or more groups, thus giving rise to likelihood of discrepancy values characterizing said given pixel; ii) generating a “likelihood of discrepancy matrix” comprising the likelihood of discrepancy values and characterizing the likelihood of discrepancy for each pixel within the common area of interest; iii) for each of said one or more groups, generating an enhanced image while utilizing said likelihood of discrepancy matrix.

摘要翻译： 提供了一种基于多个获取的图像（例如SAR图像）及其系统来计算机生成增强图像的方法。 该方法包括：（a）接收多个获取的图像，每个图像包括公共的感兴趣区域; （b）接收处理参数; （c）将所述多个获取的图像分组成一个或多个组; （d）处理所述一个或多个组中的图像，其中所述处理包括：i）针对所述公共区域内的每个给定像素，计算所述一个或多个组的图像的各个像素之间的差异的可能性，因此 导致表征所述给定像素的差异值的可能性; ii）产生差异矩阵的可能性，其包括差异值的可能性并且表征所述公共共同区域内的每个像素的差异的可能性; iii）对于所述一个或多个组中的每一个，产生增强图像，同时利用所述差异矩阵的可能性。

公开(公告)号：US06420864B1

公开(公告)日：2002-07-16

申请号：US09548773

申请日：2000-04-13

申请人： Michael Abraham ,  Ivo J. M. M. Raaijmakers ,  Alain Gaudon ,  Pierre Astegno

发明人： Michael Abraham ,  Ivo J. M. M. Raaijmakers ,  Alain Gaudon ,  Pierre Astegno

IPC分类号： G01R3126

CPC分类号： H01L21/6719 ,  H01L21/67196

摘要： Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing an interface (50) to connect the measurement chamber (30), the measurement chamber (30) containing an interface (51) to connect to the handling chamber (7), and the transfer means (10) being arranged to transfer substrates between the container (8) and the measurement chamber (30) through the handling chamber (7), in which a second measurement chamber (39) is provided, having the same interface (51) as the first measurement chamber (30) to replace the latter chamber (30).

摘要翻译： 基板测量系统包括测量室（30）和具有基板传送装置（10）的基板处理室（7）和布置成容纳基板容器（8）的基板容器接口（1），处理室（7） 包括用于连接测量室（30）的接口（50），包含连接到处理室（7）的接口（51）的测量室（30），以及传送装置（10） 通过处理室（7）的容器（8）和测量室（30），其中设有第二测量室（39），其具有与第一测量室（30）相同的界面（51） 后室（30）。

公开(公告)号：US20120179732A1

公开(公告)日：2012-07-12

申请号：US13424366

申请日：2012-03-19

申请人： Erik Caso ,  Michael Abraham

发明人： Erik Caso ,  Michael Abraham

IPC分类号： G06F17/30

CPC分类号： G06F17/30094

摘要： A system and process that establish a singular shared file system among devices in order to create a virtual representation of data on all of the devices via metadata indexing. This virtual representation of data means that the files are not actually stored on all devices and thus, with the exception of a single physical location, they do not need to take up any space (i.e. storage) on any additional device's hard drive. This allows for significant amounts of data to be virtually stored on each device, even if there is no physical storage room available for the data on each device. The system and process do not require data to be stored on a provider server, but instead stores only lightweight metadata, i.e., a small fraction of information about the files, online.

摘要翻译： 一种在设备之间建立单一共享文件系统以便通过元数据索引在所有设备上创建数据的虚拟表示的系统和过程。 数据的虚拟表示意味着文件实际上并不存储在所有设备上，因此除了单个物理位置之外，它们不需要占用任何附加设备的硬盘驱动器上的任何空间（即存储）。 这允许大量数据虚拟存储在每个设备上，即使没有可用于每个设备上的数据的物理存储空间。 系统和过程不需要将数据存储在提供者服务器上，而是仅在线存储轻量级元数据，即关于文件的一小部分信息。

公开(公告)号：US06891609B2

公开(公告)日：2005-05-10

申请号：US10120639

申请日：2002-04-11

申请人： Michael Abraham

发明人： Michael Abraham

IPC分类号： H01L21/00 ,  G01N21/00

CPC分类号： H01L21/67288 ,  H01L21/67253

摘要： A measurement box which can be integrated into existing wafer processing equipment. The measurement box comprises an enclosure which contains a measurement module for measuring objects such as the surfaces of wafers. The measurement module is equipped with a miniaturized measuring device and has a displaceable measuring head and a plane table with a rotatable wafer holder. The enclosure has at least one loading opening for the wafer to pass through as well as a ventilation device.

摘要翻译： 可以集成到现有的晶圆加工设备中的测量盒。 测量盒包括一个包含用于测量诸如晶片表面的物体的测量模块的外壳。 测量模块配备有小型化的测量装置，并具有位移测量头和具有可旋转晶片支架的平台。 外壳具有用于晶片通过的至少一个装载开口以及通风装置。

公开(公告)号：US06734969B2

公开(公告)日：2004-05-11

申请号：US09940407

申请日：2001-08-27

申请人： Michael Abraham ,  Matthias Hampel

发明人： Michael Abraham ,  Matthias Hampel

IPC分类号： G01J400

CPC分类号： H01L21/67253 ,  G01B11/0616

摘要： To carry out measurements in the vacuum, for example for quality control in the production of semiconductors, conventional stand alone measuring machines are installed. They are very cost, space and time intensive. To enable a process oriented measurement under optimal conditions, a device with a two part case is proposed that can be moved in a vacuum chamber, whereby one part of the case projects into the vacuum chamber and the other part of the case is located outside the vacuum chamber. The case can receive a measurement system. In addition, an adjusting device, engaging with the case, and a counterpull device, engaging with the second part of the case, are provided.

摘要翻译： 为了在真空中进行测量，例如用于生产半导体的质量控制，安装常规的独立测量机。 他们是非常成本，空间和时间密集。 为了在最佳条件下进行面向过程的测量，提出了具有两部分壳体的装置，其可以在真空室中移动，由此壳体的一部分突出到真空室中，并且壳体的另一部分位于 真空室。 该情况可以接收测量系统。 此外，提供了与壳体接合的调节装置和与壳体的第二部分接合的对接装置。

公开(公告)号：US06268915B1

公开(公告)日：2001-07-31

申请号：US09485111

申请日：2000-02-03

申请人： Michael Abraham ,  Matthias Eberhardt

发明人： Michael Abraham ,  Matthias Eberhardt

IPC分类号： G01J400

CPC分类号： G01J4/04 ,  Y10S977/773 ,  Y10S977/834 ,  Y10S977/953 ,  Y10S977/957

摘要： The invention concerns a micropolarimeter comprising an analyzer (1) and a detector (10) located past the analyzer in the direction of radiation and presenting a number of segments ND which is higher than or equal to 3 (11). The invention seeks to provide a micropolarimeter with no moving parts, with a high polarization index, for use for polychromatic light, so small that it can detect the ray of common lasers in one single measurement step without it being necessary to enlarge it, and capable of being converted in a simple manner into a complete Stokesmeter. To that end, the analyzer (1) consists of a radially symmetrical flat disk (5) produced in a polarizing material with which the polarization rests on absorption effects inside said material, the surface of the analyzer (1) being greater than or equal to the surface of the detector segments (10)

摘要翻译： 本发明涉及一种包括分析仪（1）和检测器（10）的微偏振计，该检测器（10）沿着辐射方向位于分析仪上方并且呈现高于或等于3（11）的多个段ND。 本发明寻求提供一种具有高偏振指数的移动部件的微偏振计，用于多色光，如此小以至于可以在一个单个测量步骤中检测公共激光的射线，而不需要放大它，并且能够 被简单地转换成一个完整的斯托克斯计。 为此，分析器（1）由以偏振材料制成的径向对称的平板（5）组成，其极化取决于所述材料内部的吸收效应，分析器（1）的表面大于或等于 检测器段（10）的表面

公开(公告)号：US5465611A

公开(公告)日：1995-11-14

申请号：US220157

申请日：1994-03-30

申请人： Alexander Ruf ,  Michael Abraham ,  Manfred Lacher ,  Thomas Zetterer ,  Thomas R. Dietrich

发明人： Alexander Ruf ,  Michael Abraham ,  Manfred Lacher ,  Thomas Zetterer ,  Thomas R. Dietrich

IPC分类号： B81B3/00 ,  B81C1/00 ,  G01B1/00 ,  G01B7/34 ,  G01B9/00 ,  G01B9/04 ,  G01L1/04 ,  G01L1/24 ,  G01L5/00 ,  G01N27/00 ,  G01Q20/02 ,  G01Q60/38 ,  G01Q70/08 ,  H01J37/28 ,  H01L21/302

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  Y10S977/863

摘要： A sensor head (1) is described, which has a spacer (5b) between a carrier element (2) and the spring arm (7), which, perhaps carries a sensor tip (9) at the free end; the spacer defines the distance d between the spring arm (7) and the carrier element (2). In a preferred embodiment, the spacer (5b) comprises a sacrificial layer (5a), which is etched out, except for the spacer (5b), after the formation of a corresponding layer system between the spring arm (7) and the carrier element (2). The carrier element (2) and the spring arm (7) are each provided with a reflecting layer (4 and 6). In accordance with another specific embodiment, plasmonactive layers can also be provided.

摘要翻译： 描述了一种传感器头（1），其在载体元件（2）和弹簧臂（7）之间具有间隔件（5b），其可以在自由端承载传感器尖端（9） 间隔件限定弹簧臂（7）和载体元件（2）之间的距离d。 在优选实施例中，在弹簧臂（7）和载体元件（7）之间形成相应的层系统之后，间隔物（5b）包括除了间隔物（5b）之外被蚀刻掉的牺牲层（5a） （2）。 载体元件（2）和弹簧臂（7）均设有反射层（4和6）。 根据另一具体实施方案，也可以提供等离子体活性层。

公开(公告)号：US08484260B2

公开(公告)日：2013-07-09

申请号：US13424366

申请日：2012-03-19

申请人： Erik Caso ,  Michael Abraham

发明人： Erik Caso ,  Michael Abraham

IPC分类号： G06F17/30

CPC分类号： G06F17/30094

摘要： A system and process that establish a singular shared file system among devices in order to create a virtual representation of data on all of the devices via metadata indexing. This virtual representation of data means that the files are not actually stored on all devices and thus, with the exception of a single physical location, they do not need to take up any space (i.e. storage) on any additional device's hard drive. This allows for significant amounts of data to be virtually stored on each device, even if there is no physical storage room available for the data on each device. The system and process do not require data to be stored on a provider server, but instead stores only lightweight metadata, i.e., a small fraction of information about the files, online.

摘要翻译： 一种在设备之间建立单一共享文件系统以便通过元数据索引在所有设备上创建数据的虚拟表示的系统和过程。 数据的虚拟表示意味着文件实际上并不存储在所有设备上，因此除了单个物理位置之外，它们不需要占用任何附加设备的硬盘驱动器上的任何空间（即存储）。 这允许大量数据虚拟存储在每个设备上，即使没有可用于每个设备上的数据的物理存储空间。 系统和过程不需要将数据存储在提供者服务器上，而是仅在线存储轻量级元数据，即关于文件的一小部分信息。