公开(公告)号：US20110254138A1

公开(公告)日：2011-10-20

申请号：US12760620

申请日：2010-04-15

申请人： Katherina E. Babich ,  Pratik P. Joshi ,  Kam Leung Lee ,  Deborah A. Neumayer ,  Spyridon Skordas

发明人： Katherina E. Babich ,  Pratik P. Joshi ,  Kam Leung Lee ,  Deborah A. Neumayer ,  Spyridon Skordas

IPC分类号： H01L23/00 ,  F21V9/00 ,  H01L21/321

CPC分类号： H01L21/02115 ,  H01L21/02274 ,  H01L21/26506 ,  H01L21/2658 ,  H01L21/268 ,  H01L21/2686 ,  H01L29/7848 ,  H01L2924/0002 ,  H01L2924/00

摘要： An improved low-temperature absorber, amorphous carbonitride (ACN) with an extinction coefficient (k) of greater than 0.15, and an emissivity of greater than 0.8 is disclosed. The ACN film can also be characterized as having a minimum of hydrocarbon content as observed by FTIR. The ACN film can be used as an effective absorbing layer that absorbs a wide range of electromagnetic radiation from different sources including lasers or flash lamps. A method of forming such an ACN film at a deposition temperature of less than, or equal to, 450° C. is also provided.

摘要翻译： 公开了一种改进的低温吸收剂，具有大于0.15的消光系数（k）和大于0.8的发射率的无定形碳氮化物（ACN）。 ACN膜也可以被表征为具有由FTIR观察到的最低碳氢化合物含量。 ACN膜可以用作吸收来自不同来源（包括激光或闪光灯）的宽范围电磁辐射的有效吸收层。 还提供了在小于或等于450℃的沉积温度下形成这种ACN膜的方法。

公开(公告)号：US20120186514A1

公开(公告)日：2012-07-26

申请号：US13420018

申请日：2012-03-14

申请人： Nitin H. Parbhoo ,  Spyridon Skordas

发明人： Nitin H. Parbhoo ,  Spyridon Skordas

IPC分类号： B05C11/08

CPC分类号： B05D1/002 ,  B05D3/104 ,  H01L21/6715

摘要： Embodiments of the invention provide methods and systems for depositing a viscous material on a substrate surface. In one embodiment, the invention provides a method of depositing a viscous material on a substrate surface, the method comprising: applying a pre-wet material to a surface of a substrate; depositing a viscous material atop the pre-wet material; rotating the substrate about an axis to spread the viscous material along the surface of the substrate toward a substrate edge; and depositing additional pre-wet material in a path along the surface and adjacent the spreading viscous material.

摘要翻译： 本发明的实施例提供了用于在基材表面上沉积粘性材料的方法和系统。 在一个实施例中，本发明提供了一种在衬底表面上沉积粘性材料的方法，所述方法包括：将预湿材料施加到衬底的表面; 在预湿材料的顶部沉积粘性材料; 使基板围绕轴线旋转，以将粘性材料沿着基板的表面朝向基板边缘铺展; 并且在沿着表面并邻近铺展粘性材料的路径中沉积额外的预湿材料。