公开(公告)号：US10082525B2

公开(公告)日：2018-09-25

申请号：US15511733

申请日：2015-09-18

Applicant: NHK Spring Co., Ltd.

Inventor： Yoshio Yamada ,  Kohei Hironaka

IPC: G01R1/067 ,  G01R1/073 ,  H01L21/00

CPC classification number: G01R1/07357 ,  G01N2201/00 ,  G01R1/06722 ,  G01R1/07378 ,  H01L21/00 ,  H01L2221/00 ,  H01R13/2421 ,  H01R2201/20

Abstract: A probe unit according to the present invention is suitable for allowing a large current to flow. In the probe unit that accommodates a plurality of contact probes for electrically connecting an inspection target object and a signal processing device used to output an inspection signal, both ends of a large current probe (3) are electrically connected to electrodes of a contact target object, and a large current is made to flow via a metal block (50) that comes into contact with both end portions of the large current probe (3).

公开(公告)号：US20170299631A1

公开(公告)日：2017-10-19

申请号：US15511733

申请日：2015-09-18

Applicant: NHK Spring Co., Ltd.

Inventor： Yoshio Yamada ,  Kohei Hironaka

IPC: G01R1/073 ,  G01R1/067

CPC classification number: G01R1/07357 ,  G01N2201/00 ,  G01R1/06722 ,  G01R1/07378 ,  H01L21/00 ,  H01L2221/00 ,  H01R13/2421 ,  H01R2201/20

Abstract: A probe unit according to the present invention is suitable for allowing a large current to flow. In the probe unit that accommodates a plurality of contact probes for electrically connecting an inspection target object and a signal processing device used to output an inspection signal, both ends of a large current probe (3) are electrically connected to electrodes of a contact target object, and a large current is made to flow via a metal block (50) that comes into contact with both end portions of the large current probe (3).