公开(公告)号：US11996259B2

公开(公告)日：2024-05-28

申请号：US17754998

申请日：2020-10-22

Applicant: NOVA MEASURING INSTRUMENTS INC.

Inventor： David A. Reed ,  Bruce H. Newcome ,  Bruno W. Schueler

IPC: H01J35/08 ,  G01N23/20008 ,  G01N23/207 ,  G01N23/2208 ,  G01N23/223 ,  H01J35/24

CPC classification number: H01J35/112 ,  G01N23/20008 ,  G01N23/207 ,  G01N23/2208 ,  G01N23/223 ,  H01J35/24 ,  G01N2223/045 ,  G01N2223/052 ,  G01N2223/056 ,  G01N2223/072 ,  G01N2223/076 ,  G01N2223/085 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/611 ,  H01J2235/081 ,  H01J2235/084 ,  H01J2235/086 ,  H01J2235/1204 ,  H01J2235/1291

Abstract: The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

公开(公告)号：US20190086342A1

公开(公告)日：2019-03-21

申请号：US16181287

申请日：2018-11-05

Applicant: NOVA MEASURING INSTRUMENTS, INC.

Inventor： Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

IPC: G01N23/201

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.