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11.发明申请公开(公告)号：US20190242956A1
公开(公告)日：2019-08-08
申请号：US15891512
申请日：2018-02-08
Applicant: NXP B.V.
Inventor： Jan Przytarski , Jörg Kock , Stephan Marauska , Edwin Schapendonk
Abstract: A system includes first and second magnetic sense elements for producing first and second output signals, respectively, in response to an external magnetic field along a sensing axis parallel to a plane of the first sense element, a magnetization direction of the second element being rotated in the plane relative to a magnetization direction of the first element. The second output signal differs from the first output signal in dependency to a magnetic interference field along a non-sensing axis of the first magnetic field. A processing circuit, receives the first and second output signals, identifies from a relationship between the first and second output signals an influence of the magnetic interference field on the first output signal, and applies a correction factor to the first output signal to produce a resultant output signal in which the influence of the magnetic interference field is substantially removed.
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12.发明授权公开(公告)号：US10261138B2
公开(公告)日：2019-04-16
申请号：US15647709
申请日：2017-07-12
Applicant: NXP B.V.
Inventor： Stephan Marauska , Jörg Kock , Mark Isler , Harmut Matz , Dennis Helmboldt
IPC: G01R33/09 , H01L43/06 , H05K9/00 , G01R33/00 , G01R33/025
Abstract: A system comprises at least one magnetic field sensor having a magnetic sense element formed on a substrate. The sense element senses a magnetic field along a sense axis oriented in a first direction parallel to a surface of the substrate. A shield structure is formed on the substrate. The shield structure has first and second shield portions and the magnetic sense element is disposed between the shield portions. Each of the shield portions includes a body and first and second brim segments extending from opposing ends of the body. The body is aligned parallel to a second direction perpendicular to the first direction and parallel to the surface of the substrate. The brim segments are aligned substantially parallel to the first direction. The shield portions are arranged in mirror symmetry with the brim segments of each of the shield portions extending toward one another.
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公开(公告)号：US20190079141A1
公开(公告)日：2019-03-14
申请号：US15703102
申请日：2017-09-13
Applicant: NXP B.V.
Inventor： Stephan Marauska , Jörg Kock , Hartmut Matz , Mark Isler , Dennis Helmboldt
Abstract: A magnetic field sensor includes a magnetic sense element and a shield structure formed on a substrate. The shield structure fully encircles the magnetic sense element for suppressing stray magnetic fields along a first axis and a second axis, both of which are parallel to a surface of the substrate and perpendicular to one another. A magnetic field is oriented along a third axis perpendicular to the surface of the substrate, and the magnetic sense element is configured to sense a magnetic field along the first axis. A magnetic field deflection element, formed on the substrate proximate the magnetic sense element, redirects the magnetic field from the third axis into the first axis to be sensed as a measurement magnetic field by the magnetic sense element. At least two magnetic field sensors, each fully encircled by a shield structure, form a gradient unit for determining a magnetic field gradient.
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公开(公告)号：US11280855B2
公开(公告)日：2022-03-22
申请号：US16524590
申请日：2019-07-29
Applicant: NXP B.V.
Inventor： Stephan Marauska , Jörg Kock
Abstract: A magnetic field sensor includes at least two magnetoresistive (MR) sensor elements arranged in a half-bridge configuration. Each of the MR sensor elements includes a magnetic region having a magnetic anisotropy with a resultant magnetization. The magnetic anisotropy is created using an oblique incident deposition (OID) technique, with the magnetic regions being deposited at a nonzero deposition angle relative to a reference line oriented perpendicular to a surface of the magnetic field sensor. A system includes an encoder and the half-bridge configuration of the sensor elements. The encoder produces an external magnetic field, having predetermined magnetic variations in response to motion of the encoder, the magnetic field being detectable by the sensor elements. The resultant magnetization of the sensor elements is aligned by OID in a preferred direction perpendicular to the direction of the external magnetic field instead of utilizing a permanent magnet structure for providing a bias magnetic field.
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公开(公告)号：US20210033685A1
公开(公告)日：2021-02-04
申请号：US16524590
申请日：2019-07-29
Applicant: NXP B.V.
Inventor： Stephan Marauska , Jörg Kock
Abstract: A magnetic field sensor includes at least two magnetoresistive (MR) sensor elements arranged in a half-bridge configuration. Each of the MR sensor elements includes a magnetic region having a magnetic anisotropy with a resultant magnetization. The magnetic anisotropy is created using an oblique incident deposition (OID) technique, with the magnetic regions being deposited at a nonzero deposition angle relative to a reference line oriented perpendicular to a surface of the magnetic field sensor. A system includes an encoder and the half-bridge configuration of the sensor elements. The encoder produces an external magnetic field, having predetermined magnetic variations in response to motion of the encoder, the magnetic field being detectable by the sensor elements. The resultant magnetization of the sensor elements is aligned by OID in a preferred direction perpendicular to the direction of the external magnetic field instead of utilizing a permanent magnet structure for providing a bias magnetic field.
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Patent Agency Ranking
公开(公告)号：US10718825B2
公开(公告)日：2020-07-21
申请号：US15703102
申请日：2017-09-13
Applicant: NXP B.V.
Inventor： Stephan Marauska , Jörg Kock , Hartmut Matz , Mark Isler , Dennis Helmboldt
IPC: G01R33/00 , G01D5/20 , G01D3/08 , G01D5/14 , G01R33/09 , G01R33/022 , H01L41/06 , H01L41/12 , G01R15/20
Abstract: A magnetic field sensor includes a magnetic sense element and a shield structure formed on a substrate. The shield structure fully encircles the magnetic sense element for suppressing stray magnetic fields along a first axis and a second axis, both of which are parallel to a surface of the substrate and perpendicular to one another. A magnetic field is oriented along a third axis perpendicular to the surface of the substrate, and the magnetic sense element is configured to sense a magnetic field along the first axis. A magnetic field deflection element, formed on the substrate proximate the magnetic sense element, redirects the magnetic field from the third axis into the first axis to be sensed as a measurement magnetic field by the magnetic sense element. At least two magnetic field sensors, each fully encircled by a shield structure, form a gradient unit for determining a magnetic field gradient.
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17.发明申请公开(公告)号：US20190383644A1
公开(公告)日：2019-12-19
申请号：US16011974
申请日：2018-06-19
Applicant: NXP B.V.
Inventor： Stephan Marauska , Edwin Schapendonk , Dennis Helmboldt , Jaap Ruigrok , Ralf van Otten , Jan Przytarski , Jörg Kock
Abstract: A system includes a magnet configured to produce a magnetic field, the magnet having an asymmetric magnetization configuration that produces a distinct feature in the magnetic field. The asymmetric magnetization configuration can be produced via an asymmetric physical characteristic, nonuniform magnetization strengths, nonuniform magnetization distributions, off-centered magnet, and so forth. Magnetic field sensors are configured to produce output signals in response to the magnetic field, the output signals being indicative of the distinct feature in the magnetic field. A processing circuit receives the output signals and determines a rotation angle for the magnet using the output signals, the rotation angle having a range of 0-360°.
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18.发明授权公开(公告)号：US10509082B2
公开(公告)日：2019-12-17
申请号：US15891512
申请日：2018-02-08
Applicant: NXP B.V.
Inventor： Jan Przytarski , Jörg Kock , Stephan Marauska , Edwin Schapendonk
IPC: G01B7/15 , G01B7/30 , H01L43/08 , G01R33/09 , B82Y10/00 , B82Y25/00 , G01D5/14 , G01D5/16 , G01D5/12
Abstract: A system includes first and second magnetic sense elements for producing first and second output signals, respectively, in response to an external magnetic field along a sensing axis parallel to a plane of the first sense element, a magnetization direction of the second element being rotated in the plane relative to a magnetization direction of the first element. The second output signal differs from the first output signal in dependency to a magnetic interference field along a non-sensing axis of the first magnetic field. A processing circuit, receives the first and second output signals, identifies from a relationship between the first and second output signals an influence of the magnetic interference field on the first output signal, and applies a correction factor to the first output signal to produce a resultant output signal in which the influence of the magnetic interference field is substantially removed.
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公开(公告)号：US20190198751A1
公开(公告)日：2019-06-27
申请号：US16286149
申请日：2019-02-26
Applicant: NXP B.V.
Inventor： Mark Isler , Klaus Reimann , Hartmut Matz , Jörg Kock
Abstract: A method includes performing an ion beam etching process on a tunnel magnetoresistance (TMR) stack to remove material portions of a first magnetic layer and a tunnel barrier layer of the TMR stack. The ion beam etching process stops at a top surface of a second magnetic layer of the TMR stack. A protective layer is deposited over the TMR stack. Another etch process is performed to remove the protective layer such that a portion of the second magnetic layer is exposed from the protective layer and a spacer is formed from a remaining portion of the protective layer. The spacer surrounds sidewalls of the first magnetic layer and the tunnel barrier layer. The portion of the second magnetic layer exposed from the protective layer is removed so that a TMR sensor element remains, where the TMR sensor element includes a bottom magnet, a top magnet, and a tunnel junction.
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公开(公告)号：US20190178684A1
公开(公告)日：2019-06-13
申请号：US15836975
申请日：2017-12-11
Applicant: NXP B.V.
Inventor： Stephan Marauska , Jan Przytarski , Jörg Kock , Edwin Schapendonk
IPC: G01D5/244
CPC classification number: G01D5/2448 , G01R33/0005 , G01R33/0017 , G01R33/0029 , G01R33/025 , G01R33/091 , G01R33/093 , G01R33/096 , G01R33/098
Abstract: A system includes a magnetic sense element for detecting an external magnetic field along a sensing axis and a magnetic field source proximate the magnetic sense element for providing an auxiliary magnetic field along the sensing axis. The magnetic sense element produces a first output signal having a magnetic field signal component, responsive to the external magnetic field, that is modulated by an auxiliary magnetic field signal component responsive to the auxiliary magnetic field. A processing circuit identifies from the first output signal an influence of a magnetic interference field on the auxiliary magnetic field signal component, the magnetic interference field being directed along a non-sensing axis of the magnetic sense element, and applies a correction factor to the magnetic field signal component to produce a second output signal in which the influence of the magnetic interference field is substantially removed.
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