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公开(公告)号:US20220234931A1
公开(公告)日:2022-07-28
申请号:US17613731
申请日:2020-05-22
Applicant: ORGANO CORPORATION
Inventor: Fumitaka ICHIHARA , Tsukasa KONDO , Hiroshi SUGAWARA , Koichiro HASHIMOTO
Abstract: Fine particles that are contained in ultrapure water supplied to a point of use is further reduced.
Ultrapure water production system has ultrapure water supply line that is connected to point of uses, wherein ultrapure water flows through ultrapure water supply line; and first ion exchange apparatus, membrane filtration apparatus and second ion exchange apparatus that are arranged in series on ultrapure water supply line. Membrane filtration apparatus is arranged between first ion exchange apparatus and second ion exchange apparatus. At least a part of the ultrapure water that flows out from membrane filtration apparatus is treated by second ion exchange apparatus before the at least a part of the ultrapure water is supplied to point of uses.-
公开(公告)号:US20200070098A1
公开(公告)日:2020-03-05
申请号:US16491989
申请日:2018-02-08
Applicant: ORGANO CORPORATION
Inventor: Fumitaka ICHIHARA , Hiroshi SUGAWARA
Abstract: The level of cleanliness of a hollow fiber membrane device is evaluated before it is installed in an ultrapure water production system. A method of evaluating the level of cleanliness of the hollow fiber membrane device includes capturing fine particles in permeating water by means of a first filter membrane, wherein the permeating water is ultrapure water that permeates through the hollow fiber membrane device before the hollow fiber membrane device is installed in an ultrapure water production system; and analyzing the fine particles that are captured by the filter membrane.
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