公开(公告)号：US20050094700A1

公开(公告)日：2005-05-05

申请号：US10975365

申请日：2004-10-29

申请人： Chun-Hung Ko ,  Hsin-Yueh Sung

发明人： Chun-Hung Ko ,  Hsin-Yueh Sung

IPC分类号： G02B27/09 ,  G02F2/00 ,  H01S3/08

CPC分类号： G02B19/0009 ,  G02B19/0052 ,  G02B27/0944

摘要： A apparatus for generating a structured line having a sinusoidal intensity distribution is disclosed. The apparatus comprises a coherent light source and a diffractive optical element. The coherent light source provides an incident light beam to the diffractive optical element, the incident light beam being modulated by means of the diffractive optical element to form a fringe pattern of sinusoidal intensity distribution. The diffractive optical element design is optimized in accordance with the optical field distribution of an incident-light-beam plane and the optical field distribution of an output-light-beam plane.

摘要翻译： 公开了一种用于产生具有正弦强度分布的结构化线的装置。 该装置包括相干光源和衍射光学元件。 相干光源向衍射光学元件提供入射光束，入射光束借助于衍射光学元件进行调制，以形成正弦强度分布的条纹图案。 衍射光学元件设计根据入射光束平面的光场分布和输出光束平面的光场分布进行优化。

公开(公告)号：US07193697B2

公开(公告)日：2007-03-20

申请号：US11188423

申请日：2005-07-25

申请人： Hsin-Yueh Sung ,  Bing-Shien Chung ,  Wen-Chi Lo ,  Chin-Chiang Liao ,  Miao-Shen Liu

发明人： Hsin-Yueh Sung ,  Bing-Shien Chung ,  Wen-Chi Lo ,  Chin-Chiang Liao ,  Miao-Shen Liu

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/95684 ,  G01N2021/8845 ,  G01N2021/95638

摘要： An apparatus for feature detection of a test object includes at least one light source module and at least one image capturing unit. The light source module provides light to illuminate a test region of the test object, and includes a substrate, a set of light-emitting components, and a light-focusing unit. The light-emitting components are mounted on the substrate for emitting light in parallel directions that are generally transverse to the substrate. The light-focusing unit is to be disposed between the light-emitting components and the test object, receives the light emitted by the light-emitting components, and focuses the light on the test region of the test object. The image capturing unit captures an image of the test object at the test region.

公开(公告)号：US08638445B2

公开(公告)日：2014-01-28

申请号：US13163862

申请日：2011-06-20

申请人： Yu-Hsuan Lin ,  Shih-Yao Pan ,  Hsin-Yueh Sung ,  Alvin Chang ,  Hung-Ta Chien

发明人： Yu-Hsuan Lin ,  Shih-Yao Pan ,  Hsin-Yueh Sung ,  Alvin Chang ,  Hung-Ta Chien

IPC分类号： G01B11/02

CPC分类号： G01B11/24 ,  G01B11/2441

摘要： An imaging apparatus includes a light source; a first beam splitter for reflecting a projection beam emitted by the light source; an objective lens unit including a reflection reference surface for reproducing the projection beam into a measurement beam projected onto an object to generate a first reflection beam and a reference beam projected onto the reflection reference surface to generate a second reflection beam mixing with the first reflection beam and passing through the first splitter and forming an operating beam; a second beam splitter for modulating the operating beam into first and second sub-beams; a monochrome image detection device for passage of the first sub-beam to obtain an interferometric image with monochrome from a first interference region; and an image detection device for permitting passage of the second sub-beam in order to obtain a non-interferometric image from a second interference region.

摘要翻译： 一种成像装置，包括光源; 用于反射由光源发射的投影光束的第一分束器; 物镜单元，包括用于将投影光束再现成投射到物体上的测量光束以产生第一反射光束的反射参考表面和投影到反射参考表面上的参考光束，以产生与第一反射光束混合的第二反射光束 并穿过第一分流器并形成操作梁; 第二分束器，用于将操作光束调制成第一和第二子光束; 用于通过第一子光束以从第一干涉区域获得具有单色的干涉图像的单色图像检测装置; 以及用于允许第二子光束通过以从第二干涉区域获得非干涉图像的图像检测装置。

公开(公告)号：US20070019186A1

公开(公告)日：2007-01-25

申请号：US11188423

申请日：2005-07-25

申请人： Hsin-Yueh Sung ,  Bing-Shien Chung ,  Wen-Chi Lo ,  Chin-Chiang Liao ,  Miao-Shen Liu

发明人： Hsin-Yueh Sung ,  Bing-Shien Chung ,  Wen-Chi Lo ,  Chin-Chiang Liao ,  Miao-Shen Liu

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/95684 ,  G01N2021/8845 ,  G01N2021/95638

摘要： An apparatus for feature detection of a test object includes at least one light source module and at least one image capturing unit. The light source module provides light to illuminate a test region of the test object, and includes a substrate, a set of light-emitting components, and a light-focusing unit. The light-emitting components are mounted on the substrate for emitting light in parallel directions that are generally transverse to the substrate. The light-focusing unit is to be disposed between the light-emitting components and the test object, receives the light emitted by the light-emitting components, and focuses the light on the test region of the test object. The image capturing unit captures an image of the test object at the test region.

摘要翻译： 用于测试对象的特征检测的装置包括至少一个光源模块和至少一个图像捕获单元。 光源模块提供光以照亮测试对象的测试区域，并且包括基板，一组发光部件和光聚焦单元。 发光部件安装在基板上，用于沿大致横向于基板的平行方向发光。 光聚焦单元设置在发光元件与被测对象之间，接收由发光元件发出的光，并将光聚焦在被测对象物的测试区域上。 图像捕获单元在测试区域捕获测试对象的图像。