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公开(公告)号:US20240297067A1
公开(公告)日:2024-09-05
申请号:US18664656
申请日:2024-05-15
Applicant: Richtek Technology Corporation
Inventor: Kun-Huang Yu , Chien-Yu Chen , Ting-Wei Liao , Chih-Wen Hsiung , Chun-Lung Chang , Kuo-Chin Chiu , Wu-Te Weng , Chien-Wei Chiu , Yong-Zhong Hu , Ta-Yung Yang
IPC: H01L21/762 , H01L29/06 , H01L29/423 , H01L29/78
CPC classification number: H01L21/7621 , H01L21/76221 , H01L21/76281 , H01L29/0653 , H01L29/42368 , H01L29/7816
Abstract: A high voltage device includes: a semiconductor layer, a well, a bulk region, a gate, a source, and a drain. The bulk region is formed in the semiconductor layer and contacts the well region along a channel direction. A portion of the bulk region is vertically below and in contact with the gate, to provide an inversion region of the high voltage device when the high voltage device is in conductive operation. A portion of the well lies between the bulk region and the drain, to separate the bulk region from the drain. A first concentration peak region of an impurities doping profile of the bulk region is vertically below and in contact with the source. A concentration of a second conductivity type impurities of the first concentration peak region is higher than that of other regions in the bulk region.
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公开(公告)号:US12062570B2
公开(公告)日:2024-08-13
申请号:US17547829
申请日:2021-12-10
Applicant: Richtek Technology Corporation
Inventor: Kun-Huang Yu , Chien-Yu Chen , Ting-Wei Liao , Chih-Wen Hsiung , Chun-Lung Chang , Kuo-Chin Chiu , Wu-Te Weng , Chien-Wei Chiu , Yong-Zhong Hu , Ta-Yung Yang
IPC: H01L29/78 , H01L21/762 , H01L29/06 , H01L29/423
CPC classification number: H01L21/7621 , H01L21/76221 , H01L21/76281 , H01L29/0653 , H01L29/42368 , H01L29/7816
Abstract: A high voltage device includes: a semiconductor layer, a well, a bulk region, a gate, a source, and a drain. The bulk region is formed in the semiconductor layer and contacts the well region along a channel direction. A portion of the bulk region is vertically below and in contact with the gate, to provide an inversion region of the high voltage device when the high voltage device is in conductive operation. A portion of the well lies between the bulk region and the drain, to separate the bulk region from the drain. A first concentration peak region of an impurities doping profile of the bulk region is vertically below and in contact with the source. A concentration of a second conductivity type impurities of the first concentration peak region is higher than that of other regions in the bulk region.
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公开(公告)号:US20230197730A1
公开(公告)日:2023-06-22
申请号:US18052062
申请日:2022-11-02
Applicant: Richtek Technology Corporation
Inventor: Wu-Te Weng , Chih-Wen Hsiung , Ta-Yung Yang
IPC: H01L27/092 , H01L29/78 , H01L21/8238 , H01L29/66
CPC classification number: H01L27/0928 , H01L29/7816 , H01L21/823878 , H01L29/66681
Abstract: A high voltage complementary metal oxide semiconductor (CMOS) device includes: a semiconductor layer, plural insulation regions, a first N-type high voltage well and a second N-type high voltage well, which are formed by one same ion implantation process, a first P-type high voltage well and a second P-type high voltage well, which are formed by one same ion implantation process, a first drift oxide region and a second oxide region, which are formed by one same etching process by etching a drift oxide layer; a first gate and a second gate, which are formed by one same etching process by etching a polysilicon layer, an N-type source and an N-type drain, and a P-type source and a P-type drain.
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公开(公告)号:US20220223464A1
公开(公告)日:2022-07-14
申请号:US17547829
申请日:2021-12-10
Applicant: Richtek Technology Corporation
Inventor: Kun-Huang Yu , Chien-Yu Chen , Ting-Wei Liao , Chih-Wen Hsiung , Chun-Lung Chang , Kuo-Chin Chiu , Wu-Te Weng , Chien-Wei Chiu , Yong-Zhong Hu , Ta-Yung Yang
IPC: H01L21/762 , H01L29/06 , H01L29/423 , H01L29/78
Abstract: A high voltage device includes: a semiconductor layer, a well, a bulk region, a gate, a source, and a drain. The bulk region is formed in the semiconductor layer and contacts the well region along a channel direction. A portion of the bulk region is vertically below and in contact with the gate, to provide an inversion region of the high voltage device when the high voltage device is in conductive operation. A portion of the well lies between the bulk region and the drain, to separate the bulk region from the drain. A first concentration peak region of an impurities doping profile of the bulk region is vertically below and in contact with the source. A concentration of a second conductivity type impurities of the first concentration peak region is higher than that of other regions in the bulk region.
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